0.55

override 4A 2B 1.2 (45) (58) 42 52 + 4A 2B PE 1.2 6.5 3EB 5EA 1P 2 x M5 x 0.8 99.2 7.2 22.5 Grommet (G) (H) DC without light/surge voltage suppressor (PE port) (103.2) (3.2) (26.5) 45.6 G: Approx. 300 H: Approx. 600 G: Approx. 300 H: Approx. 600 (41.6) 183.3 185.7 (Lead wire length) (Lead wire length) (78) 74 (49.3) 45.3 (32.5) 46.9 28.5 (42.9) 30 30 (15.5) 14 (31) (31) 50 1/4, 3/8, 1/2

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimentions are the same as the grommet style. 1.2-34 Series SYJ5000 2 Position Double G H Built-in One-touch fitting: SYJ5220-l llGrommet (G), (H): SYJ5220-l ll-M 5 G H C4 C6 87.2 (GZ, GS: 88.6) [90.6] G: 300 H: 600 3.5 A B (Lead wire length) 45.4 2-One-touch fitting (A, B port) Applicable tube C4: T0425 C6: T0604 10.6 C4: (3) C6: (3.2) 32.3 11 SY A B Manual override

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Connection threads Rc/NPT L,L H K Y M H L E Model L W E W M LQ3H11-F LQ3H12-F LQ3H21-F LQ3H22-F LQ3H31-F LQ3H32-F LQ3H33-F LQ3H34-F LQ3H35-F LQ3H36-F LQ3H41-F LQ3H42-F LQ3H43-F LQ3H51-F LQ3H52-F LQ3H53-F LQ3H61-F LQ3H62-F LQ3H63-F 4 3 M 10 9 11 35 34 14 10 18.5 1/8" Y 40 45 39 44 18.5 21.5 1/8" 1/4" H 6 17 16 16 20 14 (E,E) 10 8 10 8 10 8 KK 50.5 47.5 18.5 1/8" D 22.5 19.5 21 55 52 25 18

MB

C0.5 file chamfer AL B MM R sphere TP R sphere DC 30 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 30 C 30 DA DA C0.5 R sphere DA DA C AL MM 30 A H T W1 A H C A H H Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 DA MM 30 AL MM 30 H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 DA 30 30 DA L RD 30 MM 30 MM MM DB DB T T C B A H A A A L K H W H H

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Example 2) Obtain the saturated steam flow rate when P1 = 0.8 [MPa] and DP = 0.008 [MPa] with a solenoid valve with a Kv = 0.05 [m3/h]. Read off Q0 when P1 is 0.8 and DP is 0.008 in Graph (2), the reading is 20 [kg/h]. Therefore, the flow rate is calculated as the formula: Q = 0.05/1 x 20 = 1 [kg/h].

Electric Actuator

LE-CSM-R;; is MR-PWS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSB-R;; is MR-BKS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSE-R;; is MR-J3ENCBL;M-A;-H manufactured by Mitsubishi Electric. LEC MR RB Regeneration option type 032 12 Allowable regenerative power 30 W Allowable regenerative power 100 W Confirm regeneration option to be used in Model Selection.

Table of Contents

Refer to page 3-8-52 for details.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

: A10 Symbol: A11 Symbol: A12 Symbol: A13 Symbol: A14 DA DA C0.5 R sphere AL MM 30 30 DA C R sphere TP R sphere A A H C H T W1 H H H Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 DA AL MM 30 DA MM 30 MM 30 MM 30 C 30 A H H A H A A C H A H Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Valve Single Unit

(Light/Surge voltage suppressor) (Light/Surge voltage suppressor) Polarity indicator (Lead wire length) G: 300 H: 600 1-6-21 Body Ported Series SX3000/5000/7000 Dimensions: Series SX5000 Foot bracket SX5220-F1 C4 C6 C8 2 position double Grommet (G), (H): SX5220C4 C6 C8 G H G H (Light/Surge voltage suppressor) (Mounting hole) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 (

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

Air Slide Table Series MXQ

G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 6 B A 5H9 depth 5 +0.030 0 NN x M6 x 1 thread depth 12 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45 52 88 88 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 I 12 12 12 12 20 15 18 23

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type/Double vane type CRBU2W40-S/D h 52 64 Keyway dimensions b l h (h9) l b (h9) Model CRBU2W400 0.030 4 20 0 0.030 4 85 38 2 x 5.5 through 2 x M5 x 0.8 through 25h9 0 0.052 10g6 0.005 0.014 11.5 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 2 20 30 2 x 5.5 through 2 x 5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2 x

0.4

For details, refer to page 52.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 20 Z ZZ (NN-1) x H G H 5.5 11 5.5 11 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) GA 11 21 31 43 41 F 20 30 20 28 38 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 HA 20 20 20 30 48 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 M 42 52

MXS Series Air Slide Table

(NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 50 35 55 65 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 M 71 71 71 83 103 149 203 N 4 4 4 4 6 6 6 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 H 40 40 40 25 36 36 38 NN 2 2 2 3 3 4 5 I 10 10 10 10 22 43 52 J 40 40 40 52 60 85 130 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 Note) Refer to "Dimensions

KR

M H Branch Union Elbow: KGLU D Applicable tubing O.D.

Series VS

Z V W PITCH NOTE #2 Q 81 R 49 5.5 S 20.5 I J K L M N 22 O P 52 T 79.5 52.5 48.5 E 58.5 F 108 96.5 87 G 105 H C 9 D 50.5 A 177.5 B 119 26.5 26 41 28 20.5 18 58.5 45.5 64.5 58.5 30.5 20.5 SIZE 3 SIZE 2 SIZE 1 52 34 41 26 52 37 31.5 92 121 97.5 67.5 82.5 69 74 58.5 4 3 64.5 92 112 123.5 13 9 77.5 52 234.5 189.5 142.5 125 36 CC Y 42 2 2 2 Z AA 14 132.5 BB W 43 35 30 X 25 U 1.5 73 68.5 V 57.5