CY1

1 #2 i @9 w $1 #1 #0 @7 CY1L10 to 40 @2 #9 @0 $0 t !4 !5 !9 #5 $2 #8 !2 !0 !6 !7 @4 @1 !8 @8 $1 #6 #7 F Enlarged view F 10,15 $1 @3 @5 @6 e y r q #2 !3 !1 o i u w #1 @7 #0 10 Parts list Parts list No. Description Slide block No.

SQ1000/2000

u 3 position: SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 SQ2330 SQ2331 (A)(B) (A)(B) 4 2 4 2 y e e q w y e e q w 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ2430 SQ2431 (A)(B) (A)(B) 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1)(P)(R2) SQ2530 SQ2531 (A) (B) (A) (B) 2 4 2 4 u u 5 1 3 (R1) (P)(R2) 5 1 3 (R1)(P)(R2) Dual 3 port valve: SQ2 31 A B C SQ2A31 4 2 y e e q w w 1 5 3 N.C.

Air Cylinder

With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

10

VX21/22/23 For Air Dimensions/Body Material: Resin Y W Y W Grommet (with surge voltage suppressor) Grommet U U1 U U1 X X X1 X1 300 Q F D D 300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole E C R C R E 1.2 1.2 1.2 1.2 B1 B B1 B 2 x P Port size 2 x P Port size Y W Y W DIN terminal Conduit terminal U U1 U U1 X X X1 X1 Cable 6 to 12 F Q S 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D 34

Large Size Vacuum Module: Series ZR

Port exhaust ZR1-W 2 2 Adapter B For port exhaust Ejector indication Rc 1/8 exhaust port (EXH.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body material: Aluminum q w e r t y u i IN IN o !0 OUT (Blow) !1 !2 Component Parts No.

Air Combination

Press the push button to exhaust drain from the C3SF(-W)-D and C4SF(-W)-D. (2) Check the element periodically and replace it with a new one if necessary.

Low Friction Cylinders Series MQ

x M5 x 0.8 H effective thread depth C 2 x 4 x OA effective depth RA 2 x 4 x OB Depth of counterbore RB Q Y F I 4 x N through 0.2 D E M B + Stroke L K 0.2 A + Stroke M E 25, 30, 40 2 x P H effective thread depth C Q Y F 2 x 4 x OB Depth of counterbore RB 2 x 4 x OA effective depth RA J I 4 x N through 0.2 D W E M K B + Stroke L 0.2 A + Stroke M E (mm) Bore size (mm) P Stroke range (mm) RB

Cylinder with Lock Series CNG

85 10 (12) 18 5.5 6 4 8 5 201 to 350 to 200 201 to 350 20 to 300 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 301 to 400 to 300 301 to 400 20 to 300 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 301 to 450 to 300 301 to 450 20 to 300 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without rod

Series VS

AA Q R 4 4 4 4 S T U X Y Z V W PITCH NOTE #2 Q 81 R 49 5.5 S 20.5 I J K L M N 22 O P 52 T 79.5 52.5 48.5 E 58.5 F 108 96.5 87 G 105 H C 9 D 50.5 A 177.5 B 119 26.5 26 41 28 20.5 18 58.5 45.5 64.5 58.5 30.5 20.5 SIZE 3 SIZE 2 SIZE 1 52 34 41 26 52 37 31.5 92 121 97.5 67.5 82.5 69 74 58.5 4 3 64.5 92 112 123.5 13 9 77.5 52 234.5 189.5 142.5 125 36 CC Y 42 2 2 2 Z AA 14 132.5 BB W 43 35 30

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Lock position H R W Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

LEC-OM069xx

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.

10

Contents 32 MBB32-PS-W 40 MBB40-PS 50 MBB50-PS 63 MBB63-PS 80 MBB80-PS 100 MBB100-PS 40 MBB40-PS-W 50 MBB50-PS-W 63 MBB63-PS-W 80 MBB80-PS-W 100 MBB100-PS-W Set of the nos. @9, #0, #1, #2, #3 Set of the nos. @9, #0, #1, #2, #3 * Seal kits consist of items @9 to #3, and can be ordered by using the seal kit number corresponding to each bore size. * Trunnion type should not be disassembled.

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

7

2 !0 !2 VXD VXD !1 t !1 t VXZ o y o y IN(P1) !3 VXS r !3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

MQQ

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !