7ND9071en

Unscrew the M4 screws (47, 3 pcs.), M3 screws (48, 2 pcs.) and M3 screw (49). Remove the spool valve assembly. The spool valve may be cleaned if special attention is paid to a clean environment and proper procedure. After unscrewing the M4 screws (47, 3 pcs.) the spool valve may be lifted from the fixture.

Dual Speed Controller with One-touch Fitting Series ASD

Suitable screw torque (Nm) Body size M3 0.07 M5 0.3 1/8 1 1/4 1.5 3/8 4 1/2 10 15-8-6 Flow Control Equipment Precautions Series ASN2 Handling of One-touch Fittings Caution Selection 1. Refer to page 15-1-11 for One-touch Fitting. Warning 1.

HRX-OM-S004

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-T002

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-Q026

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-W032

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

AS

With One-touch fitting Port size M3 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Thread type M5 Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT AS U10/32 01 02 03 04 Nil ASP N ASN Needle Valve/Flow Characteristics AQ AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01

AS

Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Hexagon lock nut Round lock nut J Nil Lock nut option Body size AS AS 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to page 490 for details.)

SYJ300-OMU0003

(3 ) 1V (0.20.25Nm) DIN Y Y DIN DIN 8mm DIN D SY100-61-3-05 DDIN 9.4mm D DIN DC24V 24V SY100-61-3-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100

/

SOL. 2 (, +) 2 (, +) Light Terminal cover Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm A mark + mark 2 1 + A G1/2 Tightening torque 0.5 to 0.6 Nm Round head combination screw M3 Tightening torque 0.5 to 0.6 Nm Conduit terminal View A-A (Internal connection diagram) Conduit When used as an IP65 equivalent, use seal (part no. VCW20-15-6) to install the wiring conduit.

ZP

Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

AC Servo Motor Driver

ABSOLUTE POSITION DETECTION SYSTEM (Continued from preceding page) 3 3 C0 Y1 X2 Resetting ABS data M3 PLS All data receptin counter ABS transfer mode Send data ready M3 ABS data 32 bits (2 bits 16 times) ABS request ON Y2 SET ABS data read Y2 X2 T204 K1 ABS data waiting timer 10ms Checksum 6 bits (2 bits 3 times) ABS request Send data ready T204 Masking ABS data 2 bits K1M10 H0003 K1X0 WANDP

Mist Separator Series AFM20/30/40

, AFM40-06 Drain cock with barb fitting With drain guide With auto-drain (N.C.)

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

Micro Mist Separator

-D 157.6 155.9 151.5 156 171.5 176 -28- Revision history Size 40-06 added.

SYJ Series

SYJ312-5LOZ-M3 SY100-68-A-20 Ex2 Lead wire length of 300mm (standard) SYJ312-5LPZ-M3 Symbol for connector assembly with cover Ex. 1) Cable length: 300 mm In this case, the part number for the connector assembly with cover is not required.

pa

Combination screw M3 Tightening torque 0.5 to 0.6 Nm Combination screw M3 A Conduit terminal View A-A (Internal connection diagram) G + mark mark + 1 2 Series VC A Conduit When used as an IP65 equivalent, use seal (Part no. VCW20-156) to install the wiring conduit. Also, use the tightening torque below for the conduit.

AN

ANA1-01 to 06 ANA1-06: PP How to Order ANA1-01 to 20 A1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 04 1 2 Screw-in 06 3 4 1 4 10 1 12 1 1 2 1 14 20 2 Model (One-touch fitting connection) C08 (8 One-touch fittings size) Effective area (mm2) Weight (g) ANA1-C08 11 5 58 16 A B Dimensions (mm) Model One -touch fitting size 8 10 12 C10 (10 One-touch fittings size) One-touch