New

For Air Upstream pressure of valve P1 z 1.0 MPa Downstream pressure of valve (P2) [MPa] 1.0 0.8 Subsonic Critical 0.9 0.6 pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 500 700 10 700 1,000 Flow rate Q [L/min (ANR)] How to read the graph The sonic

Modular Design with Uniform Body Style

g*12 g*12 g*12 g*12 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

SMC Pneumatic Clean Series

Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.

LEJ-OM002xx

Initial value Recommended value Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) / 0003(LEC-MR-RB-12) (+Counter motors side) 0 (+Counter motors side) Rotation direction selection PA14 0 1 Adaptive tuning mode PB01 0 0 0002 0 Load to motor inertia moment ratio PB06 7 7 50 Machine resonance suppression filter 1 PB13 4500 4500 400 4500 Notch shape selection 1 PB14 0 0 0030 0 Parameter

Ionizer

Workpiece electric charge voltage Workpiece electric polarity LED + OK +400 V or higher Positive Light ON +100 V to +400 V Flash at 4 Hz +30 V to +100 V Static neutralization completion Light OFF Within 30 V 30 V to 100 V 100 V to 400 V Negative 400 V or lower ALARM LEDIndicates abnormal states of the ionizer.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150 200 250 300 350 400 50 100 150 200 250 300 350 400 Stroke MXY6 2 3 3 4 39 34 59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(

LEKF-OMZ0035

32 40 S2 100 25 LECSA-S1 R Right side parallel AC servo motor S3 200 32 LECSA-S3 Incremental L Left side parallel S4 400 40 LECSA2-S4 encoder Lead[mm] LECSB2-T5 Symbol LEKFS25 LEKFS32 LEKFS40 LECSC2-T5 T6 100 25 LECSN2-T5H 20 24 30 LECSS2-T5 A 12 16 20 LECSB2-T7 B 6 8 10 AC servo motor LECSC2-T7 T7 200 32 Absolute encoder LECSN2-T7Stroke LECSS2-T7 50 50 LECSB2-T8 to to LECSC2-T8 T8 400 40

Magnetically Coupled Rodless Cylinder

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil 20, 25, 32, 40 TN TF Standard stroke Refer to page 12 for standard stroke.

LG1H

Motor cable: Counter axis side Lock cable: Counter axis side Encoder cable: Axis side (30) L 37.4 LE-CSNA LE-CSNB I/O connector LE C SNA 37.2 52.4 Controller type I/O connector (LECSA) I/O connector (LECSB) SNA SNB 39 39 Regeneration option 6 Mounting hole LA LEC MR RB LEC (12) 144 12 (6) 15 Regeneration option type 032 Allowable regeneration power 30 W 12 Allowable regeneration power 100

Ionizer Nozzle type IZN10 Series IZS

8 6.5 Section A-A Air blow port Air blow port 2 x M3 x 0.5 thread depth 10 26 32 12 11 2 x 3.4 6/For elbow 1/4"/For elbow 1/4" 11.5 12 24.5 22 7 18.5 16 10 10.3 Refer to page 457 for dimensions of the model with bracket. 463 IZN10 Series Specific Product Precautions 1 Be sure to read this before handling the products.

100

to 24 VDC 12 to 24 VDC FUNC FUNC Blue DC () Blue DC () Output specification A NPN (2 outputs) Output specification B PNP (2 outputs) ZL1 Series ZL3/ZL6 Series Brown DC (+) Brown DC (+) Load Black OUT1 Black OUT1 Load Load Main circuit Main circuit + + White OUT2 White OUT2 12 to 24 VDC 12 to 24 VDC Load FUNC FUNC Blue DC () Blue DC () Output specification C NPN (1 output) + Analog voltage

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Base Mounted Metal Seal/Rubber Seal Series VQ

1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Inrush 1.3 VA (12 mA), Holding 1.3 VA (12 mA) 110 VAC VQD Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC Inrush 2.6 VA (12 mA), Holding 2.6 VA (12 mA) 220 VAC Note 1) Note 2) Use dry air to prevent condensation when operating at low temperatures.

SYJ3000/5000/7000

12 12 12 25.5 25.5 25.5 25.5 Refer to page 1-5-79 for dimentions with connector cable. 1-5-58 59 5 Port Solenoid Valve Rubber Seal Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 SV SZ SY G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] SYJ SX B A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

V IC circuit Reed switch Solid state switch 12 V Diagnostic indication (2-color display) 5 V,12 V IC circuit Relay, PLC Grommet 24 V Yes 12 V 5 V,12 V IC circuit Water-resistant (2-color display) 12 V Magnetic field resistant (2-color display) 2-wire (Non-polar) 3-wire (NPN equivalent) A96V A96 IC circuit 5 V U U Yes 24 V Grommet A93V A90V A93 A90 IC circuit 100 V 12 V 5 V,12

0.4

2 Gasket Seal Clamp screw Clip HNBR HNBR Carbon steel Stainless steel 12 12 12 12 Pilot valve assembly V112 A Function Coil voltage Note) A set of parts containing 12 pcs. each is enclosed. 1 2 3 4 5 6 Symbol Specifications DC AC 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC (0.4 W) Note 1) Nil Standard (0.95 W) High-speed response type B (0.95

Fieldbus System

352 368 384 400 416 432 L3 148 160.5 185.5 198 210.5 235.5 248 260.5 273 298 310.5 323 348 360.5 373 385.5 410.5 423 435.5 448 473 485.5 498 L4 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 337.5 350 362.5 375 400 412.5 425 437.5 462.5 475 487.5 L5 13.5 12 16.5 14.5 13 17.5 15.5 14 12 16.5 15 13 17.5 16 14 12.5 17 15 13.5 11.5 16 14.5 12.5 16 Plug-in Connector Connecting Base

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

size Lubrication Model Rubber Air M3 x 0.5 12-CY3B6 6 300 50, 100, 150, 200 M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250

Electric Slide Table / High Precision Type 《 AC servo motor 》

385 Max. speed[mm/s] 400 200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw