KR 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 13 6
deep +0.025 0 N -1 x F 2 +0.025 0 3H9 3 deep 12 6 M 0.5 22 24 Z ZZ (NN-1) x H G H 13 6.5 6.5 13 A B 3.2 6.5 7 7 15 1 4 NN-M4 X 0.7 thread 8 deep A B 3H9 3 deep +0.025 0 3H9 3 deep +0.025 0 HA GA Cross section AA Cross section BB (mm) Model F 25 25 40 50 38 50 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 I 13
Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves SQ 2 1 3 1 C6 5 A B A A B A B A A B C D E F G H Series SQ2000 Switching type A D Coil voltage 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.
(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.
9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!
(/) VX VNl VQ 4.1-7 VX21/22/23 Dimensions (Orifice size 2mm, 3mm, 4.5mm, 6mm) Energized Open/VX21 0, 22 0, 23 0, Energized Closed/VX21 2, 22 2, 23 2 1 2 3 2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.
[46.5] 64.1 63.2 53.2 45.8 54.1 39.3 20 20 20 20 38.1 23.3 3 3 3 3 103.4[107.8] 123[127.4] 11 11 11 141.2 121.2 143 11 2-2.6 (For mounting) 23 2-2.6 (For mounting) 23 23 23 2-2.6 (For mounting) 2-2.6 (For mounting) 60.6 27 Refer to page 563 for dimensions with connector cable. 521 5 port solenoid valve Series 10-SYJ5000 2 position single [ ]: AC G H G H Grommet (G), (H): 10-SYJ5143-01 Built-in
M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A
Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions
8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the center of the piping. 14-2-51 52 Regulator Series AR20 to 60 Made to Order Specifications: Please contact SMC for detailed dimensions, specifications, and lead times. 1.
H H H H G E G X E X Note ) E X RG RT RS B 600 740 C R310 R445 D 296 302 E 620 890 F 93 129 G 60 87 B 680 790 C R390 R495 D 296 302 E 780 990 F 93 129 G 60 87 B 640 740 C R350 R440 D 296 307 E 634 800 F 93 129 H 10 15 A 700 1000 A 700 880 A 700 880 15 32 15 32 15 32 I 6 7 X 740 1064 Y Note 2) I 6 7 X 660 816 Y Note 2) X 700 880 Y Note 2) H 10 15 H 10 15 I 6 7 15 32 15 32 15 32 558 to 573
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
52 68 11 88 196 100 3 87 95 70 69 11 90 235 117 3 114 110 83 96 11 108 299 154 3 134 130 102 131 11 138 315 200 3 190 180 153 112 Note 1) Dimension E applies when heater option is included.
Stainless 1/8 3/32 2.4 steel 1/8 3.2 B Grommet 100 VAC With surge voltage suppressor C 110 VAC B C D E F 3/32 2.4 1/8 1/8 3.2 D 200 VAC 3/32 2.4 E 230 VAC 1/8 3.2 1/4 F 24 VDC C37 5/32 4 G DIN terminal 24 VDC G 7/32 5.6 With surge voltage suppressor J 1/8 3.2 H 100 VAC K L P Q R S T U 5/32 4 3/8 J 110 VAC Single 7/32 5.6 2 Size 2 Unit K 200 VAC 3/32 2.4 N.C. 1/8 L 230 VAC 1/8 3.2 3/32 2.4
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
(Piping port) 20 20.5 5.5 42 + ST ST 5.5 4.5 32 + ST 13.4 5 + ST 2.75 11 12 1.2 M3 x 0.5 x 3 (Hexagon socket head set screw) M8 x 1.25 x 7.5 (Bolt holder) 3.8 3.8 0.5 45 45 3 3 25 0.2 25 0.2 5.3 5.3 32 31 16 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 3 3 45 45 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6 (Hexagon socket head cap screw) M3 x 0.5 x 12.5 (Hexagon
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
side REAS15 High Precision Guide Type REAH (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 Max.
Relief port (10-, 21-) Vacuum port (11-, 22-) H1 MM FZ FX Relief port (20, 25) Eh8 D I 20 to 32 Width across flats KA 1.5 A AL K Standard port Relief port (32, 40) Width across flats NA 4 x FD 45 FT F ZZ + Stroke Z + Stroke S + Stroke H FY 40 (mm) 12 10 8 6 KA MM NA NN B1 B2 Bore size 4 7 FD E 20-0.033 0 13 8 AL D K 52 40 40 34 B FX FZ FY G FT 46.5 37.5 33.5 28 FL Z H H2 H1 S P I F C2 A ZZ