CJ2X/CUX/CQSX/CQ2X/CM2X

Model Cushion Auto switch mounting Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-CM2X20 10-CM2X25 10-CM2X32 10-CM2X40 11-CM2X20 11-CM2X25 11-CM2X32 11-CM2X40 Relief type Vacuum suction type 1/8 1/4 25, 50, 75, 100, 125 150, 200, 250, 300 Non-lube Double acting single rod 1/8 1/4 174 Low speed cylinder 10CM2X/11-CM2X Specifications

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

LVQ

Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.

0.

Formula: L5 = 16n + 11 L3 = 16n + 22 n: Stations (Max. 20 stations) Dimensions L n 2 3 110.5 100 70 20.5 59 4 123 112.5 86 18.5 75 5 135.5 125 102 17 91 6 148 137.5 118 15 107 7 173 162.5 134 19.5 123 8 185.5 175 150 18 139 9 198 187.5 166 16 155 10 223 212.5 182 20.5 171 11 235.5 225 198 19 187 12 248 237.5 214 17 203 13 260.5 250 230 15.5 219 14 285.5 275 246 20 235 15 298 287.5 262 18

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR 50-01-A18 75-01-A18 289 147 ZCUK 75-01-A18 ZPT100HBNJ25-01-A22 535 168 40 50 63 80 100 125 1 0 ZPT50HBNJ25-01-A18 50-01-A22 575 143 AMJ 2 0 50-01-A18 75-01-A22 620 163 3 0 75-01-A18 100-01-A22 659 201 AMV 6 0 ZPT63HBNJ25-01-A18 ZPT125HBNJ25-01-A22 719 208 12 1 50-01-A18 50-01-A22 228 759 AEP 22 3 75-01-A18 75-01-A22 249 804 ZPT80HBNJ25-01-A18

CV/MVGQ

11 9 9 11.5 13.5 13.5 40 45 50 65 75 86 83 83 84 85 138 144 166 204 212 3.2 3.2 3.2 4.5 6 42 50 59 76 92 70 80 93 116 133 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 8 11 11 13 16 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Bore size (mm) Without rod boot With rod boot l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke N S W X Y

Brake mechanism added

25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to 600 40 80 37 131.5 41 116 56.5 25 92 35.5

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

CP95

5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5 40 15 9 18 21 45 4.3 4 27 16 22 65 10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41

CP95

11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50 70 25 11

MY1

model RB0806 RB0806 RB1007 RB1412 RB1412 W 37 45 53 64 75 TT 5.4 (max. 11) 6 (max. 12) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) T 6 6 7 12 12 S 40.8 40.8 46.7 67.3 67.3 h 3.6 3.6 3.5 4.5 4.5 FC 13 14 17 20 26 FA 11.5 15 20 23 24.5 F 4 4 EY 39.5 45.5 53.5 67.5 82 EC 5.8 5.8 7.5 9.5 11 EB 28 33 40 45.6 55 E 14.6 19 18 25 31 EA 7 10 9 14 19 Model MY1H16 MY1H20 MY1H25 MY1H32 MY1H40 High

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

CNG

st or more 75 st or more 10 st or more 75 st or more D-B59W 20 to 74 st 20 to 74 st 15 st or more 75 st or more Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

IZx-OMX0087

Flow rate : 180L/min 75 50 25 0 25 50 75 Installation distance from ionizer to workpiece [mm] 75 50 25 0 25 50 75 -75 -50 -25 0 25 50 75 -75 -50 -25 0 25 50 75 0 0 mm ionizer to workpiece [mm] Installation distance from mm 200 200 20m/s 400 400 2m/s 20m/s 2m/s 600 600 10m/s 800 800 10m/s 5m/s 1000 1000 1200 5m/s 1400 5-4.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6

Rotary Clamp Cylinders

Operating range Cylinder model C D 8 8 8 8 Mounting bolt size M3 x 50 L M3 x 60 L M3 x 50 L M3 x 60 L M5 x 75 L M5 x 85 L M5 x 75 L M5 x 85 L M5 x 85 L M5 x 95 L M5 x 75 L M5 x 85 L M6 x 95 L M6 x 130 L M8 x 100 L M8 x 130 L 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20

Prevents Micro-Bubbles

79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 PB 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55 18 8 42 57 5.5 48 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions With flow rate adjustment With by-pass (Max.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

specifications for up to 11 stations.

IDU/IDF

15 Symbol 22 37 55 75 Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 IDF FL 22 C IDF BP 22 C Applicable dryer Applicable dryer Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDF1D IDF2D IDF3D IDF4D