(Full span) 0.05 to 0.7 MPa Rc AF Mounting Linearity (3) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Signal pressure (3) IR 1 8 Signal port PA (3) 02 03 02 04 04 06 10 10 12 14 20 01 Port P A R M5 01 M5 01 01 02 VEX Port size Rc (4) (4) 1 2 1 1 1 4 1 1 8 1

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

8 for details. 711 AS-FPQ/FPG Series How to Order AS 2 1 1 2 F P Q 01 06 Lock nut option Nil J Body size Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

CG1

1 !2 !3 !4 !5 !

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

Sine Rodless Cylinder Series REA/REB

Table (3) Recommended Speed Controller Bore size (mm) Model Elbow type Straight type In-line type AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 10 15 20 25 32 40 50 63 Caution AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 1.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

•

er 25-"25 ' GN~Electric NBR(2416) 32-132 "GS-Electric silicon rubber 40-.40 (2416) B3 M3 x O.5 B5 M5 x O.8 .h BOt Yo r N4 ' ~ 4 Nylon tube U N6 . 9'16 Nylon tube ~ U 4 : 9'1 4 Urethane tube ~ U S 16 Urethane tube if 04 14 tube 06 6tube &1 08 ~ 8 tube I ..1 A8 Ma x1 AlO M10 x 1 i~ A14 M14 x 1 I TI>:ead dia/Poi!

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Type 40/41 How to Order 10--SS3YJ7-40 -05 --01 Applicable solenoid valve 10-SYJ714M10-SYJ724MR port 1/4 R port 1/8 Clean series Applicable blanking plate assembly SYJ700-10-2A Manifold P, R port thread 40 41 Type 40 Type 41 Stations Nil Rc G NPT NPTF A A A A 2 stations : 20 stations 02 : 20 F N T P Port 1/8 P Port 1/4 01 1/8 A port size A port 1/8 A port 1/8 Note) For more than 6 stations

OMU0023

Step Request data Response data Operation details 1 01 06 0412 000A 01 06 0412 000A Sets Step Data No. 1 Positioning time to 0.1 sec. 01 10 0410 0002 2 01 10 0410 0002 Sets Step Data No. 1 Target position to 10 mm. 04 0 2710 (4) Return to Origin Change the Card Motor controller (controller ID1) operation mode to serial operation, and send a Return to Origin instruction.

SYJ300/500/700

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5