CYP

-06 2.

JXCx-OMT0061CN

(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

JXCx-OMX0009

Unlock Hold External lock 0mm/s Speed T2: Communication cycle time: 2 times or more T3: 3 s or less (System initialize time Time required for reading position data) 79 - 15.

JXCx-OMT0062

Completed to move to 10mm away. 70 - 13.2 Pushing operation Example) Move the electric actuator from the origin to 100mm point with 100mm/s. (Using Step No.1) From the 100mm point, the electric actuator starts the pushing operation of 10mm/s speed and 50% or less force (the pushing distance is up to 5mm).

VEX1

Condition: Pressure 0.5MPa, Load 50%, Piping length 5m Effective area mm 2(Cv ) Cylinder speed (mm/s) 50 63 80 100 125 140 Bore size (mm) 160 180 200 250 300 Port size Rc(PT) 40 250 25(1.4) VEX312 -01, 02 500 750 02 ( 1 4) 60(3.3) 250 500 750 250 500 750 500 750 1000 500 750 1000 250 500 750 250 500 750 VEX332 -02, 03, 04 Body ported Base mounted 03 (3 8) 160(8.9) VEX350 -04, 06, 10 06 (3

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-67 Series ASD-FM How to Order ASD 3 3 0 F M 01 06 S With seal M5 and U10/32 types, as they are not available with seal. Body size 2 3 4 M5 standard 1/8 standard 1/4 standard Type Applicable tubing O.D.

REC

100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Fluoropolymer Piping Equipment

B C E E H L1 L1 L2 L2 M Min. port size LQ3E2A-S 1/4" 4 6 17 16 16 34.5 33.5 39.5 38.5 20 3.9 LQ3E3A-S 3/8" 5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25 6.3 LQ3E4A-S 1/2" 6 10 24.5 22.5 24 52.5 50.5 54.5 52.5 29 9.5 LQ3E5A-S 3/4" 7 14 26.5 24 32 64 61.5 66 63.5 37 15.8 LQ3E6A-S 1" 8 18 30 26 41 78 74 80 76 49 22 LQ3E7A-S 1 1/4" 9 22 35 35 50 92.5 92.5 97.5 97.5 64 28 M H Class 7 929 A LQ3 Series

VM

JIS Symbol 2 port Roller plunger VM122-M5-06 VM132-M5-06 VM122-M5-06S VM132-M5-06S Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port 0.5 MPa supply R port (3 port only) 2-M5 x 0.8 depth 4 T.T. O.T. P.T.

VZS

Other dimensions are the same as the grommet type. 3-7-12 13 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol JIS Symbol 15-9-57 Series AS-FM How to Order AS 2 2 0 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With seal M5 and U10/32 are not available with seal. Type 2 3 Elbow Universal Applicable tubing O.D.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

C S S Motor Type S AC Servo motor Cable Content AC Cable Length (L) [m] SSCNET Cable S 0.15m L 0.3m K 0.5m J 1m 1 3m 3 c I/O Connector (For LECSS-S/LECSS2-T)-CS Driver Type LECSS S *LE-CSNS is 10126-3000PE (Connector)/ 10320-52F0-008 Shell kit of Sumitomo 3M Limited or equivalent goods.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) PB PA A B (mm) Dimensions U S T U Model LVD2-S LVD3-S LVD4-S LVD5-S 11.5 28 9.6 26 34 17.5 26 35 20 29.5 57 25 17-5-49 8 Tube Extensions Series LVD How to Order Body class LVD 2 0 06 T Option Symbol 2 3 4 5 None With flow rate adjustment Nil 1 Orifice dia. 4 8 10 16 Body class 2 3 4 5 Note) Refer to Variations in the table below for option combinations.

KB

Different Diameter Module: KBR Component module T KBP2 KBV2-06 3 KBL2-R2S 1 KBP2 1 Model Body size VMG KBR2-1 KBR3-2 KBR4-3 KBV2-06 KBL2-R2S 4 Plug/Cap: KBP, KBC (P . 15-3-117) Component module KBV2-06 3 KBE2-06 1 KBP2 1 KBP2 KB P 1 KBE2-06 Body size KBE2-06 KBV2-06 Model Plug: KBP Cap: KBC Component module KBV2-06 2 KBE2-06 2 KBN2 1 Model Model Bracket mounting thread M6 x 1 x

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

Air Cylinder Series CA2

Rc NPT G Nil TN TF Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

LEC-OM07605CN

PA23] STO IEC/EN 61800-5-2STO ON/OFF (MR Configurator2) SSCNET/H (MR Configurator2) (MR Configurator2) 1 8 1. 1.6 (1) LECS S 2 T5 S SSCNET/H ACT5, T6 T5 50W,100W ACT7 200W T7 ACT8 400W T8 (2) a) ACT9 T9* 750W * AC200VAC240V 50/60Hz 2 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R 1 9 1. bSSCNET (LECSS-S/LECSS2-T) LE-CSS-MR-J3BUSM cI/O (LECSS-S/LECSS2-T) 1 LE C S

0.55

Since voltage drops due to the internal circuit in S, Z, T types (with power saving circuit), the allowable voltage fluctuation should be within the following range.