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Also, do not use the filter when these chemicals are present in the atmosphere. 2 Series ZB How to Order Manifold S 01 ZZB 08 M5 Stations Pressure Sensor/Vacuum Pressure Switch Mountable Note) Sensor/switch non-mountable base Sensor/switch mountable base Nil S 01 02 1 station 2 stations Note) Select S when the model with either the pressure sensor or the vacuum pressure switch is selected

C S S Motor Type S AC Servo motor AC Cable Content Cable Length (L) [] SSCNET Cable S 0.15m L 0.3m K 0.5m J 1m 1 3m 3 c I/O Connector -CS Driver Type LECSS S *LE-CSNS is 10120-3000PE (Connector)/ 10320-52F0-008Shell kitof Sumitomo 3M Limited or equivalent goods.

I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS ON THIS

P1 P1 within 0.5 s P2 Output Output stops if either of the inputs are applied or neither are applied.

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 28.8 25.1 30.1 9.6 33.8 M5 x 0.8 8 13.5

: 0.56 34.2 (1.9) 34.2 (1.9) 33 (1.8) 36 (2) 45 (2.5) 52 (2.9) 02 03 04 1 8 3 8 1 2 1 4 , , : 0.52 02 03 04: 0.57 1 8 45 (2.5) 52 (2.9) VFA5244 2 position double 02 03 04 3 8 1 2 1 4 , , Body ported : 0.66 02 03 04: 0.71 VFA5344 -X1 3 position closed center 1 8 34 (1.9) 38 (2.1) 02 03 04 JIS Symbol 3 8 1 2 1 4 , , 2 position double 2 position single : 0.66 02 03 04: 0.71 VFA5444 -X1 3 position

) P, S, T Internal speed limit 1 T PD09 *DI4-1 Input signal device selection 4L (CN1-6) P, S, T PC07 SC2 Internal speed command 2 S PD10 *DI4-2 Input signal device selection 4H (CN1-6) P, S, T Internal speed limit 2 T PD11 *DI5-1 Input signal device selection 5L (CN1-7) P, S, T PC08 SC3 Internal speed command 3 S PD12 *DI5-2 Input signal device selection 5H (CN1-7) P, S, T Internal speed

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC 100 VAC 200 VAC Conduit terminal 24 VDC A01-01-63 A01-02-63 A07-52-63 A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

Also, use AN110-01 for silencer for pilot EXH. VFR VP7 Individual SUP Style An individual SUP spacer (VV72-P-03, 04) mounted on the manifold-block allows each valve to be supplied individually.

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

DIN rail for 9 stations F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit When ordering DIN rail only F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Type T2 T1 DIN rail no.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length.

00 Straight type AKH 04 A 01 S Male connector type With seal (Standard) M5 and 10-32 UNF types are not required.

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

HRR Series 3.1 Precautions wiring communication 3-1 HRX-OM-W004 Chapter 3 Serial communication 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly *1 AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S *2 Round type *3 Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 Round type *3 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure gauge 0.02