5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

C6, C8 Light/Surge voltage suppressor (At FZ) (PE port) C6: Max. 6 C8: Max. 6.5 (P , EA, EB port) For wiring specifications, refer to page 1326. n: Stations Stations L L1 L2 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1244 Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Manifold

Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

VCL

Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Guide Cylinder Series MGG

17.5 65 113 6.6 35 65 70 100 35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56

Clamp Cylinder with Lock Series CLK1

Hs 46 50 56 Approx. Ht 26 26 26 16 Series CLK1 Clamp Cylinder with Lock Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

Cylinder with Lock Series CLS

Ht 34 56 Approx. Hs B 30 (33) 36 Auto switch Numbers in ( ) are for type D-F5LF. Approx. Hs D-A44 D-A5/A6 D-A59W 33 Auto switch A Auto switch A B 34.5 Approx. Ht Approx. Ht 56 36 Approx. Hs B Approx.

Cylinder with Lock Series CNS

Ht 56 56 34 A B 30 (33) 36 Approx. Hs Approx. Hs Auto switch Numbers in ( ) are for type D-F5LF. D-A4 D-A5/A6 G(PF)1/2 Auto switch 34.5 (compatible cable O.D. 6.8-11.5) Approx. Ht Approx. Ht A B B Approx. Hs 33 36 Auto switch A Approx.

ZP

63.5 13.1 16.2 15.1 16.2 37.5 45 56 63.5 13.2 16.3 15.2 16.3 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

REA/REB

50 40 30 50 40 30 (Nm) REBHT25 REBH25 REBHT25 REBH25 Model REBH15 REBH25 REBHT25 REBHT32 M2 16 26 85 96 M3 10 28 56 64 M1 10 28 56 64 28 26 20 20 16 REBH15 REBH15 13 Moment (Nm) Moment (Nm) 10 10 2 2.5 3 4 5 3 4 5 M3 2 1.5 1 1 0.5 0.5 M1 M2 70 100 300 500600 70 100 300 500600 Maximum speed U (mm/s) Maximum speed U (mm/s) 72 Sine Rodless Cylinder High Precision Guide Type

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Auto switch Phillips head screwdriver Hexagon nut (M3) (Included as accessory) Switch mounting screw (M3 x 8l) (Included as accessory) 8-15-56 56 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-15-57 57 Magnetically Coupled Rodless

CJ2

C73CZ 3mL C73CL NoneN C73CN Solid state switches marked with are manufactured upon receipt of order. 1.3-56 Direct Mount: Double Acting Single Rod Series CJ2R Specifications Square rod cover makes direct contact mounting possible.

Modular F.R.L. Unit

AC10B to 60B Page 7 Air Filter + Mist Separator + Regulator AC20C to 40C Page 9 Filter Regulator + Mist separator AC20D to 40D Page 11 Page 13 Spacers and Brackets: Accessories Page 18 Page 20 AW10 to 40 Page 56 Page 61 Filter Regulator with Back Flow Mechanism AW20K to 40K Page 63 Mist Separator Regulator AWM20 to 40 Page 67 Micro-Mist Separator Regulator AWD20 to 40 Page 71 AFD20 to 40

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting hole Indicator light P R2 R1 2-8 mounting hole Indicator light 49 (64) 49 (64) M12 connector M12 connector 126.5 (139.5) 126.5 (139.5) PE port PE port PE port PE port

VFR

Bottom ported: VV5FR2-01 Station 2Port size FD1 FU1 C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) For wiring specifications, refer to page 3-5-8. n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 3-5-21 22 Series VFR2000 Non

KJ

(inch) Applicable fitting size d (inch) Model L2 A M Min. port size Note) Weight (g) D L1 P Q 2-Applicable tubing 17 18 21 3 16 3 16 KQ2U07-99 KQ2U05-99 20.5 21.5 56 56.5 64.5 46 10.6 12 13.7 11.4 13.2 39.5 39.5 16.5 17 18.5 4.6 11.4 13.2 15.2 3.5 1 4 1 4 5 16 5 16 KQ2U09-99 24.5 15.2 6 Note) D: Max. diameter K M Applicable fitting H D Branch Y: KQ2U MS Applicable tubing O.D.

AC Servo Motor Driver

(Note) Device status Setting 0 1 WNG 0 1 0 ALM Warning occurrence 0 1 WNG 0 1 1 ALM Warning occurrence Note. 0: off 1: on 5 56 5. PARAMETERS Control mode No.

Sine Rodless Cylinder Series REA/REB

Maximum load mass (Wmax) + Static moment (M) n = Load mass (W) Allowable static moment (Mmax) + Dynamic moment (Me) Allowable dynamic moment (Memax) 1 Moment Load Mass Maximum Load Mass (Static moment/Dynamic moment) Allowable Moment W (kg) (Nm) Wmax Model M2 M1 1.5 M3 1.5 M2 26 85 96 M3 28 56 64 M1 28 56 64 Model REAH10 REAH15 REAH20 Model REAH25 REAHT25 REAHT32 REAH10 4 2.5 REAH15 9 16

MXS Series Air Slide Table

KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60 96 K 23.5 33.5 43.5 53.5 63.5 88.5 Z 48.5 53.5 64.5 82.5 100.5 150.5 M 49 54 65 83 101 151 ZZ 56 61 72 90 108 158 MXS8-10 MXS8-20 MXS8-30 MXS8-40 MXS8-50 MXS8-75 82.5 132.5 56 Air Slide Table MXS Series Dimensions MXS 8 With shock absorber (6) MXS8BS, BT, B 8 A 22 23.5 23.5 14.5 14.5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

150 n x 5.5 60 5 5H9 (+0.030 0 ) depth 56 5H9 (+0.030 0 ) depth 56 6 10 G 25 Motor option: With lock Cable length 250 (146) 65 20 24 15 Lock cable Motor cable *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

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ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!