Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 5 Stations, SUP/EXH Block Mounting: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: -

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting)

Type of Connector: P (Flat Cable 26P), Connector Outlet Direction: 2 (Connector Side Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting)

Type of Connector: F (D-sub Connector 25 Pin), Connector Outlet Direction: 1 (Connector Top Direction), Stations: 5 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting)

5 Port Solenoid Valve Series SQ1000/2000

D Note 1) C Note 2) Note 1) Except double (latching) Note 1) The function symbol is D for double solenoid specifications.

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

19 218 210 19 Series SYJ3000 C4 N3 Type 46 Manifold: Side Ported/SS5YJ3-46Stations -M5, [ ]: AC Approx. 300 (Lead wire length) C4 N3 Grommet (G) For M5 For (Built-in one-touch fitting) (Pitch) P = 10.5 14.5 1/8 (P port) 10 Manual override 1/8 (P port) 10 59.9 [62.1] 60.7 [62.9] 34.9 78.8 [83.2] (4.4) 18.9 91.7 [96.1] B B B B B 38.5 8.8 37.7 35 3.3 P P 19 A A A A A 10 2-4.5 (For mounting

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

S 20 20 stations P, R port thread type + + + + + + + A, B port size R R P P port 1/8 R port 1/8 A B M5 Nil Rc M5 x 0.8 B A A, B port M5 x 0.8, C4 A, B port M5 x 0.8, C4 C4 F G One-touch fitting for 4 N3 N NPT One-touch fitting for 5/32" T NPTF Common SUP/Individual EXH type Note) For more than 10 stations, supply air to both sides of P port.

Secondary Batteries

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R A, B port size (inch) A, B port size (metric) P, E port Applicable series P, E port Applicable series A, B port A, B port Symbol C4 C6 C8 C8 C10 C12 M Symbol N3 N7 N9 N9 N11 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

side D side 3 m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C8: 8 One-touch fittings Manifold base (8 stations) 10-SS5Q23-08FD2-D F kit (D-sub connector kit) 10-SS5Q23-08FD2-D 1 set (F kit 8-station manifold base) 10-SQ2131-51-C8 3 sets (2 position single) 10-SQ2231D-51-C8 3 sets (2 position double) 10-SQ2331-51-C8 1 set (3 position closed center) SSQ2000-10A-3 1

Intrinsically Safe Valve

Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order Valve 5 2 LL 3 SY 53 40 UL/CSA compliant Manual override Nil D E Non-locking push type

VDW30/40-XF

/Dimentions Male Quick Fastener Dimensions Table A 60.15 Port size (Quick fastener) Port size (Quick fastener) P7 P10 P7 P10 A B C D E 7 0 0.05 9.90.05 15 10 0 0.05 12.850.05 20 Clip part no. A B C D VDW30-CP7 26 7 9 14 VDW40-CP10 28 10 10 15 C D 2.50.1 9 or less 1.6 or more 2.5+0.25 0 2.5+0.25 0 D B 120.1 13 17 O-ring 2 or more O-ring dimentions P7 P10 (Nominal no.)

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

C D E F Dimensions Part no.

3 Port Solenoid Valve Metal Seal Series VZ200 1

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Stations n: Stations Formula L1 = 17n + 10 L2 = 17n + 27 2 44 61 3 61 78 4 78 95 5 95 112 6 112 129 7 129 146 8 146 163 9 163 180 10 180 197 VT Symbol L1 L2 VP Common exhaust: VV3Z2-50 (Built-in One-touch fittings manifold) VG (G) (L) (M) (D) With light/surge voltage suppressor VP (Lead

CRB2/CRBU2/CRB1

CRB2BW, CRBU2W: Sizes 10 to 40 CRB1BW: Sizes 50 to 100 10-3 10-1 10-4 Inertial moment (kgm2) Inertial moment (kgm2) CRB2BW, CRBU2W10-D CRB2BW, CRBU2W15-S CRB2BW, CRBU2W15-D CRB2BW, CRBU2W20-S CRB2BW, CRBU2W20-D CRB2BW30-S, D CRB2BW40-S, D CRB1BW100-D CRB1BW50-S CRB1BW50-D CRB1BW63-S CRB1BW63-D CRB1BW80-S CRB1BW80-D CRB1BW100-S 10-2 10-5 CRB2BW, CRBU2W10-S 10-6 10-3 10-7 10-8 10-4 0.03 0.1

Table of Contents

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.