SMC Corporation of America
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On : Output Off : Not output On, Off Off 11 Upper/Lower Temp. Alarm Sequence * How to return default value: Turn on the power supply with pressing [SEL] and [RET] keys.

Input time 30 ms or longer Reference condition*11 Select from Standard condition or Normal condition.

VXA VN Solenoid valve option Nil Standard LVC Select an option mark in page 17-3-11 by Applicable Fluids Check List for special fluids outside of the standard. LVA Refer to the table (2) given below for availability.

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

DC (+) Brown Main switch circuit OUT Black Auto Switch Weights Unit: g DC (s) Blue D-Y7NW(V) D-Y7PW(V) D-Y7BW(V) Model 0.5 11 11 11 Lead wire length m 3 54 54 54 D-Y7PW, Y7PWV 5 88 88 88 DC (+) Brown Main switch circuit Auto Switch Dimensions OUT Black D-Y7W Mounting screw M2.5 x 4l Slotted set screw DC (s) Blue Indicator light 3.4 2.5 SMC SMC 6.2 5 D-Y7BW, Y7BWV 29 OUT (+) Brown Main switch

to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 1 to 10 psig (0.007 to 0.07 MPa) Delivery pressure Gas Select compatible materials of construction for the gas Vacuum to 300 psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11

If installed improperly, the product might leak water or topple, resulting in injury. 4.4 Installation 4-11 A_HEC-OM-J004-4 Chapter 5 Operation Chapter 5 Operation 5.1 Start of Operation 1. Confirm that the recirculating fluid has reached the LOW level of the tank and supply cooling water to the Liquid Tank. 2.

55 41 63 36 10 XL*-OMI0010-E 4-2Size 50,63,80,100,160 C E D C E E (KF Flange) (K Flange) Fn Fd J K H B A G A Unit: mm Model A B C D E Fn Fd G H J K XLG-50-1 70 183 80 31 10.5 75 52 77 29 10.5 XLG-63-1 88 209 100 39 11 87 95 70 76.5 36 9 XLG-80-1 90 250 117 45.5 11 114 110 83 105 44 9 XLG-100-1 108 270.5 154 55 11 134 130 102 92 58 9 XLG-160-1 138 339 200 65 11 190 180 153 124 62 12.5 11

VXA VN Solenoid valve option Nil Standard LVC Select an option mark in page 17-3-11 by Applicable Fluids Check List for special fluids outside of the standard. LVA Refer to the table (2) given below for availability.

When attaching an extension nozzle cover, confirm that the nozzle tip is completely inserted into the extension nozzle cover. 11. Do not use a nozzle cover or extension nozzle cover if it is cracked or does not fit securely, and replace with a new cover. 7 8 9 10 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

(Displays 0 when the (Displays 0 when the (Displays 0 when the value is below 270 L/min) value is below 540 L/min) value is below 1080 L/min) 300 to 3150 L/min 600 to 6300 L/min 1200 to 12600 L/min 10.0 0 to 10%F.S.

CONTENTS SAFETY 2 General General 3 positions 5 positions Model Indication Method 5 Names and Functions of Individual Parts 6 Installation 9 3 positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 5 positions Names and Functions of Controller 23 Example of Internal Circuit and Wiring 24 Setting 27

1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) 14-5-11 11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Selection 3 Clamp arm 40 8.0 200 180 7.0 Distance from pivot point (inches) 160 Distance from pivot point (mm) 6.0 140 5.0 120 4.0 100 80 3.0 60 2.0 40 1.0 20 0 0 0 1 2 3 4 5 6 7 0 5 10 15 20 25 30 Load capacity (N) Load capacity (pounds) 50 6.0 200 5.5 180 Distance from pivot point (inches) Distance from pivot point (mm) 5.0 160 4.5 4.0 140 3.5 120 3.0 100 2.5 2.0 0 1 2 3 4 5 6 7 8 9 10 11

Accuracy: Basic Type, Size: 63, Motor Type: S3 (200W Output, Incremental Encoder), Lead, mm: A (Size 40: 16mm, Size 63: 20mm, Size 100: 25mm), Stroke: 1200mm

Accuracy: Basic Type, Size: 63, Motor Type: 200W Output, Incremental Encoder, Lead, mm: Size 40: 16mm, Size 63: 20mm, Size 100: 25mm, Stroke: 1200mm, Motor Option: -, Cover: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -, Option: -

Positioning distance (mm) 1200 600 100 10 1 10 120.5 60.5 10.5 1.5 0.6 Speed (mm/s) 100 12.5 6.5 1.5 0.6 0.5 250 5.4 3.0 1.0 0.6 0.5 500 3.1 1.9 0.9 0.6 0.5 Values will vary slightly depending on the operating conditions.

900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance