Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25 depth 14 9.5 depth 6 25 30 85 16.5 13 16 6.6 54 113 35 65 100 26.5 70 130 65 30 35 109 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 32 35 100 19 16 16 6.6 60 118 35 80 106 29 80 135 73 35 40 129 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 40 40 120 22 19 19 9 75 150 50 100 134 32 95 170 93 45

REA/REB

10 10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 7 12 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 50 63 1000 1000 Recommended driving force Fn (N) Recommended driving force Fn (N) 500 400 500 300 300 200 200 Usable range 100 100

SFOD-OMT0009CN

13 No.SFOD-OMT0009CN-B 3.6 (1) View(V) parameter Actuator selection 14 No.SFOD-OMT0009CN-B (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 (a) ) LEY16RA-75LEY16RALEY16RA-100 (b) LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 (c) 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (

Compact Cylinder with Air Cushion

73 55 30 to 100 M FV 80 11 11 99 116 134 20 53.5 77 83.5 63.5 40 to 100 100 11 11 117 136 154 22 53.5 94 98 76 40 to 100 4-FD FT L FX FZ B + Stroke A + Stroke Rod end male threads Rod end nut L1 Rear flange type/RQG, RDQG Rear flange type mm Bore size (mm) Stroke range (mm) L1 L A FV M 33.5 8 63 72 30 to 100 43.5 10 80 84.5 40 to 100 B + Stroke 4-FD 43.5 12 100 99 40 to 100 L FT FX FZ A +

SMC Pneumatic Clean Series

-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum

SV

200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600

Support Guide/11-LEFG Series

Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180 11-LEFG16-S-150 244 157 230

JXCx-OMY0004

/s 4-7 DWORD Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 8-9 WORD Acceleration 1 to Max ACC of the basic parameter (5, 11, 14) 1mm/s2 10-11 WORD Deceleration 1 to Max DEC of the basic parameter (5, 11, 14) 1mm/s2 12-13 WORD Pushing force (5, 11, 14) 1% (Thrust setting 14-15 WORD Trigger LV (5, 11, 14) 1% value) 16-17 WORD Pushing (5, 11, 14) 1mm/s speed 18-19 WORD

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/

MXS

5.5 5.5 11 MY1 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 20 30 20 28 38 ZZ 48 58 68 90 106 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 MXS6L-10 MXS6L-20 MXS6L-30 MXS6L-40 MXS6L-50 3.11-29 Series MXS Dimensions MXS 8L

5 Port Solenoid Valve

mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply voltage communication Internal current consumption D-sub M12 None Built-in M12 Built-in Communication connector specification Terminating

CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

MNB

2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

XL

XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Compact Cylinder with Lock Series CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

CJ2X/CUX/CQSX/CQ2X/CM2X

Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 1/4 25, 50, 75, 100, 125 150, 200, 250, 300 Non-lube Double acting single rod 1/8 1/4 174 Low speed cylinder 10CM2X/11-CM2X Specifications