Soft Start-up Valve

-1 to 4G(Z)-A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AV4000-04-5 to 6G(Z)-A AV5000-06,10-1 to 4G(Z)-A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 AV5000-06,10-5 to 6G(Z)-A -28- DIN terminal: AV00--D/Y--A (mm) Dimensions Standard specifications Port size A B C D E1 E2 G H J Model 1(P) 2(A) 3(R) AV2000-02-1 to 6D/Y(Z)-A 1/4

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

CL

Use care that auto switch for rail mounting style is not available. 9-2-16 15 Fine Lock Cylinder Double Acting, Single Rod Series CLM2 20, 25, 32, 40 How to Order CL J L E 25 100 H CL1 CLM2 Without auto switch MLGC E J H7BW L 25 H 100 CDLM2 With auto switch CNG Number of auto switches MNB Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 25.1 28.8 30.1 9.6 33.8 M5 x 0.8 8 13.5

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

CJ5-S

RZQ R V Basic style (B): CG5BAS : With air cushion MI W S WA WB GA GB 2-P W 10 H1 Width across flats B1 CEP1 M BM CE1 Max.WH (E1) D CE2 B2 BZ MM AL A Plug bolt (4 pcs. included) ML2B K KA 8-J (F1) C 0.1 H S + Stroke ZZ + Stroke C J G5-S NA CV Stroke range A Bore size (mm) AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA P S MVGQ 20 Up to 350 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

5.6 22 Per hour [J] 56 220 Lock looseness at servo motor shaft (Note 5) [degrees] 2.5 1.2 Number of lockings [times] 20 Lock life (Note 3) Work per locking [J] 5.6 22 For the suppressed voltage 145 V TND20V-680KB (135[V]) Selection example of surge absorbers to be used (Note 7, 8) For the suppressed voltage 370 V TND10V-221KB (360[V]) Note 1.

AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

AC Servo Motor Driver

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Body Size: 6 (1/2 Basis), Port Size: 04 [Cylinder Side (R(PT) 1/2) Pilot Port (Rc(PT) 1/4)], Applicable Tube OD: Ø12

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): -, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): -, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type:

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

-fl Seies

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O,O Non plug-in type @ o End plate (kit) assy MEF363LR-04-t End plates O Joint/clamp O,O . Gasket O,O . O-ring O,O Plug-in type MEF373LH-04-1 End plates O . Joint/clamp O,O . casket O,O .

Table of Contents

(Option ) Multi-connector Socket side only Plug side only DMK6-23 DMK6S-23 DMK6P-23 6 DMK-C-6 DMK6-04 DMK6S-04 DMK6P-04 DMK12-23 DMK12S-23 DMK12P-23 12 DMK-C-12 DMK12-04 DMK12S-04 DMK12P-04 Specifications Applicable tubing materials Nylon, Soft nylon, Polyurethane Applicable tubing O.D.

Mini Free Mount Cylinder

Mounting condition 2 With Magnet (With Auto Switch) Mounting condition 1 6, 8, 10 12, 16 20 Bore size (mm) M3 x 0.5 M5 x 0.8 Port size 5 or more 4 or more 5 or more Stroke (mm) AS121F-M3-02 AS121F-M5-02 AS121F-M3-23 AS121F-M5-23 AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS131F-M3-23 Mounting condition 4 Mounting condition 3 AS131F-M3-04 AS131F-M5-23 AS131F-M5-04 AS131F-M5

LEC-OM02904

) [] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

Compact Cylinder

25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 20 5 to 50 21 17.5 27.5 24 8 8 30 5 29.5 M4 x 0.7 36 2.5 6 3.5 21 3.5 7.5 32 8 25 5 to