VDW

PAX PB Flow Characteristics Water Air 12 (INN.C.) Orifice size (mm ) Port size 12 (INN.C.)

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

MLU

3.2 4.5 4.5 5 LY 11 12 15 18 LZ X 6 8 10 11 Y LD Model LT CL1 29 37 46 57 56 71 89 109 5.5 6.6 9 11 MLUL25 MLUL32 MLUL40 MLUL50 23 27 31 37 12 16 18 21 144 164 177 209.5 LS + Stroke X Y X Y LX LZ MLGC 4-LD ZZ + Stroke CNG Front flange style MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Made to Order

Y Z R Y X 20 25 32 40 20 25 32 40 250 to 400 80 106 35 60 21.5 65 85 12 26 16 114 65 52 39 3 143 194 14 151 M6 x 1 depth 9 -X -X M8 x 1.25 depth 13 350 to 500 95 134 50 75 26.5 73 96 12 31 20 138 84 62 46 3 153 228 14 161 M8 x 1.25 depth 13 350 to 600 95 134 50 75 26.5 73 97 12 38 20 138 84 62 46 3 156 228 14 164 M10 x 1.5 depth 16 350 to 800 115 152 56 90 28 81 104 12 47 25 164 94 75 56

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

MGQ

Side mounting Bottom mounting (Except 12, 16, 20, 25) Terminal Band 8-20-1 2 Compact Guide Cylinder Series MGQ 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGQ M 25 30 Y7BW Thread type Rc G Nil E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bearing type

MHL2

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 12-1-4 to 12-1-6 for Precautions on every series. Warning If a workpiece is hooked onto the attachment, make sure that excessive impact will not be created at the start and the end of the movement.

NCA1

NI-325 NI-800 NI-1000 A 1 1/8 1 5/8 2 CA 2 1/16 2 13/16 3 7/16 CB 1 1/4 1 1/2 2 CD 3/4 1 1 3/8 ER 7/8 1 3/16 1 9/16 KK 3/4-16 1-14 1 1/4-12 Weight (lbs) 0.39 1.04 2.37 Part No.

CC

Compact hydraulic cylinder conforming to JIS Double acting, double rod Series CH2W Bore size (mm) Stroke (mm) Nominal pressure (MPa) Series Fluid CH2EW CH2FW 32 Hydraulic fluid 40 Cushion seal type 25 to 800 Standard mineral hydraulic fluid W/O hydraulic fluid O/W hydraulic fluid 50 CH2EW CH2FW CH2W 3.5 7 63 80 25 to 1000 100 For details, refer to the catalog CAT. ES110-12.

CL

to 350 301 to 400 301 to 450 301 to 800 12 12 12 13 149 159 162 178 11 11 11 12 12 12 12 13 149 159 162 178 125 135 136 151 16 16 16 16 186 201 204 230 12 12 12 13 149 159 162 178 205.5 227.5 208.5 235 230.5 255 3.1-30 SeriesCLG1 Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (Knuckle pin and snap ring are packed.)

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 Actuator specification Electric 401 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to

CNG

2 87 10 (12) 18 5.5 6 4 8 5 26 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 103 1/8 51.5 16.5 10 14 2 97 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 Data 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20

Support Guide/11-LEFG Series

14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000

Step Motor Driver （ Pulse input type ）

Undefined parameter 11 : "Electronic gear (numerator)"(Default: 1) Undefined parameter 12 : "Electronic gear (denominator)"(Default: 1) Undefined parameter No.11 This product controls LE series motor (800 pulse per rotation). Please refer to the electric actuator manual for the appropriate range of the movement due to the rotation of the motor.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

VP4

VP7-8: Flow Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics Type of actuation Valve model Port size Single 12 12 12 12 13(6.8) 7.5 7.5 7.5 7.5 7.6(6.1) 0.30 0.30 0.30 0.30 0.32(0.35) 0.32 0.32 0.32 0.32 0.34(0.23) 3.1 3.1 3.1 3.1 3.3(1.8) 2.0 2.0 2.0 2.0 2.1(1.6) 13 13 13 14(13) 12 7.6 7.6 7.6 7.6(7.6) 7.6 0.30 0.30 0.30 0.30

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82

Membrane Air Dryer

Specific Product Precautions Unit Type IDG100, 100H IDG75, 75H 0.08 0.10 P1 = 0.3 MPa 0.08 0.06 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.5 MPa 0.06 P1 = 0.5 MPa 0.04 0.04 P1 = 0.7 MPa 0.02 P1 = 0.7 MPa 0.02 M V 0.00 0.00 0 1000 600 800 400 200 1200 0 800 1200 400 1600 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40oC [Symbol: L]

VP300/500/700

Standard Base mounted Universal External pilot Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Weight (kg) Series 2 1 (A P) 1 2 (P A) 3 2 (R A) 2 3 (A R) C [dm3/(sbar)] 3.3 4.0 2.9/2.9 3.1/2.9 6.6 9.1 6.5/7.0 7.9/8.1 12 15 12/12 15/14 Cv 0.86 0.99 0.74/0.76 0.79/0.83 1.6 2.4 1.7/1.8 1.8/1.9 2.9 3.8 2.9/3.1 3.5/3.3 C [dm3/(sbar)] 3.4 3.7 3.3/3.6 4.1/4.1