Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

) 16.5 23.7 (GZ, GS: 24.4) [25.4] P=19 23.5 11.5 122 (GZ, GS: 123.4) [125.4] 0.5 30 16.6 62.8 83.7 (GZ, GS: 84.7) [85.7] 21 2.8 R R R R P A A A A A 63.6 60 P 42 B B B B B 6-Rc(PT)1/4 (P, R port) Manual override L2 10 Depress and turn to operate and lock override.

VM

8 10 46 58.5 61 30.5 28 21.5 4 20.8 18.7 14 13.7 3.2 28 29 VHK-B2A 49 17 1 30 25 21.5 31 30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Accessory specification With pressure gauge With auto drain Bracket mounting size Model Port size B C D A T 29.5 28.5 30.5 35 35 U P 2.5 13 10 12 12 Q 65 64

Series IDG

Inlet air pressure [MPa] Inlet air temperature [C] Allowable pressure drop P [MPa] Compressed air supply capacity Q [l/min (ANR)] Note: F = (C x 1.8) + 32 1MPa = 145psi 1l/min = 0.0353SCFM Dew point temperature conversion chart 60 0.5MPa 0.7MPa 0.9MPa 50 0.3MPa 40 Atmospheric pressure 0.1MPa Pressurized dew point temperature C 30 20 10 0 10 20 30 40 50 60 50 60 20 10 0 10 20 30 40 30 Atmospheric

Vacuum Unit

ZK2 (Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C10: 10 (SMC) N11: 3/8" (SMC) (C12: 12 (SMC) (In case of double sided type)) [Communication connector D-sub] (DIN rail clamping screw) R R R BUS OUT BUS 76.7 76.5 12 3 12 3 3 72 BUS IN X 49.5 B B B B B B B B P X P X P 12 PWR PWR 30 25 A 1 1 A 1 A A A A A A A 55 25 13 (7.5) 18 55 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.

ZP

tube 4/2.5) U4 (Soft tube 4/2.5) a e Y b c d Model 13.5 5 1.8 14.5 5 1.8 H: M6 x 1 H: M8 x 1 Model A B C D E Y F G F G ZPY2004U 2 1.2 0.3 4 2.6 4.6 U6 (Soft tube 6/4) U6 (Soft tube 6/4) 15.5 7 2.5 16.5 7 2.5 25 28 20 30 48 74 25 15 64 10 ZPY25D ZPY3507U 3.5 1.8 0.5 7 4.3 7.8 ZPY4010U 4 2 10 5 11 0.8 C Y A B Model ZPY10UT 10 11 1 ZPY13UT 13 14 1.5 ZPY16UT 16 17 2.5 ZPY10CT 10 11 0.8 ZPY13CT

Table of Contents

31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6 30 22 R 1/2 37.6 45.8 49.6 55.6 30 Dimension with cover Reference dimension of R thread

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

147.5 139.5 11 160 152 86 Type 20P Body Ported 10-SY3000/5000/7000 10-SY5000: 10-SS5Y5-20PStations [ ]: AC L2 L1 5 21 (Pitch) P = 17.5 (A, B port) 1/8 + (For mounting) 4 x 4.5 + 11.5 16.5 Manual override 16.2 20 93.8 2.3 14.5 31.4 44 63.5 [65.7] 127 [131.4] 139.6 [144] P EB EA B B B B B P EB EA 31.4 60 30 21 21 A A A A A 1/4 (P, EA, EB port) + + + + + Triangle mark (A, B port) One-touch

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 45 23 10 60 44 18 25 14 17.5 9.5 M8 x 1.25 18 10 20 M14 x 1.5 30 22 1/4 37 106 11 15 17 50 50 25 9 73 53 20 28 17 17 13 M10 x 1.5 20 10 22 M16 x 1.5 30 26 3/8 43 112 11 15 19 63 55 28 8 80 60 22.4 30 17 17 13 M10 x 1.5 22 10 25 M18 x 1.5 30 26 3/8 47 116 11 15 21 80 65 32 8 100 75 28 32 22 20 15 M12 x 1.75 26 13 29 M22 x 1.5 35 30

Air Cylinder Series CS1

B B B B B B A A A A A A A Bore size 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 9.5 7.5 13.5 12.5 7 5 3.5 1.5 7.5 5.5 10 8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 The mounting position should be referred for reference only for the auto switch mounting position at the stroke end

PFxx-OMA1007

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

MB1

169 197 197 251 251 10 10 14 14 22 22 14 14 20 20 30 30 CZ ZZ + Stroke 6 Series MB1 Cushion Bracket/Double Clevis Mounting Bracket Models Bore size MB32 MB40 MB50 MB63 MB80 MB100 Description Double clevis mounting bracket MB-B03 MB-B05 MB-B08 Double clevis mounting bracket Z + Stroke B DX DB DD B 90 4-DT B A DH DA DL DU DU 4-DR DE DC DO DO DS Without air cushion (mm) B Bore size (mm) No

Mini Free Mount Cylinder

acting 10 12 30 D C D UJ B F8N Number of auto switches Clean Series Nil 2 pcs. 1 pc.

V

L Y N U M B E R DC : SY100 30 4A 100VAC : SY100 30 1A 200VAC : SY100 30 2A Other Voltages Of AC : SY100 30 3A Lead Wire Length Nil 300mm 6 600mm 10 1000mm 15 1500mm 20 2000mm 25 2500mm 30 3000mm 50 5000mm Courtesy of Steven Engineering, Inc. !

Metal Seal/Rubber Seal Series VQ Body Ported

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.

Membrane Air Dryer

20 Pressure dew point (oC) 10 0 10 20 30 40 50 60 60 50 40 30 20 10 0 10 20 30 Atmospheric pressure dew point (C) 31 Model Selection Series IDG

CNA

N K F M M BN W V lC lB With rod boot e 8 f l ZZ + l + Stroke h + l (mm) Bore (mm) Stroke range (mm) 40 50 63 80 100 A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 J K KA 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 X 1.25 6 14 to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30