REA/REB

106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 W PP TW PB S PA ZZ P Z NT XB NL Model N REAH15 REAH20 REAH25 21 65 62 161 50 17.5 M5 x 0.8 194 8 88.5 15 16.5 23 70 65 169 50 19.5 Rc 1/8 205 8 92.5 15 18 27 75 75 209 65 23.5 Rc 1/8 250 9 103 9.5 18 20.5

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Vacuum Pad

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Vacuum Pad

) M5 x 0.8 2.5 3.5 (11) 5 1.5 1.5 15 15.7 6 Series ZP2 Dimensions: With Adapter ZP2-TB02EU-H5 ZP2-TB04EU-H5 M5 x 0.8 M5 x 0.8 3.5 3.5 1.5 7 7 Width across flat 1.5 (Hexagon) 1.5 (9) Width across flat 1.5 (Hexagon) (9) 4 4 1.2 0.5 0.5 1.5 2 4 2.6 4.8 ZP2-TB06EU-H5 ZP2-T08EU-H5 M5 x 0.8 M5 x 0.8 1.5 3.5 1.5 3.5 7 7 (9) Width across flat 1.5 (Hexagon) (9) Width across flat 1.5 (Hexagon) 4 4

Electric Actuator

L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 110.5 135.5 160.5 185.5 210.5 235.5 260.5 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 No. L 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 285.5 310.5 335.5 360.5 385.5 410.5 435.5 460.5 485.5 510.5 273 298 323 348 373 398 423 448 473 498 Trademark DeviceNet is a trademark of ODVA.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

SMC

x 0.8 thread depth 5.5 Operating port 2-M5 x 0.8 11 3 Vacuum sunction port M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA-M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end 12 6 N-M5 x 0.8 thread depth 6 (Insert) 6 4-M5 x 0.8 thread

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

Rotary Table/Rack & Pinion Style Series MSQ

x 0.8 7.5 2.5 6 4 5.5 3 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 4.5 M5 x 0.8 M5 x 0.8 7.5 2.5 6 5 5.5 7 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 4.5 (mm) JK P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 S WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x

Compact Cylinder with Lock Series CLQ

range Without auto switch With auto switch Bore size (mm) A B A B 80 23 33 70 80 10 to 50 75, 100 33 32 Rod end nut 28.5 Double clevis type: CLQD32 10 hole H10 Shaft d9 5 4-M5 x 0.8 Cap bolt 52.7 A + Stroke CL + Stroke 20 14 10 7 32 B + Stroke +0.4 +0.2 18 36 0.1 0.3 Double clevis type (mm) Stroke range Without auto switch With auto switch Bore size (mm) A B CL A B 82 92 CL 102 23 33 92

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

. 168 156 0.5 PE 3-M5 screw Screw size: M4 Tightening torque: 1.2 [N m] 42 0.3 Approx. 12 Approx. 6 Mounting hole process drawing 9 4 9.

Rotary One-touch Fittings Series KS/KX

Weight (g) M5, M6 M D1 D2 L1 L2 A Nylon Urethane M5 0.8 M6 1.0 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 16 2.5 21 10.4 12 3.5 3.5 1 8 M5 0.8 M6 1.0 23.5 23.5 12 14 22 21 21.5 23 26 26.5 29.5 31 34 35 38 36.5 39.5 2.5 3 3.5 5.0 3.5 5.0 8 12 24 23 12.8 14 17 6 1 8 1 4 25.5

KS/KX

(mm) Connection thread R Effective area (mm2) Min. port size <M5, M6> <M5, M6> Weight (g) M D1 D2 L1 L2 A Model Nylon Urethane M5 x 0.8 M6 x 1 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 12 10.4 21 16 2.5 3.5 3.5 23.5 23.5 1 8 M5 x 0.8 M6 x 1 12 14 22 21 21.5 23 2.5 3 3.5

Series IDG

to 131F) Note 1) 5 to 55C (23 to 131F) 5 to 55C (23 to 131F) Note 1) 5 to 50C (23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1)

MHZ

+0.052 0 +2.2 0.2 MRHQ 20 29 18 When closed 16.3 When open 26.3 9.5 52.8 Misc. 27.6 0.05 84.8 2-M5 x 0.8 thread depth 10 D(Mounting thread) 20M5 x 0.8 (Finger closing port) 4-M4 x 0.7 (Thread for mounting attachment) M5 x 0.8 (Finger opening port) 15 Auto Switch Mounting Groove Dimensions 10 0 0.05 5 9 10 6.2 23 Auto switch mounting groove 5 For single action, the port on one side is a