S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting
Copper/Fluorine/Silicone free + Low particle generation Prefix the asterisk to the part no. of the solenoid valve, etc. 21 W Note) Note) 1021-VQ2000 only Actuation type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center D side U side Manual override Nil B C D 1 2 3 Stations Non-locking push type (Tool required) Locking
Copper/Fluorine/Silicone free + Low particle generation Prefix the asterisk to the part no. of the solenoid valve, etc. 21 W Note) Note) 1021-VQ2000 only Actuation type 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center D side U side Manual override Nil B C D 1 2 3 Stations Non-locking push type (Tool required) Locking
Stroke length tolerance 10-/11-: 30 to 400 mm/s, 21-/22-: 50 to 400 mm/s Piston speed +1.4 0 Mounting Basic/Axial foot/Flange 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Class 4, 21-: Class 5 11-/22-: Class 3 Grease Refer to page 889 for the applicable auto switch list.
position closed center / exhaust center / pressure center Grommet (G), (H): 10-SY7 40(R)G H 02 03 3 4 5 (A, B port) 3/8, 1/4 21 13.5 (Light/surge voltage suppressor) 43.1 21.5 (For mounting) 2 x 4.3 61 4 21 Manual override A B PE 38 46 + + B A X EA EB P 21.5 71.5 18.5 21 134.4 [138.8] 40.7 [42.9] G: Approx. 300 H: Approx. 600 (External pilot port) M5 x 0.8 M5 x 0.8 (Pilot EXH port)
-15 3.5.1 . 3-15 3.5.2 . 3-16 3.5.3 . 3-17 3.5.4 . 3-17 3.6 . 3-18 3.6.1 (SS1) . 3-18 3.6.2 . 3-19 3.6.3 . 3-20 3.6.4 EM2 . 3-20 3.7 . 3-21 3.7.1 . 3-21 3.7.2 . 3-22 3.8 . 3-23 3.8.1 . 3-23 3.8.2 . 3-24 3.8.3 . 3-26 1- 3.9 SSCNET . 3-27 3.10 . 3-29 3.10.1 . 3-29 3.10.2 . 3-30 3.11 . 3-34 4 41 4-18 4.1 . 42 4.1.1 . 42 4.1.2 . 43 4.1.3 . 45 4.2 . 45 4.3 . 47 4.3.1
17 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 8 14.9 21.6 15.2 12 23 18.5 R(PT) 21.6 14.9 27 32 30 33 32 34.5 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 20.9 17 28.5 22 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101 100 (84) 105 26.5 21 33 24 38 44.5 41 46 16 22 Reference dimensions after R(PT) thread installation
Servo-on SON DICOM (Note 3) ALM Trouble RA DOCOM 3 3 3.
Note 3) When N is specified in the end of part number of auto-drain, applicable tubing O.D should be 3/8". P . 14-2-39 14-2-34 35 Air Filter Series AF10 to 60 Flow Characteristics (Representative values) Precautions AF10 M5 AF40-06 Rc 3/4 0.10 0.10 Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions.
(Refer to page 6-3-3.) Same as standard type. (Refer to page 6-3-3.)
7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.
41.2 0 3/5 3/5 2 2 2 2 0 BUS 12 14 60 45.5 30 1 1 39 2 4 4 4 4 21 PWR 3 1 1 33.5 24.5 129.5 M12 male power connector M3 female earth 17 13 64.5 27 (n-1) x 27 2n x Rc, G (According to ISO1179-1), NPTF 3/8" 4(A), 2(B) port 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port U side D side n Station number 4 2 1 3 L2 126 L1 98 (n-1) x 27 27 63 21 21 56 56 2 Indicator light 21 2 x M4 mounting
17 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 8 14.9 21.6 15.2 12 23 18.5 R(PT) 21.6 14.9 27 32 30 33 32 34.5 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 20.9 17 28.5 22 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101 100 (84) 105 26.5 21 33 24 38 44.5 41 46 16 22 Reference dimensions after R(PT) thread installation
3 3 3 3 D-A9l*1 D-A9lV 7 6 6 6 6 Band mounting D-H7l D-H7lW D-H7BA D-H7NF 3 3 3 4 4 4 4.5 5 D-H7C 8 8 8 9 7 8.5 9 10 D-C7l/C80 D-C73C/C80C 7 7 7 7 7 8 8 8 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2.5 3 3.5 3.5 D-A9l*1 D-A9lV 6.5 5.5 6 D-F7l/J79 D-F7lV/J79C D-F7lW/J79W D-F7lWV D-F79F D-F7BA/F7BAV Rail mounting 5 5 6 5 5 6 4.5 4.5 D-A7l/A80 D-A7lH/A80H D-A73C/A80C 8 8 9 9 7 7 7.5 7.5 D-A79W*2
16 1 8 1 4 19.5 24 22 21 18.4 22.5 13.5 14.29 2.3 10-32UNF 20.4 8 12.7 14.29 11.11 3 16 1 8 1 4 10-32UNF 16.5 18 3.5 KQH05-32 15 2.3 10.3 13.6 15.4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1 2 18.5 1 4 14.29 4.6 17 17 16.5 24.5 20.5 15.5 26.5 23 17.46 28.5 26.5 22 30.5 33.5 29 26.5 34.5 33 30 14.29 5 16 18.5 6 17.46 6 17.46 27.5 22.5 18.5 28.5 26.5 22 NPT 3 8 21 7 22.23 9 1 2 22
3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.
21 16 16 18.5 17 17 21 21 16 16 18.5 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot M M1 MM N RT RY S W P Bore size (mm) Stroke range H ZZ e f h ZZ l 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/5 stroke 1/5 stroke 1/5 stroke 50 63 80 100 125 140 160 6 10 12 12 30 24 26 1001 to 1200 1001 to 1200 1001 to 1400 1001 to 1500 1401 to