AS: AS, Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: Ø6, Option: None, Lock Nut: J (Round)

AS: AS, Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: Ø12, Option: S (Sealant), Lock Nut: J (Round)

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø10, Option: Sealant, Lock Nut: Round

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø8, Option: Sealant, Lock Nut: Round

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø6, Option: None, Lock Nut: Round

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø12, Option: Sealant, Lock Nut: Round

ZP

J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Vacuum Unit

P With manifold common release pressure supply (PD) port Cannot be selected when e is J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping. u Vacuum (V) port W With exhaust interference prevention valve Exhaust interference prevention valve Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" 5 When more than one option is selected, list

Base Mounted Metal Seal/Rubber Seal Series VQ

A combination of J and N is unavailable. Indicate R for the valve with external pilot. 08 8 stations For negative common specifications, refer to Option on page 2-4178.

ZP

K Y A J K B Y C D Misc.

ZP

A D H J B Y C B Y C D H Model Model Misc.

Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-3A-3Option Nil: Common exhaust S: Built-in silencer, direct exhaust Electrical entry F: For F kit P: For P kit J: For J kit L: For L kit S: For S kit VQZ VQD Applicable for L kit only The housing assembly and SI unit of F/P/J/S kit are not included. Separately place an order for q, w, and e. The !

Series VQ Base Mounted Metal Seal/Rubber Seal

A combination of J and N is unavailable. Indicate R for the valve with external pilot. 8 stations 08 Note 1) Insert L (top piping) or B (bottom piping) for elbow type. (VQ1000 only) Example) B6 (Elbow One-touch fittings for 6, bottom piping.) Indicate LM for models with elbow fittings and mixed cylinder port sizes.

CA2

(Example) CDA2WL40-100 Nil J K Nil JJ KK Nil N Cylinder stroke (mm) For more information, please refer to the next page.

CV/MVGQ

D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL CC BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M RB BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 J D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 DMounting bracket belongs to D-A3C/A44C/G39C

CV/MVGQ

D-A5/A6/A59W/F5/J5 D-F5W/J59W/F5NTL/F59F D-A3/A44/G39/K39 D-B5/B64/B59W/G5/K59 D-G5W/K59W/G59F/G5NTL CC BT-04 BT-04 BT-06 BT-08 BT-08 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M RB BA-04 BA-05 BA-06 BA-08 BA-10 D-A3C/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 J D-Z7/Z80/Y59/Y69/Y7P D-Y7PV/Y7W/Y7WV BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 DMounting bracket belongs to D-A3C/A44C/G39C