ZQ

ZQ Poppet valve assembly Solenoid valve Refer to How to Order below q t XT534-5-001-AS Nozzle Filter element Aluminum PVF w y ZF Sound absorbing material 1 (single unit) XT534-5-004 Diffuser Aluminum PVF e u Vacuum pressure switch Refer to How to Order below Release flow adjustment needle Aluminum r i ZP Sound absorbing material 2 (manifold) XT534-5-003 PVF o ZCU AMJ How to Order Misc.

Tamper Proof and Flat Head Screw

SMC Pneumatics, Inc. 13 Tamper Proof Speed Controller Standard Type Series AS20-T Metal Elbow Type Specifications AS12 0-M5 AS12 0-U10/32 Specifications Model AS22 001 AS32 003 AS32 002 AS22 002 AS42 004 1/4 10-32UNF Port size M5 x 0.8 1/8 1/4 3/8 1/2 32, 40, 50, 63 80, 100 20, 25, 32, 40 6, 10, 16, 20, 25 Applicable cylinder bore size (mm) 1.5MPa (218psi) Proof pressure 1MPa (145psi) Maximum

Air Preparation Equipment

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO2 Filtration accuracy (Filtration efficiency 99%) Element size symbol 002 004 006 013 701 801 901 2 m 4 m 6 m 13 m For FGH100 For FGH200 For FGH300 Specifications Membrane Element for Series FGH Series ED EDS-X40 Model EDS-X20 Filtration accuracy(Filtration efficiency 99.9%) Note 1) 0.4 0.2 6,200 4,000

air-filter-e

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO2 Filtration accuracy (Filtration efficiency 99%) Element size symbol 002 004 006 013 701 801 901 2 m 4 m 6 m 13 m For FGH100 For FGH200 For FGH300 Specifications Membrane Element for Series FGH Series ED EDS-X40 Model EDS-X20 Filtration accuracy(Filtration efficiency 99.9%) Note 1) 0.4 0.2 6,200 4,000

2/3 Port Valve for Various

JIS Symbol Port A Port A Manifold Specifications Manifold Manifold type Number of valves Blanking plate (with gasket, screws) B Mount Common supply, Common exhaust, Individual out 2 to 10 stations VVXA31 VX011-004 VX011-005 VVXA32 Port P Port R Normally closed Normally open Manifold Base And Applicable Valve Part No.

HEC-OM-R008

Do not mount the product where it is exposed to materials such as Cooling capacity Option silicone, which may generate harmful gas. 002 200W Nil None Install the product in a location where the ambient temperature range is E With foot, 004 400W no rack bracket between 10 to 35C and the relative humidity range is between 35 to 80%.

A

O P E R AT I N G P R E S S U R E 0 .1.0MPa 1 .1.6MPa ACCESSORIES Bracket BM58 Ball Valve Piping Kit ADH-C400 (See note below) Silencer for Drain 2506-004-X228 Note: The Ball Valve Piping Kit includes a ball valve, two barrel nipples and an elbow. It can be fitted to the inlet of the unit and allows it to be isolated for examination and maintenance.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1090 806 930 10 4 800 900 1190 906 1030 12 5 1000 1000 1290 1006 1130 12 5 1000 1100 1390 1106 1230 14 6 1200 1200 1490 1206 1330 14 6 1200 1300 1590 1306 1430 16 7 1400 1400 1690 1406 1530 16 7 1400 1500 1790 1506 1630 18 8 1600 1600 1890 1606 1730 18 8 1600 1700 1990 1706 1830 20 9 1800 1800 2090 1806 1930 20 9 1800 1900 2190 1906 2030 22 10 2000 2000 2290 2006 2130 22 10 2000 2500 2790 2506

15

1090 806 930 10 4 800 900 1190 906 1030 12 5 1000 1000 1290 1006 1130 12 5 1000 1100 1390 1106 1230 14 6 1200 1200 1490 1206 1330 14 6 1200 1300 1590 1306 1430 16 7 1400 1400 1690 1406 1530 16 7 1400 1500 1790 1506 1630 18 8 1600 1600 1890 1606 1730 18 8 1600 1700 1990 1706 1830 20 9 1800 1800 2090 1806 1930 20 9 1800 1900 2190 1906 2030 22 10 2000 2000 2290 2006 2130 22 10 2000 2500 2790 2506

2/3 Port Valve

(Blank plate) VX011-004 1 pc The standard arrangements of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side.

Compact Cylinder

250 273 295 317 339 362 384 406 428 451 495 584 673 785 896 32 2150 3580 5010 IN 315 339 364 388 412 436 461 485 509 533 582 679 776 897 1018 40 100 2360 3930 5500 OUT 497 534 570 607 644 681 718 755 791 828 902 1049 1197 1381 1565 50 677 717 757 797 837 877 917 957 997 1037 1117 1277 1437 1638 1838 63 Mounting Bracket Part No. 1164 1223 1281 1339 1398 1456 1514 1573 1631 1748 1981 2214 2506

CUJ

.: NTJ-004 6 Series CUJ Dimensions for 6 Double Acting/Single Acting Without magnet/CUJB6 Note) The angular position of the width across flats is not fixed with respect to the tube. 2-M3 x 0.5 (bore size) 6 3.5 M2.5 x 0.45 effective depth 5 3 Element Width across flats 8 Width across flats 3.5 9 10 7 4 9h9 19 7 2.5 2-3.3 through 2-3.3 through 13 + Stroke 6.5 + Stroke 3 13 7 Single acting

Table of Contents

. : NTJ-004 7-2-9 9 Series CUJ Note) The angular position of the width across flats is not fixed with respect to the tube.

Electric Actuator

depth 5 n x 5.5 6 60 200 D x 200 (=E) 15 B 5 Motor option: With lock (1.4) 96 (2.2) (215.5) A B n D E Dimensions [mm] Stroke L 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600 1700 1800 1900 2000 2500 590 690 790 890 990 1090 1190 1290 1390 1490 1590 1690 1790 1890 1990 2090 2190 2290 2790 306 406 506 606 706 806 906 1006 1106 1206 1306 1406 1506 1606 1706 1806 1906 2006 2506

Electric Actuator/Slider Type

1090 806 930 10 4 800 900 1190 906 1030 12 5 1000 1000 1290 1006 1130 12 5 1000 1100 1390 1106 1230 14 6 1200 1200 1490 1206 1330 14 6 1200 1300 1590 1306 1430 16 7 1400 1400 1690 1406 1530 16 7 1400 1500 1790 1506 1630 18 8 1600 1600 1890 1606 1730 18 8 1600 1700 1990 1706 1830 20 9 1800 1800 2090 1806 1930 20 9 1800 1900 2190 1906 2030 22 10 2000 2000 2290 2006 2130 22 10 2000 2500 2790 2506

Mini Free Mount Cylinder

. : NTJ-004 Use caution especially when multiple cylinders are used in pararell such as stacking because the body width dimensions have plus tolerances.

A

1.25 0 0.75 +.004 .53 .78 .62 -.01 +.002 Courtesy of Steven Engineering, Inc. !

HRX-OM-X010

HRZ Series 8.1 Specification 8-11 8-11 HRX-OM-X010 Chapter 8 Appendix 8.1.4 Pump Performance Curve Circulating Fluid: Fluorinated Fluid Operating Temperature: 20 deg.C At maximum frequency operation by inverter HRZ***-WS-F [PSIG] [MPa] 1.0 145 HRZ010-WS-F 0.9 [SupplyPort] 131 0.8 Pressure. 116 [SupplyPort] 0.7 HRZ002/004/008-WS-F 0.6 102 0.5 87 0.4 73 0.3 58 0.2 Flow Rate [ReturnPort] 0.1

CATALOG

O P E R AT I N G P R E S S U R E 0 .1.0MPa 1 .1.6MPa FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT CONSULT SMC CUSTOMER SERVICE ACCESSORIES Bracket BM58 Ball Valve Piping Kit ADH-C400 (See note below) Silencer for Drain 2506-004-X228 Note: The Ball Valve Piping Kit includes a ball valve, two barrel nipples and an elbow.

Table of Contents

'/ VX311 0 2 4 . 3 . 2 Rated voltage 0 2 4 0'0 VX312 (% . 3 . 2 , .44 044 23 ..4 004 024 0 2 4 1 VX313 . 3 . 2 % 1 VX3234 0'0 VX3224 . 2 1 3 . 2 1 3 . 2 1 3 . 2 1 3 . 2 1 3 . 2 1 3 02 .0 , 2 VX3244 Material 0'0 VX3324 1 VX3334 "#! ! $" 2 VX3344 17-3-81 2 The models VX31/32/33 have been revised. For details, please refer to catalog no. ES70-26A.