LEC-OM02704CN

(2) (b) (3) (c) 7 8 7MR Configurator (4) (d) (5) (e) 1 (6) (f) (7) (g) Enter (8) (9) (10) (11)(h) 7 9 7MR Configurator 7.6 PD12PD14 (1) 7 10 7MR Configurator (2) (a) DIDO a b d c (a) (b) (c) (d) 7 11 7MR Configurator (b) DIDO a b DIDO ON(a) ON (2)(c) (b) 7 12 7MR Configurator (c) ON DIDOON a b c d e ONONON ON(a) ON ON(b) ON ON(c) ONON ON(d) ON ON(e) 7

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(35) 34 Station (12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6 D side 9 9 10.5 10.5 58 37 95 (Single) (C6, C8) 17.5 10.5 (C10) 116.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Grommet (G) (35) n-C6, C8, C10, 02 (11) 33.5 2-4.5 mounting hole (5.5) C8: One-touch fitting for 8 C6: One-touch fitting for 6 (7.5) 24 DIN rail clamp screw (2.5) C10: One-touch fitting for 10 02: Rc 1/4 U side n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P = 19 1 21 6 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

Direct Solenoid

P80601 1 Faoltcrir*rl coll-A-c. solanold l lli/1m V 3y60 Ha. 120t60 Nt@ aa)a) qIA{S c01ar0 qIA.11 10 '| Solanold str. n!

4/5 Port Air Operated Valve Series SYJA3000

Valve mounting direction Stations 02 Single solenoid coil is on opposite side as the A, B port. 2 stations Nil + + A + + + + + : : R P P R R port M5 x 0.8 R port M5 x 0.8 Single solenoid coil is on same side as the A, B port.

SZ3000

Particularly when using a C-R element (surge voltage suppressor) for the protection of a switching element, take note that leakage voltage will increase due to leakage current flowing through the C-R element.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

CE-compliant Valve mounting direction Stations R port Nil Pilot valve is opposite the A port side. 02 2 stations A A M5 x 0.8 Nil R port P R Q CE-compliant : : A A M5 x 0.8 A port M3 x 0.5 P port M5 x 0.8 Pilot valve is on the A port side. 20 S 20 stations P port M5 x 0.8 A port M3 x 0.5 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of

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Flat w~h rib (mm) Model . .A .8 C JD ' Model 'A .8 C D E F I:M6x1 I:Ma XI y I I: Ma x l Y E F I r.M6 Xl G c H G H ..JatlFlat1>ilt1 rib I . .

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

Rubber seal 5 Port Solenoid Valve Series SYJ7000

B port Porting specifications Direction 1/8 1/4 P, R port C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port 2.2 1.4 1.7 2.1 1.4 1.8 2.1

3 Port Air Operated Valve Series SYJA300

Valve mounting direction ( ) Stations Pilot valve is opposite the A port side. Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2 9 3.1 Lateral connector entry 8 36.3 5.5 35 6.5 18 28.8 34

0.01

(A + 72 + B) 76.5 (72 + A) 77 (72 + A) Total length 125.5 (A + 114.5 + B) 120 (114.5 + A) 125.5 (A + 114.5 + B) 120 (114.5 + A) 120 (114.5 + A) Port size w C06 (C04) 02 (C04) C08 (C06) 02 (C06) 02 (C08) Port size w C10 (C08) 02 (C08) C12 (C10) 02 (C10) 02 (C12) Model Port size q C04 (C06) C04 (02) C06 (C08) C06 (02) C08 (02) Model Port size q C08 (C10) C08 (02) C10 (C12) C10 (02) C12 (02

5 Port Solenoid Valve SY Series

BEA/EB) Grommet Cv b C (kdm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 1, 5, 3 4, 2 (A, B) 1, 5, 3 4, 2 (A, B) DIN terminal (sbar)) Cv b C (kdm3/ (sbar) ) Cv b C (dm3/ (P, EA, EB) (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 129 175 (sbar) ) (sbar) ) Single Single 2 position 125 167 2 position 0.23 0.93 4.1 3.3

LEC-OM07605CN

(c) AERSBAN-_SET SD [:mm] (A B) 40 [mm] [mm] 2-5 17.5 30 B0.3 10 L A 35 C +0.3 6 -0.2 24 0 24 0 3 7 6 22 ()M4 3 5 11 . A B C L AERSBAN-DSET 100 86 30 2 A 70 AERSBAN-ESET 70 56 B1 B 45 11 22 11.

Series AK1000

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 68 2 x 3.4 68 28 [mm] 28 Model A C D P PF2M705/710W-C4(-L) 86.2

VM

VM220-02-30B VM-30AG Green VM220-02-30G VM-30AY Yellow VM220-02-30Y VM220-02-32R VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y VM-32AR Red Push button (Extended) VM-32AB Black VM220-02-32B VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow VM-33A Push button (Flush) VM220-02-33 VM230-02-33 VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y