SMC Pneumatic Clean Series

Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 175, 200, 250, 300 single rod 1/8 1/4 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 1.5MPa 1.0MPa 0.05MPa

Air Cylinder

13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke

Table of Contents

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 21 (Width across flats) Selection Lock nut F.R.L. Warning M12 x 1 1. This product cannot be used as a check regulator by installing it between solenoid valve and actuator. Doing so could lead to equipment damage. 2.

SQ1000/2000

A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

LEC-OM071xx

Driver type Driver select Motor select SMC Sigma Win+ SMC Sigma Win+ V5 SGDV-R90*11*Y572AA V6 SGMJV-01A3A2* 100W 200W V7 SGDV-1R6*11*Y572AA V7 SGMJV-02A3A2* LECYM2-** MECHATROLINK 400W V8 SGDV-2R8*11*Y572AA V8 SGMJV-04A3A2* V5 SGDV-R90*21*Y572AA V6 SGMJV-01A3A2* 100W MECHATROLINK 200W V7 SGDV-1R6*21*Y572AA V7 SGMJV-02A3A2* LECYU2-** 400W V8 SGDV-2R8*21*Y572AA V8 SGMJV-04A3A2* Trademarks

Tamper Proof and Flat Head Screw

-11SD 12.8 17 17.9 31.8 43.3 21 3/8" 27.8 39.3 6 AS321F-03-08SD AS321F-N03-07SD 15.2 18.5 29.5 41 1/4" 13.2 27.8 39.3 17 8 R 3/8 19 23 9.8 53.7 1.2 47.7 20.9 AS321F-03-10SD AS321F-N03-09SD 18.5 21 31.8 43.3 NPT3/8 19 23 9.8 20.9 53.7 1.2 47.7 5/16" 15.2 29.5 41 18.5 10 AS321F-03-12SD AS321F-N03-11SD 20.9 22 32.8 44.3 17.9 31.8 43.3 21 3/8" 12 AS421F-04-10SD AS421F-N04-11SD 18.5 21 33.6 47.9

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

VN LVC LVA E 21 S LQ2 LVH LVD One nut (including insert bushing) of the nuts is not attached. Please refer to below piping example.

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

High Purity Fluoropolymer

Model E M H W L 1/8 LQ1U11 LQ1U12 LQ1U21 LQ1U22 LQ1U31 LQ1U32 LQ1U33 LQ1U41 LQ1U42 LQ1U51 LQ1U52 LQ1U61 LQ1U62 4 3 6 4 10 8 6 12 10 19 12 25 19 10 11.5 29 10 Class 1 14 41 14 15 16.5 H W M 17 17 20 54 23 1/4 28 21 21 24 63 (E) (E) Class 2 to 5 77 26 26 29 39 L 102 39.5 36 49 36 M Inch sizes H Applicable tubing O.D.

SYJ300/500/700

SYJ700-10-2A P, R port thread -+ -+ -+ -+ -+ -+ -+ -+ Manifold type Stations Nil Rc G NPT NPTF R P 20 21 Type 20 Type 21 2 stations : 20 stations 02 : 20 00F 00N 00T R P P Port 1/4 R port 1/4 P Port 1/8 R port 1/8 Note) For more than 6 stations for type 20 and more than 9 stations for type 21, supply air to both sides of P port and exhaust air from both sides of R port.

5

Applicable bore size (mm) A A1 E1 L1 MM RR1 U1 NDH10 NX I-G04 32, 40 42 14 22 30 M14 x 1.5 12 14 10 +0.058 0 18 0.3 0.5 I-G05 50, 63 56 18 28 40 M18 x 1.5 16 20 14 +0.070 0 22 0.3 0.5 I-G08 80 71 21 38 50 M22 x 1.5 21 27 18 +0.070 0 28 0.3 0.5 I-G10 100 79 21 44 55 M26 x 1.5 24 31 22 +0.084 0 32 0.3 0.5 * A knuckle pin and retaining rings are included.

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

Dual Rod Cylinder Series CXSJ/CXS

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279

Table of Contents

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

0.4

Note ) When mounting top ported valves, select from page 21. In this case, use caution as there is also output on the A and B port on base side.

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279