2/3 Port Valve

Flange M L K J I H G F E D C B A 310.5 326 350 303.5 319 343 300.5 316 340 256.5 272 296 244 259.5 283.5 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 1 8 1 4 1 4 32 40 50 VNB5-32F VNB6-40F VNB7-50F 4.2-17 VNB Construction Principles of Operation (The vacuum pilot style is excluded) 1 4 1 4 VNB0 , 1 1 (N.C.)

LEC-OM02904

) [] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

90

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

5-Port Solenoid Valve

23 46.1 81.1 5 Refer to panel fitting dimensions for details.

CS1

45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90 115 18.5 20 46 226 182 17 60 50 48 44 63 25 74 39 40 100 M45 X 1.5 M24 X 1.5 63 to 1200 140 23 25 56 110 277 225 67 60 60 20 55 71 30 86 49 50 126 M56 X 2 1 M30 X 1.5 80 to 1200 65 140 23 30 130 330 270 80 76 37 70 96 60 20 49 68 63 160 M64 X 2 With auto switch/125 to 200 only (mm) W/o rod boot W/rod boot (mm) W/

33

x Depth 580 HRSE018-A-23 HRSE024-A-23 HRSE012-A-23-T 48 Height 790 x Width 470 x Depth 580 HRSE018-A-23-T HRSE024-A-23-T IDH Selection Warning 1.

Air Slide Table Series MXP

2.4 Z 3.5 , depth 2 2.5 +0.030 0 7 +0.030 0 , depth 2 2.5 Q QL MXPJ6-10 4 x M3 x 0.5, depth 3 F (mm) E F H J M Q QL S Z Model MXPJ6-5 23 25 38 27 37 28 8 5 44 MXPJ6-10 30 35 53 42 47 37 11 10 59 200 Air Slide Table Series MXP Note) Since the body and table are made of a magnetic substance, it could become magnetized if touched by a magnet, etc.

Rotary Table/Rack & Pinion Style Series MSQ

EE) YB effective depth YC GB GA EC ED ND 2 x J through JA counter bore depth JB 2 x K Shock absorber BD EF YA 2 WF Position of bottom positioning pin hole DD Note 1 Effective depth FB D NA 2 x JC depth JD BB 2 x P Port DE GD FA FD Effective depth FC GC 0.5 NB NC CB Q H (UU) SD SE BC DF (Through) SF A AA CA BA BA DG S Note 1) This part is not available with 180 specification.

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

Slider Type/Ball Bushing Bearing

J A N PS W PP Z + Stroke Square nut insertion Square nut insertion TW NL (mm) PA 65 66 Model A 125 132.5 CY1HT25 CY1HT32 EB 79 90 H 63 75 HA 46 52.5 HB 46 57.5 HC 61.5 72.5 HG 19.5 25 HP 58.5 69.5 HT 35 43 J M6 x 1.0 M8 x 1.25 LL 56 63.5 LW 119 130 M M6 x 1.0 M8 x 1.25 MM 10 12 N 20.5 23 NL 18 22.5 NT 9 12 EA 28.5 30 Model PB 108 115 CY1HT25 CY1HT32 PS 51 61 S 209 219 TW 110 124 W 136 150

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Applicable auto switches/ Refer to pages 21 through 23 for detailed auto switch specifications. Wiring (output) Special function Auto switch part nos. Tie-rod mount Band mount Load voltage Lead wire length Note 1) Indicator light Built-in magnet cylinder part nos. Applicable load Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) AC DC 3 wire NPN (equiv.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Refer to the dimensions on page 562 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

L1 L2 L3 L4 110.5 123 135.5 148 160.5 160.5 173 185.5 198 100 112.5 125 137.5 150 150 162.5 175 187.5 77.8 87.8 97.8 107.8 117.8 127.8 137.8 147.8 157.8 19.5 20.5 22 23 24 19 20 21.5 22.5 20 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 10 [

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

Rotary Table

0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J] 1.210[J] 1.820[J] With adjustment bolt 0 to 190 Note2) With internal

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MXP8-20 22 23 3 0 +0.030 depth 3 3 0 +0.030depth 3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

CXS

6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0 x 18.5 53 CXS20 2-M5 x 0.8 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 7.5 80 30 78 28 14 60 35 6 12 12 30 12 M6 x 1.0 x 18.5 64 CXS25 2-M6 x 1.0 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 8 98 38 96 36 18 75 44 8 16 14 30 16 M8 x 1.25 x 23 76 2-M6 x 1.0 CXS32 PP Q QQ R T TT U W X Y Model UU V

JXCx-OMU0004

P.50 34 No.JXC-OMU0004-A 7.3 SW (A) (B) PLC PLC SW (C) A,B,C A B C I/O I/O I/O 35 No.JXC-OMU0004-A A e i j PLC h 15 8.1 P.40 8.4 P.43 36 No.JXC-OMU0004-A B PLC I/O PLC PLC PLC PLC 3 i j 3 PLC PLC PLC PLC I/O g 7 LED f L L (1) 7 LED f (2) (3) 3 k n c 37 No.JXC-OMU0004-A C h [15] g 2 i j i h j g i 2 j i i h [0] j j 3 g 3 i OFF j 3 2 e h 0 h i g 3 j

Compact Manifold Regulator Series ARM5

L dimension 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 No. L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.