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FT1 1/4 FT4 1/4 FT5 1/4 FT6 1/4 FT3 1/4 FT8 1/4 FT2 1/2 17/16 15/16 29/32 15/16 31/32 / 6 3 11/8 11/16 Hex Typ. 111/16 29/32 13/8 13/16 19/32 Typ. 15/16 not shown 13/32 67 1/4 FT2 x 3 1/4 FT4 x 3 1/4 FT5 x 3 1/4 FT6 x 3 1/4 FT3 x 3 1/4 FT3 1/2 x 3 1/4 FT2 1/2 x 3 13/64 25/32 Bulkhead Fittings 25/32 10-32 10-32 5/16 1/4 1/4 1/4 1/4 57/64 10-32 1/4 Hex Typ. 57/64 10-32 5/16 Hex 1/4-28 68 10

Slider Type Ball Screw Drive/11-LEFS Series

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

HRX-OM-M090

Rated Rated Sensitivity voltage x size voltage current of leak [V] [A] current [mA] HRS012--10 HRS018--10 1-phase 100V AC(50Hz) 100 200 15 15 or 30 HRS01--10-T 1-phase 3 cores x Sharing 100V to 115V 14AWG (High pump head AC(60Hz) [Optional]) (3 cores x 2.0mm2) HRS012--20 HRS018--20 HRS024--20 1-phase 10 30 (including ground) 200, 200-230V AC 230 HRS0--20-T (50/60Hz) 15 30 (High pump head

VFS

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

Table of Contents

CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l

SMC Pneumatic Clean Series

15 6 6 5 17 17 13 6 6 42.5 34.5 30 24 24 22 22 18 37.5 29 29 29 21 19.5 19.5 15.5 14 12 10 8 30.4 104 78 76 76 M6 x 1 depth 11 M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2 10-/1121-/22Cylinder with end lock/ 20, 25, 32, 40 (Head side lock) How to Order Clean series 10 11 Relief type Vacuum suction type 10

LX

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

10

D-M9l D-M9lW n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 10 D-M9lV D-M9lWV n 10 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 15 D-M9lA n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 15 D-M9lAV n 15 + 30 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 1 15 D-A9l

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-

Speed Controller with Indicator

(14) AS22l1FSl-U01-10 10 15.9 25.3 32.3 (32.2) 15.6 16 (15) AS22l1FSl-U02-23 3.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 1/8 13 (12.7) 7.2 20.9 30 (30.3) 22.6 49.7 48.3 44.2 42.8 13.3 21.5 24 7.8 16.2 24 (25) AS22l1FSl-U02-04 4 8.2 AS22l1FSl-U02-06 6 10.4 23.4 32.5 (32.8) AS22l1FSl-U02-08 8 13.2 23.9 33 (33.3) 14.2 25 (26) AS22l1FSl-U02-10 10 15.9 26.9 36 (36.3) 15.6

SMC

35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 HA 40 40 40 25 36 72 76 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 GA 15 15 15 42 51 61 111 N 4 4 4 4 6 6 6 NA 2 2 2 2 2 4 4 KA 125.5 179.5 13-/22-MXS12-10 13-/22-MXS12-20 13-/22-MXS12-30 13

HRX-OM-Q026

25 Cooling capacity [kW] 20 Facility water temperature: 40 oC 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-14: Cooling Capacity (HRSH200-W-20/40-) 8.4.9 HRSH250-W-20/4035 Facility water temperature: 32 oC 30 25 Cooling capacity [kW] Facility water temperature: 40 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-15: Cooling Capacity (

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Thermo-chiller

Existing model 15 10 Heating functions are required to maintain a constant temperature particularly in the winter when the ambient temperature is low. 5 0 0 5 10 15 Time [Minute] Anti-freezing function is also available!

CRBB-OM00004

unit Rotary actuator with angle adjustment Part number for CRBW---BPart number for vertical auto switch unit angle adjustment unit Part number for joint unit Size For D-M9 Excluding Size Size D-M9 10 P811010-3 10 P211070-10 10 P611070-1M P611070-1 15 P811020-3 15 P211090-10 15 P611090-1M P611090-1 20 P811030-3 20 P211060-10 20 P611060-1M P611060-1 30 P811040-3 30 P211080-10 30 P611080-1M

HRX-OM-S004

capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6

EXxx-OMN0037CN

10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -21No.EX-OMN0037CN-A (2)2 2 010 V05 V020 mA 15 V420 mA AD (ab) AD (0b) [V] [mA] 16 10 [V] [mA] 16 10 15 V 420 mA 010 V 05 V 020 mA 07FF 2047 5.25 21 07FF 2047 10.5 5.25

Compact Type

CAT.ES20-174 A Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

CG5-S

18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21