6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !
2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible
Facility water source to be prepared (For water-cooled type) Table 3-2 Facility water source to be prepared Required facility water rate Heat Facility water temp. l/min Model Radiated range Facility water temprature kW oC 25oC 32oC 40oC 8 12 20 HRS012-W -20 Approx. 2 5 to 40 HRS018-W -20 Approx. 4 12 15 23 (Rating 25) HRS024-W -20 Approx. 5 14 17 25 3.2 Installation HRS Series 3-6 HRX-OM-M090
A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG
12 10 8 6 4 2 0 3000 mm/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2
, refer to page 12-2-51 to 12-2-52 for option specifications. 12-2-43 43 Series MHZJ2 Construction: MHZJ2-6 Double acting/With fingers open Single acting/Normally open !
0 @2 o !2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !
For connector cable of M8 connector, refer to page 1-5-78. 1-5-52 53 5 Port Solenoid Valve Rubber Seal Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) q t r w y e q t r w (B) 2 (A) 4 (A) 4 (B) 2 SV i SZ i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) SY SYJ u 3 position closed center/exhaust center/pressure center SX
/cycle (Standard) Operating time Power source 100, 200 VAC Hz, Other 4 W IN: Rc , OUT: Rc 550 g 50 60 Power consumption 3 8 1 2 Port size 3 8 Weight If the operating cycle is twice in a minute (op. time 2 sec. x 2) operating time is 4 sec. each minute.
(mm) Model F 35 35 35 50 35 55 65 K J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 HA 40 40 40 25 36 72 76 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111 M 71 71 71 83 103 149 203 KA NA 2 2 2 2 2 4 4 Z 70 70 70 82 102 148 202 MXS12-10 MXS12-20 MXS12-30 MXS12-40 MXS12-50 MXS12-75 MXS12-100 26.5 36.5 46.5 56.5
Number of switches Electrical values: According to switch type, check connection diagram from Section 12.11 2-wire, DC voltage proximity switches: I02 P+F NJ2-12GK-SN Ui: 16 V, Ii: 52 mA 2 I09 P+F NCB2-12GM35-N0 Ui: 16 V, Ii: 52 mA 2 I56 IFM IFC2002-ARKG/UP U: 10-36 V DC, Imax: 150 mA 2 I41 P+F NJ4-12GK-SN Ui: 16 V, Ii: 52 mA 4 3-wire, DC voltage proximity switches: I45 P+F NJ3-18GK-S1N Ui
5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !
Bore size (mm) Cushion valve Width across flats (mm) Socket wrench JISB4648 Hexagon spanner wrench 1.5 20, 25, 32, 40 1.5 snap ring 21 Series CM2W 10-/1121-/22Double acting, Double rod cylinder/ 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 W L 40 150 H7B 21 C D M 2 W L 40 150 H7B Nil Built-in magnet Number of auto switches 2 pcs. 1 pc.
Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.
Note 2) Excluding the auto switch weight 12-3-9 10 Series MHF2 Construction MHF2-8D, MHF2-8D1 q w u !0 !3 !1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Component Parts Note Note No. Description Material No. Description Material Aluminium alloy Hard anodized Urethane rubber q !1 Body Head damper Stainless steel Stainless steel wire w !
San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 2 finger Nil S 2 pcs. 1 pc.