Membrane Air Dryer

500 110 Drain discharge method Symbol Note H L S Manual valve Nil 75 170 240 100 300 150 C D N.C. auto-drain N.O. auto-drain Auto-drains listed on 50 page 17 are attached.

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Compressed Air Cleaning Filter Series

P Q S R Drain cock Gray: N.C.

JXCx-OMY0004

/s 4-7 DWORD Position Basic parameter "Stroke(-)" "Stroke (+)" (5, 11, 14) 0.01mm 8-9 WORD Acceleration 1 to Max ACC of the basic parameter (5, 11, 14) 1mm/s2 10-11 WORD Deceleration 1 to Max DEC of the basic parameter (5, 11, 14) 1mm/s2 12-13 WORD Pushing force (5, 11, 14) 1% (Thrust setting 14-15 WORD Trigger LV (5, 11, 14) 1% value) 16-17 WORD Pushing (5, 11, 14) 1mm/s speed 18-19 WORD

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

5 Port Solenoid Valve Series VQZ1000/2000/3000

C M S C C S M C S M NI NI IN IN OUT OUT B B 2 To CYL port To CYL port 4 P.960 P.961 P.962 P.974 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Smooth Cylinder

7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11

Series IDG

200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S Standard equipment Note) In case of two or more options, indicate them in alphabetical order.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s 100 200 300 400 500 1000 1500 Piston speed mm/s MY2C MY2 H/HT Maximum Load Mass Select the load mass from within the range of limits shown in the graphs.

15

V = 1.4 x Va V = 1.4 x 250 V = 350 mm/s Va M1E = 1/3 x FE x Z = 1/3 x 188.7 x 100/1000 = 6.3 [Nm] (A) M1E (z) m x g Z 3A = M1E/M1max = 6.3/17.1 = 0.37 Find the value M1Emax when Va = 350 mm/s from Graph (11) v. Va Examine M3E.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

400 300 200 100 0.05 0.1 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-14-13 13 Mechanically Jointed Rodless Cylinder Short Type/Basic Type Series MY3A/3B 16, 25, 40, 63 How to Order MY3 A 16 300 LS M9B Type Number of auto switches Nil S n Short type (Rubber bumper) Basic

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

Fieldbus System

SS5Y5 10 NA 05 N M S U C 8 6 Refer to page 20 for Type 11/ Bottom ported dimensions. Mixed Mounting Type q w e r t o y !0 u i It is possible to mount SY3000 size valves on all stations. In this case, there is no need to fill in part i in the order code.

MY2

Load weight kg MY2HT25 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s 1000 L unit 500 400 300 Air cushion 200 100 1 2 3 4 5 10 20 50 40 30 m1 max. m1, m2, m3 max. Load weight kg MY2HT40 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s L unit 1000 500 400 300 Air cushion 200 1003 5 10 20 30 50 100 200 m1, m2, m3 max.

7

D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 98.5 (106.5) 192.5 (200.5) 98 (106) 98 (106) 104 (112) 168 (176

JXCx-OMY0006

mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 Controller power supply To PWR 24VDC PC Power supply plug (Included) or USB cable AWG20 (0.5mm2) (AminiB type) Part No:LEC-W2-U Teaching box (3m cable is provided.)

AS

A 3.2 7.2 9 (9) AS22;1F-01-04(S)A 4 8.2 19.1 26.1 (26) 13.3 13 AS22;1F-01-06(S)A 19.1 6 1/8 10.4 11.6 30.6 29.2 27.5 26.1 10 (9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5 (32.8) 36.6 35

C92

300 200 160 140 125 100 80 63 50 40 32 m(Kg) 100 70 50 30 20 10 7 200 250 300 350 400 450 500 550 600 V(m/s) Example: Load limit at rod end when air cylinder 50 is actuated with max. actuating speed 325mm/s.