Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 35, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 35, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05 to 1, Specification: Built-in magnet

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Free Mount Cylinder

rod No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 1 pc. 5 5 5 2 pcs. 10 5 10 Weight/( ): Denotes the values with D-A93.

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

Free Mount Cylinder Series CU

Nil S n 21 22 Relief type Vacuum suction type Type of auto switch D-A93 D-M9N, D-M9B Reed switch Solid state switch Action D Double acting Model Cushion Action Standard stroke (mm) Auto switch mounting Cushion Bore size (mm) 6 10 16 Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15,

ISO Cylinder

5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-F7lWV D-F7BAV D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-M9l D-A9l*2 10

Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in