AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

4/5 Port Solenoid Valve

port R P A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

Table of Contents

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

Compact Cylinder

32 30 D Z CQ2 B R 32 to 100 30 M9BA B CDQ2 32 Z R D With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B A L F G D Nil S n 2 pcs. 1 pc. n pcs.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Air Cylinder Series CM2

U L RR Z + Stroke 20 CX CZ ZZ + Stroke N L Stroke Head side trunnion style: -H -R -W -H -R -W N L Stroke Rod side trunnion style: CBM2U Bore size CBM2T Bore size TY TD TT Z + Stroke ZZ + Stroke Z TT TZ TX ZZ + Stroke (mm) Axial foot style Trunnion style Clevis style Flange style Bore size (mm) Stroke range Stroke range Stroke range Stroke range Z Z ZZ FX LD FT LH B LC LS LT LX LZ X Y Z ZZ

NCQ2/CQ2

Note 2) ( ): Same dimensions as for those of -X202 Dimensions: Applicable to CQ2B -10D(C)Z Only 20 32 Double acting, Single rod Single acting, Spring return Single acting, Spring extend A B L A B L B A L Symbol Bore size Symbol Bore size Symbol Bore size 20 32 33 29.5 3.5 20 32 33 29.5 3.5 20 32 43 29.5 13.5 A B L A B L A B L 36.5 33 3.5 36.5 33 3.5 46.5 33 13.5 With Auto Switch: Applicable

5

Trunnion pivot bracket TX TZ TO TO Z + 1/2 Stroke TY B 4 x TT TD TS TH TF TC B 2 x TR TA TL TU TU (mm) Part no.

Table of Contents

Color of lead wire Black Symbol Contact C Z I SE3 Common A White Normally Open B (N.C.)

Electric Actuators

B 89 A A B Section BB Coupling P.C.D.

Table of Contents

B 89 A A B Section BB Coupling P.C.D.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

smcmaintenancepartslist

Contents Contents @1 @2 @3 @4 Piston seal MGP12-Z-PS MGP16-Z-PS MGP20-Z-PS MGP25-Z-PS MGP32-Z-PS MGP40-Z-PS MGP50-Z-PS MGP63-Z-PS MGP80-Z-PS MGP100-Z-PS 12 16 20 25 32 40 50 63 80 100 Rod seal Set of left nos. @1, @2, @3, @4 Set of left nos. @1, @2, @3, @4 NBR Gasket A Gasket B Seal kit includes @1 to @4. Order the seal kit, based on each bore size.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

5-Port Solenoid Valve

Overall manifold length Overall manifold length Approx. 29% reduction SY5000 manifold SY5000: 3 stations SY3000 manifold SY3000: 4 stations Mixed manifold SY5000: 3 stations, SY3000: 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A 14 A 14 A 14 A 14 A 14 A 14 A 14 A 14 B 12 B 12 B 12 B 12 B

Smooth Cylinder/Low Speed Cylinder

REA REB REC CY CY CX MQ RHC RZQ D-X 1175 Smooth Cylinder Series CQ2Y 32, 40, 50, 63, 80, 100 How to Order B 32 30 D C Z CQ2Y B M9BW 32 30 D C Z CDQ2Y With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting style 2 pcs. 1 pc. n pcs.

Table of Contents

closed center: VFR630 -F(Z) 3 position exhaust center: VFR640 -F(Z) 3 position pressure center: VFR650 -F(Z) 0 1 0 1 0 1 2 position double: VFR620 -F(Z) 263 3-2.3 146 93 (Electrical entry) 45 117 A B A B 72 90 108 PE EA EB PE P Manual override 170 186 4-9 (Mounting hole) (Non-locking) G 1/2 Light/Surge voltage suppressor (For FZ) Other dimensions are the same as the single type. 3-5-97

Air Cylinder

CM2 A B Z 40 150 CDM2 With auto switch M9BW 150 A B 40 Z Port thread type Number of auto switches Rod end bracket With auto switch (Built-in magnet) Nil Rc TN NPT TF G Nil None V Single knuckle joint W Double knuckle joint Mounting Nil 2 pcs. S 1 pc. n n pcs.

Magnetically Coupled Rodless Cylinder

, z + A = 100 y, z + A a 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A =