Aluminum High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

New

Step 2 Item Selection item Symbol Size w 3 Size 3 Select from Flow rate Pressure. v Body material v Port size v Orifice diameter e VXN 3 C w A 2 Body material C37 Port size 1/8 e C Orifice diameter 1/8 Select electrical specification.

LEH_C

(W) 8) 8/7 22/12 (W) 9) 14 42 19 51 57 61 1) 713 150 LEHS10:30(F.S.),LEHS20:25(F.S.),LEHS32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 5 - 4.2 LEHS K 16 6N 10 1 3 1 R 3 10 10 D D 2 0 2 0 DIN 1DIN I/O (m) 32 32 40 40 1.5 1 1.5 1 3 3 3 3 L ) L ) 5 5 5 5 )1020 (mm) LECP6 LECP6 () NPN NPN K K PNP PNP LECP1 1 LECP1 () 1 NPN NPN

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

Air Cylinder CLA Series Fine Lock Model

t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

Air Pilot Operated Series NVSA

Reluh AXT 333-3 3 Spring S6at AXT 333 4 End CaD w/(4) Screws Alum. D.C. E C 0 1 1 1 1 5 End Cag Alum. D.C. Scr6ws End Cap (4) 7 Spool & Sleeve Ass'y. 440F. S.S. GRinos'S & S (6) Btrna N ARP 58-014 I Cushion-Pllot Cover ''4" end AXT 334.5N 't0 Ga6kt.Pilot Cover & End Cap {2) Buna N AXT 334-7Nn PILOT COVERS "A"E DI'B" ENO '11A Typ "O'' do Operator, w(4)screws (a AlumD.C.

MHF2

3 !0 @2 @1 !1 w u !7 @0 !2 !5 o !8 y !9 !4 r t e !6 Parts list Parts list Note Material No. Description No.

15

Allowable load mass on guides/Allowable moment w 3 Table 4.

Piston cup seal, .034 THK, XL9700

Compact Hydraulic Cylinder

3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

Cylinder with Lock Series MNB

Ball retainer Brake shoe Brake spring Brake shoe holder Taper ring Air pressure exhaust Air pressure supply Lock switch lever Brake piston Locked condition Unlocked condition 3 Cylinder with Lock Double Acting: Single Rod Series MNB Construction #3 $9 !3!4@3 #5 t @7 $5!5@4 !8@0!7 !9i @2 q r y#0 $0 $2 w $3 #8 @9 A C B Section A !2 !2 #4 @6 #9 @8 $4 #2 #1 #6 #7 $6 !0 u @5 !6 @1 !

CM2

SCM220A, #12, #3, #19 CM2L25SCM225A, #12 SCM225A, #12, #3 SCM225A, #12, #3, #19 CM2L32SCM232A, #12 SCM232A, #12, #3 SCM232A, #12, #3, #19 CM2L40SCM240A, #12 SCM240A, #12, #3 SCM240A, #12, #3, #19 Basic Foot Built-in One-touch fitting Spring extend CM2L20SCM220A, #11 SCM220A, #11, #3 SCM220A, #11, #3, #19 CM2L25SCM225A, #11 SCM225A, #11, #3 SCM225A, #11, #3, #19 CM2L32SCM232A, #11 SCM232A,

SFOD-OMT0005CN

. 37 10 . 41 10.1 . 41 10.2 . 44 10.3 . 46 11 . 47 11.1 . 47 11.2 . 47 11.3 . 48 (1) . 48 (2) () . 48 (3) . 48 11.4 . 49 11.5 . 49 12() . 50 12.1 . 50 12.2 . 51 13 . 52 13.1 . 52 13.2 No. . 52 (1) . 52 [2] . 53 [3] . 54 [4](HOLD) . 54 [5] . 55 [6] . 55 (7) . 56 13.3 . 57 14. 58 14.1 [5m ] . 58 14.2 [820m] . 58 14.3 ()[5m ] . 59 15.4 ()[820m] . 59 14.5 . 60 14.6 . 60 14.7

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

VFS

Refer to page 3-8-52 for details.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

VXP21/22/23

23 25.5 25.5 35 40 40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

ZP

Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.