VM

Panel mounting hole Push button (Extended) VFM350-02-32R/B/G/Y (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. (EXH port) 2-4.2 mounting hole (SUP CYL port) 1.7 mm O.T. 6.5 mm T.T. Panel mounting hole Push button (Flush) VFM350-02-33 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F.

24

40 26 23 11.5 25.5 21 19 50 24 23 13 27 21 19 63 25 25.5 11 25 21 19 D-X 475 MGP Series Dimensions: 80, 100 4 x NN through 4 x OA through 4 x MM depth ML 4 x YY depth YL L WA Z 30 HR 4 x OB counterbore depth 8 Section XX Section XX Section XX (8) HA: T-slot for hexagon bolt X 0.02 DA X 0.02 X 0.02 21 H VA VB 40 U X T R X PW DB 6H9 depth 10 2 x P GC PB GB GA 10 2 x P (Plug) Q S WB DL JB JA

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

21 21 21 44.5 44.5 44.5 44.5 Refer to page 646 for dimensions with connector cable. 619 Series 10-SYJ500 Manifold Specifications [Option] Directional Control Valves Air Grippers Modular F.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

•

12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

REA/REB

Speed 600 mm/s (mm) Model A HP MM HT J LW LL L M HG HC HB HA H EB EA REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 Model N TW S ZZ Z XB W PP PB PA P NT NL REAH15 REAH20 REAH25 65 161 17.5 194 88.5 21 62 50

CM2

For mounting brackets, refer to pages 6-4-21 to 6-4-22. Symbol Maximum ambient Rod boot material temperature One side Both sides J JJ 70C Nylon tarpaulin Symbol Specifications K KK 110C Heat resistant tarpaulin -XA Change of rod end shape Mounting Bracket Part No. Maximum ambient temperature for the rod boot itself.

Air Slide Table

I J 5.5 11 5.7 11.2 2 x M5 x 0.8 thread depth 8 5H9 depth 5 +0.030 0 N x M5 x 0.8 thread depth 6 5H9 depth 5 +0.030 0 5.7 11 6 1 1 28 24.5 58 29 24 49 14.5 24.5 3.5 F 6.5 4 x M5 x 0.8 thread depth 7 14 -1 x F 2 N 21 3 x M6 x 1 thread depth 10 M 10 KA 21 10 5.5 Bottom view of MXQR16-50 NA x M5 x 0.8 thread depth 6.5 45 35 13 K 21 33.7 0.3 10 5.5 5.5 37 Z ZZ G (NN-1) x H H 22.4 7.6 22.4 7.6

Air Cylinder

With air cushion With rubber bumper GA WA GA E 0 0.05 E 0 0.05 (E1) (E1) TA (F1) ZZ + Stroke S + Stroke F TA (F1) ZZ + Stroke S + Stroke F (mm) Bore size (E1) E(F1) F GA S TA WA ZZ Rc NPT G Male thread Female thread 32 17 18 2 2 18 16.5 77 (85) 17 22 119 (127) 93 (101) 40 21 25 2 2 19 19 84 (93) 18 23 136 (145) 101 (110) 50 26 30 2 2 21 21 97 (109) 20 25 157 (169) 115 (127) 63 26 32 2 2 21

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

L2 L1 Manual override (Non-locking) VT VP 55.5 [62] 43.1 36.5 25.5 49 VG A A 19 9.5 VP 21 (Pitch) n-Rc (PT)1/8 P=17 21 (A port) VQ A A 19 9.5 18.5 VQZ (Pitch) n-M5 X 0.8 P=16 21 (A port) VZ [ ] for AC Other dimensions are the same as the M5.

CNA

83 20 23 18 17 13 M12 X 1.75 11 22 to 750 MGC 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 X 1.75 11 26 to 750 (mm) MGF Bore (mm) LD LH LS LT LX LY MM N P Q H S T V W X Y Z ZZ CY1 40 50 63 80 100 9 40 207 3.2 42 70 M14 X 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 27 13 24 244 9 45 222 3.2 50 80 M18 X 1.5 30 3/8 42 to 44.5 58 168 44 11 0 27 13 31 266 MY1 11.5 50 250 3.2 59

NCG/CG1

Oxide film treated Black painted Black zinc chromated, Red painted Zinc chromated Zinc chromated 40 or larger: the same as bumper A 21 21 Note) In the case of cylinders with auto switches, magnets are installed in the piston.

Solid State Auto Switches

Sheath Outside diameter [mm] 3.4 2 cores (Brown/Blue) Number of cores Insulator 1.1 Outside diameter [mm] 0.2 Effective area [mm2] Conductor 0.08 Strand diameter [mm] 21 Minimum bending radius [mm] (Reference values) Note 1) Refer to page 1568 for solid state auto switch common specifications. Note 2) Refer to page 1568 for lead wire lengths.

MG

Bore size (mm) Bore size (mm) DB DL DM HR LL MO Over 25 st to 75 st 98 Over 75 st to 175 st 118 Over 175 st 250 st 140 25 st or less 0 Over 25 st to 75 st 13.5 Over 75 st to 175 st 33.5 Over 175 st 250 st 55.5 25 st or 32 32 22 22 9.5 21 15 15 84.5 16 40 40 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 50 50 97 24 23 13 27 21 19 114 134 161 20 0 17 37 64 63 63 102 114 25 25.5 11 25 21

Table of Contents

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35V DC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) ALARM STOP 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being generated

Electric Actuators

Step designation BIT 5 8 Stp-no. bit4 20 BIT 6 21 Stp-no. bit5 8 BIT 7 9 Stp-no. bit6 21 22 Stp-no. bit7 9 35VDC max. + SET-ON 10 Temporarily stops the program run by means of the ON input. 3 Temporary stop READY HOLD 23 BUSY <2> 11 Performs an emergency stop when ON input stops. 16 Emergency stop (nonlogical input) STOP ALARM 24 COM 12 ALARM RESET 4 Alarm release Releases the alarm being

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

CATALOG VC10

21, 31 NPT 1/2 AN CONNECTOR MISCELLANEOUS OPTIONSsee page 76 All Models BODY OPTIONSsee page 80 SPLICE BOX HOUSING 3.52 3.22 (81.8) .34 (8.6) FINE METERING SILVER SHADING RING All Models 2.50 (63.5) (89.4) Model 21 All Models JIC HOUSING METERING TO ORIFICE ALUMINUM SHADING RING Model 21 Model 21 All Models YOKE MANUAL OVERRIDE BUILT IN MUFFLER All Models 21*, 71 All Models 1.88 (47.8) MOUNTING

Air Slide Table Series MXQ

-50 21 KA NA x M5 x 0.8 thread depth 6.5 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 9.5 24 6 B A 5H9 depth 5 +0.030 0 NN x M6 x 1 thread depth 12 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) Model F 38 38 48 58 40 46 44 44 GA 18 18 19 19 48 73 80 105 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 N 4 4 4 4 6 6 8 10 HA 39 39 48 58 45

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PA09] Machine characteristic Reference Machine characteristic Reference (setting (setting Setting Setting Guideline for Guideline for value of value of value value Response machine resonance Response machine resonance LECSS-S LECSS-S frequency [Hz] frequency [Hz] ) ) 67.1 17 1 Low 2.7 21 Middle response response 2 3.6 22 75.6 18 85.2 19 3 4.9 23 4 6.6 24 95.9 20 5 10.0 1 25 108.0 21 6 11.3