OMR0032

time: tp = ta + tc + td [s] 0 (Add settling time to the Positioning time to get the total 0 250 500 750 1000 positioning time).

CNS

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100 500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 500

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 800

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 950

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 400

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 750

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 200

Series: 11-LEFG (Guide, Clean Series), Size: 40, Mounting Pitch: S, Stroke, mm: 500

Series: 11-LEFG (Guide, Clean Series), Size: 40, Mounting Pitch: S, Stroke, mm: 800

Series: 11-LEFG (Guide, Clean Series), Size: 40, Mounting Pitch: S, Stroke, mm: 950

Series: 11-LEFG (Guide, Clean Series), Size: 40, Mounting Pitch: S, Stroke, mm: 400

Series: 11-LEFG (Guide, Clean Series), Size: 40, Mounting Pitch: S, Stroke, mm: 750

Series: 11-LEFG (Guide, Clean Series), Size: 40, Mounting Pitch: S, Stroke, mm: 200

MXF

My = 0.5 x 9.8 (10 + 11)/1000 = 0.11 A3 = 11 May = 1 x 1 x 9.14 = 9.14 Mymax = 9.14 K = 1 = 1 2 = 0.11/9.14 = 0.012 Examine Mr.

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

OMR0031

time: tp = ta + tc + td [s] 0 0 250 500 750 1000 (Add settling time to the Positioning time to get the total Load Ma[g] positioning time).

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.