Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Vacuum

1 5 33 5 20 M5 x 0.8 I M8 x 124 1 0 2A 5.5 I 20 50 9 I 5 Deptt I 1 9 24.5 97 .aiz, 42 5 24 M5 x 0.8 1 0 \.410x 1.2i 32 6.6 t J . c 24 52 1 0 11 Depth 1 1 5 21 30.5 109 Shorter pron e un ts are ava lab e wnhoul magnel ior auloswilch capabil 1y tUGrDUl s16-sg2 26 5 1 4 M4 x 0.7 5 1 8 4.5 4 40 7.5 7.6 Deptf 12.5 3.5 1 5 . 5 74.5 29 5 M4 x 0.7 6 8 I 1 6 46 9 9.5 Deptf 8 '13.5 5 19.5 89 33 5 20

Vacuum

1 5 33 5 20 M5 x 0.8 I M8 x 124 1 0 2A 5.5 I 20 50 9 I 5 Deptt I 1 9 24.5 97 .aiz, 42 5 24 M5 x 0.8 1 0 \.410x 1.2i 32 6.6 t J . c 24 52 1 0 11 Depth 1 1 5 21 30.5 109 Shorter pron e un ts are ava lab e wnhoul magnel ior auloswilch capabil 1y tUGrDUl s16-sg2 26 5 1 4 M4 x 0.7 5 1 8 4.5 4 40 7.5 7.6 Deptf 12.5 3.5 1 5 . 5 74.5 29 5 M4 x 0.7 6 8 I 1 6 46 9 9.5 Deptf 8 '13.5 5 19.5 89 33 5 20

MB

5 !6 !7 !

LEH_C

.00mm Force 40% 60 5 SET SET P.2735 5.3 10 - (5) 2.

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

CP95

12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10

CP95

12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10

VXP21/22/23

23 25.5 25.5 35 40 40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

15

20.5 20.5 15.5 8 15.5 M4 x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8

MHF2

1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 14 Series MHF2 Dimensions MHF2-16D Scale: 50% 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (mounting hole) 27 25 25 M5

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 2 (NPT1/4 - M20x1.5)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: F (For Stroke 50 to 140mm w/Lever Unit), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: F (For Stroke 50 to 140mm w/Lever Unit), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: E (For Stroke 35 to 100mm w/Lever Unit), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 2 (NPT1/4 - M20x1.5)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: 2 (NPT1/4 - M20x1.5), ATEX Temperature: T6 [ATEX Temperature T6 (-20 to 60°C)]

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: E (For Stroke 35 to 100mm w/Lever Unit), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 001 (Smart Lever Type), Pressure Gauge: 3 (1.0 MPa), Accessories: E (For Stroke 35 to 100mm w/Lever Unit), External Scale Plate: None, LCD Window: None, Connection, Air - Electric: M (Rc1/4 - M20x1.5)