MB

100 Data to 500 to 500 to 600 to 600 to 750 to 750 28 28 40 40 60 60 10 10 14 14 22 22 164.5 169 197 197 251 251 23 23 30 30 42 42 14 14 20 20 30 30 10.5 11 15 15 23 23 154 158 182 182 228 228 13 13 17 17 26 26 U CX L CZ Z + Stroke RR ZZ + Stroke Center trunnion: (T) Z+1/2 Stroke Center Trunnion Port (mm) Bore size (mm) Stroke range TDe8 TY TT Z TZ TX TDe8 32 40 50 63 80 100 TY to 500 to

Possible to transfer a workpiece at low-speed.

Change of double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination

CL

25 26 27 26 30 31 29.5 38 49 61 64 54 59 67 72 76 10 13 18 23 25 32 40 40 52 52 10 12 15 17 19 10 10 10 14 14 85 95 102 113 124 27 32 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244

EX120/121/122

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

Modular Design with Uniform Body Style

/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.

MGP

40 stroke 20 30 100 P=0.5MPa P=0.5MPa 200 80 100 25 10 20 50 50 40 Load weight m (kg) 3 4 5 16 40 20 30 32 12 2 Load weight m (kg) 1 25 20 10 0.3 0.4 0.5 5 4 16 12 3 0.2 2 0.1 10 100 50 200 40 30 20 1 Eccentric distance l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100

Single Axis Electric Actuator Series LJ1H

thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 1.7 4.8 5.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 92 3-8H10 depth 5 11.5 20 90 (T-slot pitch) 67 45 62 8-6.6 92 9.4 4.5 10 58 30 Stroke + 216 18 T-slot dimensions The

AC Servo Motor Driver

50 20 50 8 16 8.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 22 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 362 135 A section detail (Switch groove) Stroke + 32 3-8H10 depth 5 92 11.5 20 67 90 (T-slot pitch) 45 9.4 62 92 8-6.6 4.5 10 58

LJ1H

Not required. a=3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 45 for deflection data. 8 Series LJ1H20 Dimensions/LJ1H20PC 12.5 9.5 Work piece mounting reference plane 110 4 x M6 x 1 thread depth 15 67 20 4 x M8 x 1.25 thread depth 20 8H10 depth 10 Cable entry side Body mounting reference plane 8H10 depth 8 Z section detail 130 52 52.5 Z section Stroke + 150 (table movement range

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Head side flange style: CQ2G/CDQ2G Without auto switch With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st A B L L1 32 40 50 28.5 53 58 43 48 7 28.5 59.5 64.5 49.5 54.5 7 33.5 77.5 67.5 67.5 57.5 8 Flange bracket material: Carbon steel Double Clevis Style 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st 5 st 10 st 20 st A B CL Without auto

Refrigerated Thermo-chiller

HRZ001-L-Z HRZ001-L1-Z HRZ002-L-Z HRZ002-L1-Z HRZ004-L-Z HRZ004-L1-Z HRZ004-H-Z HRZ004-H1-Z HRZ008-H-Z HRZ008-H1-Z HRZ001-L2-Z HRZ002-L2-Z HRZ004-L2-Z HRZ008-L2-Z HRZ002-W-Z HRZ002-W1-Z HRZ008-W-Z HRZ008-W1-Z HRZ010-WS-Z HRZ010-W1S-Z HRZ010-W2S-Z HRZ001-H-Z HRZ001-H1-Z HRZ002-H-Z HRZ002-H1-Z HRZ008-L-Z HRZ008-L1-Z Applicable model Circulating fluid recoverable volume Note 1) L 15 16 17 Purge

PF2A/PF2W

Digital Flow Switch For Water Series PF2W How to Order ZSE ISE Integrated display type PF2W7 20 03 27 PSE Unit specifications Flow rate range Z I SE3 Thread type Nil M With unit switching function Fixed SI unit Note) 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min 04 20 40 11 Nil N F Rc NPT G PS Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l Port size Z I SE1

CG1

33 16 13 10 5.5 30 3.2 39.8 Up to 200 54 12 40 20 15 10 6.6 35 4.5 49.4 Up to 200 63.5 14 49 22 18 10 6.6 40 4.5 58.4 Up to 200 Clevis/CG1DN Z 1 to 50st 51 to 100st 10 1to 125st 126 to 200st Bore size (mm) TW TX TY TZ Z ZZ Z ZZ Z ZZ ZZ 20 25 32 40 42 16 28 43.4 143 164 168 189 193 214 42 20 28 48 150 171 175 196 200 221 225 246 48 22 28 59.4 156 180 181 205 206 230 231 255 56 30 30 71.4

e

X LXS X-axis Y-axis Z-axis 5 Z W 4 kg 5 mm 10 mm 20 mm LC6m 20 LZm Y 10 LC3F2 3 Calculation of Load Factor for Static Load Xm m1: Mass D-m m1 m1 max (from 1 of graph m1) = 15.5 (kg) . E-MY Load factor a1 = m1 / m1 max = 4 / 15.5 = 0.26 X M1: Moment m1 M1 max (from 2 of graph M1) = 1.45 (NNm) .

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

CNA

16 12 12 10 8 to 500 35 32 70 27 108 1/4 1/8 52 12 18 20 40 10 95 17 56.5 20 13 15 12 11 to 600 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 to 600 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 to 750 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 to 750 (mm) Bore (mm) 40 50 63 80 100 K J KA L MM N P Q H S T U V W Z ZZ

Slider Type Ball Screw Drive/11-LEFS Series

8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work