Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

CG1

, C8 D-C73C, C80C D-C7, C8 D-H7 D-H7W D-H7F D-H7BAL D-B5, B6 D-B59W D-G5, K5 D-G5W D-K59W D-G5NTL D-G59F D-G5BAL D-B5, B6 D-G5W, K59W D-G59F D-G5BAL D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-C73C D-C80C D-H7 D-H7C D-B59W Bore size A B A B A B A B A B A B HS HS HS 20 9 3 6 8 6.5 4.5 24.5 27 27.5 20.5 14.5 17.5 19.5 18 16 25 9 3 6 8 6.5 4.5 27 29.5 30 20.5 14.5 17.5 19.5 18 16 32 10 4 7 9 7.5

LEC-OM02704CN

1 9 2 A 1 3 DOG B 2 4 C 3 5 D 4 6 1 E 5 7 2 F 0041h 1 bit0bitFOFF/ON (OFF/ON) bitF bit0 bit bit 0 8 1 9 2 A 3 6 B 4 7 C 1 5 8 D 2 6 E 3 7 F 0042h 2 bit0bitFOFF/ON (OFF/ON) bitF bit0 bit bit 0 8 1 9 2 A 3 B 4 C 5 D 6 E 7 F 15 17 15 (RWrn3) () 0050h 0 bit0bitFOFF/ON (OFF/ON) bitF bit0 bit bit 0 8 1 9 2 A 3 B 4 C 5 D 6 E 7 F 0051h 1 bit0bitFOFF/ON (OFF/ON) bitF

Compact and Lightweight

Model Rc1/8 Rc1/8 Rc1/8 ZH05DA ZH07DA ZH10DA NPT1/8 NPT1/8 NPT1/8 ZH05DA ZH07DA ZH10DA Screw-in Screw-in EXH. SUP. Rc1/8 Rc1/4 Rc1/4 ZH13DA NPT1/8 NPT1/4 NPT1/4 ZH13DA Rc1/4 Rc3/8 Rc3/8 ZH15DA NPT1/4 NPT3/8 NPT3/8 ZH15DA Rc3/8 Rc3/8 Rc3/8 ZH18DA NPT3/8 NPT3/8 NPT3/8 ZH18DA Rc3/8 Rc1/2 Rc1/2 ZH20DA NPT3/8 NPT1/2 NPT1/2 ZH20DA Screw-in VAC. Silencer and standard bracket are available.

HRX-OM-W058

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid . 8-7 Chapter

LVQ

/8 (NPT 1/8) N M C A B D LVQm0-S shown.

HRX-OM-X027

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid . 8-7 Chapter

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

_ _ 1 A 346 _ _ 0 B 818 _ _ 1 B 333 _ _ 0 C 750 _ _ 1 C 321 _ _ 0 D 692 _ _ 1 D 310 _ _ 0 E 642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 8 7.

HRX-OM-W038

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

HRX-OM-M090

4 to 8-8.

Mini Free Mount Cylinder

to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Clean Series Nil 2 pcs. 1 pc.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

18 15 M30 x 1.5 1/8 18.5 87 13 20 3 4 160 179 40 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 22.5 108 16 20 5 0 182 205 9 Hydraulic Cylinder: 7MPa Series CHN Accessories (Standard) Rod end nut Material: Carbon steel Mounting nut Material: Carbon steel 30 30 d d C D C D H B H B Part no. d H B C D Applicable bore size (mm) Part no. d H B C D Applicable bore size (mm) SO-02 SO-03 SO-04 SO-05 NT-02

KB

KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 8 10 14 19 16.8 21.0 28.6 30.4 29.5 23.0 27.5 31.5 11.5 5.0 6.5 9.5 19.0 12.5 16.0 19.5 6.0 6.3 11.4 24.1 1 8 1 4 K M H Female Connector Socket: KBS D H (width across flats) T Weight (g) Model D L1 L2 A Connection thread MS KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 3 8 Rc 1 4 Rc 1 8 14 17 19 24 13.6 17.6 25.2 27.0 28.0 33.5 38.5 39.0 11.0 14.0 17.0 20.0 25.0 30.0 34.5

JXCx-OMX0009

Return of parameter rewriting 8 Deceleration 9 Pushing 9 (No used) force A A Trigger LV Set always OFF(0) (No used) B B Pushing speed C C D Data editing error receiving D (No used) E Parameter anomaly detection E Set always OFF(0) F The abnormal station detection F 0 Start flag 1 F to 0 Current position 1 Sub Function 7 to 1 (No used) *4) F to 8 Movement MOD 2 F to 0 2 F to 0 Speed Address

5

Operating Range (mm) (mm) Auto switch model Bore size 20 25 32 40 D-M9l(V) D-M9lW(V) D-M9lA(V) 3.5 3 3.5 3 Auto switch model Bore size 20 25 32 40 D-B59W 12 12 13 13 D-H7l/H7lW D-G5NT/H7NF 4 4 4.5 5 D-A9l(V) 6 6 6 6 D-C7l/C80 D-C73C/C80C 7 8 8 8 D-H7C 7 8.5 9 10 D-G39A/K39A 8 9 9 9 D-B5l/B64 D-A3lA/A44A 8 8 9 9 * Values which include hysteresis are for guideline purposes only, they are not

HRX-OM-R016

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility

NCQ8

Minimum Auto Switch Mounting Stroke (in) D-M9, D-M9W D-M9V, D-M9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) 2 1 0.25(1/4") 0.62(5/8") 0.62(5/8") 0.25(1/4") 1.00(1") 0.37(3/8") 2 0.87(7/8") 0.25(1/4") 0.37(3/8") 0.25(1/4") NCDQ8A(B)-T(M) 1 0.37(3/8") 0.37(3/8") 37 Series NCQ8 Auto Switches/Proper Mounting Positions and Height

NCQ8

Minimum Auto Switch Mounting Stroke (inch) D-M9, D-F9W D-M9V, D-F9WV No. of auto switches D-A9 D-A9V D-F9BAL Model NCDQ8A(B)-(C)(M) NCDQ8A(B)-100S(M) NCDQ8A(B)-200S(M) NCDQ8A(B)W-(C)(M) NCDQ8A(B)Z-(M) NCDQ8A(B)Z-100S(M) NCDQ8A(B)Z-200S(M) NCDQ8A(B)Z-100T(M) NCDQ8A(B)Z-200T(M) 0.62 (5/8") 0.25 (1/4") 0.62 (5/8") 0.25 (1/4") 1.00 (1") 1 0.62 (5/8") 0.37(3/8") 0.62 (5/8") 0.25 (1/4") 1.00 (1

HRX-OM-R005

Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid Quality . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Discharge of the circulating fluid and facility