KR 1 8 KAU06-U01 3 8 KAU06-U03 46 45 43.5 12.8 39.5 17 14 12.8 13 6
18 (With stroke adjuster at extension end) 26 35 62 48 F 20 5H9 4 deep +0.030 0 N -1 x F 2 2-M6 X 1 thread 10 deep 21 5H9 4 deep +0.030 0 10 M 0.5 36.5 40 Z ZZ (NN-1) x H G H 24 10.5 24 10.5 A B 10.5 10.5 5.1 9.5 26 1 6 NN-M6 X 1 thread 12 deep A B 5H9 4 deep +0.030 0 5H9 4 deep +0.030 0 Cross section AA Cross section BB HA GA (mm) Model F 35 35 35 40 30 55 65 70 GA 16 16 16 16 51 61 109
Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves SQ 1 1 3 1 C6 5 A B C D E F G H Series SQ1000 A A A 2.PUSH 2.PUSH 1.TURN 1.TURN Switching type Coil voltage 5 6 24VDC 12VDC A D 1 2 3 4 5 A B C 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve
insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14
21 14 Rc 1/8 M6 x 1 depth 13 90 150mm or more 201 82 37 52 65 114 16 38 12 350 to 600 21 14 Rc 1/8 M8 x 1.25 depth 16 101 200mm or more 238 92 44 62 84 138 20 47 12 350 to 800 15 25 Rc 1/4 M10 x 1.5 depth 21 116 250mm or more 285 104 55 75 94 164 25 58 14 26 350 to 1000 16 17 Guide Cylinder Series MGG Basic type/MGGB 63 to 100 4-F through, counter bore G Bottom 4-H Bracket (See table below
16.5 23 45 80 21 25 20 102 37 40 G 1/4 22 95 169 81 18 72 150 19 33 45 D100 21 30 20 116 37 40 G 1/4 25 114 189 96 20 89 170 19 37.5 55 T ZZ GE GF J MB K N S V GR MM P Q H VA W Bore size (mm) -X 32 34 216 88.5 18.3 M6 x 1 4 6 27 164 6.5 4 M10 x 1.25 G 1/8 37 48 13 6.5 40 39.5 240 96.5 19.5 M6 x 1 4 6.5 27 182 8 4 M12 x 1.25 G 1/4 41.5 54 16.5 9 2050 47 268 111.2 22.4 M8 x 1.25 5 8 31.5 195
IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5
M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Applicable tube O.D.
for dimensions with connector cable. 543 5 port solenoid valve Series 10-SYJ7000 2 position single [ ]: AC G H 01 02 Grommet (G), (H): 10SYJ714322 27 12 34 8.5 2-4.3 (For mounting) Manual override B A A B R1 R2 P 59.8 3.2 G: Approx. 300 H: Approx. 600 (Lead wire length) 85.2[87.4] (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5[64.5] + 54 42.1 25.5 20 12 11.5 22 22 34 18 1/
8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 0 3.5 3.5 3 3.3 3.3 Note) For AR20 only, the position of the pressure gauge is above the center of the piping. 14-2-51 52 Regulator Series AR20 to 60 Made to Order Specifications: Please contact SMC for detailed dimensions, specifications, and lead times. 1.
61 68.5 14.3 15.1 15.5 16.6 44.5 52 61 68.5 14.3 15.1 15.5 16 .6 Lateral 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."
15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B
Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24
S + Stroke H + Stroke ZZ + 2 x Stroke 4-FD 40 (mm) 7 5.5 5.5 5 K 14 12 10 8 D 21 19.5 19.5 15.5 AL 88 64 62 62 H 21.5 15 15 15 S 1/4 1/8 1/8 1/8 F P H1 7 7 7 7 FD FT FY 66 60 60 60 FZ 11 8 8 8 FX 188 154 152 144 G ZZ 52 40 40 34 B E 20-0.033 0 46.5 37.5 33.5 28 N 41 32 32 26 B2 47.3 37 37 30 I 24 22 22 18 C2 22 17 17 13 B1 45 41 41 37 H2 42.5 34.5 30 24 NA A M14 x 1.5 M10 x 1.25 M10 x 1.25
Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
IN), 2(OUT) port 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 0.90 K K 0.44 0.36 0.26 J H H J 0.59 (inch) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 0.55 0.55 0.75 0.87 0.55 0.75 0.87 1.19 1.19 1.56 1.88 1.19 1.56 1.88 0.59 0.59 0.79 0.94 0.59 0.79 0.94 2.46
Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)