•

K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: H (Set Nut for Panel Mount)

Size: 1/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 1/8, Accessory: Panel Mount w/Set Nut, Option 1: -, Option 2: -

Size: 1/8, Reverse Flow: Regulator w/Backflow Mechanism, Thread: M Thread, Rc(PT), Port Size: 1/8, Accessory: Panel Mount w/Set Nut, Option 1: -, Option 2: -

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 1/8, Accessory: Set Nut for Panel Mount, Specifications: -, Pressure Unit: -

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

Table of Contents

y y e e r r r u u u Drain Drain Drain Component Parts Material No.

C85

6 2A 2B 2C 2D Standard 10 to 16 N Basic execution integrated clevis E Double end F Front nose Y Front nose in line oprt t !

C85

6 2A 2B 2C 2D Standard 10 to 16 N Basic execution integrated clevis E Double end F Front nose Y Front nose in line oprt t !

EX120/121/122

resistance Vibration resistance 10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized) Impact resistance 147 m/s2, in each X, Y, Z direction, 3 times (De-energized) Standard CE marking, UL (CSA) Accessory Note 2) Tie-rod 2 pcs.

Electric Actuator/Slider Type

[mm] Model LEJS40 LEJS63 1000 1000 800 800 L7 [mm] L7 [mm] 600 600 Y 400 400 m 200 200 Me 0 0 0 2 4 6 10 8 0 5 10 15 20 L7 Vertical Work load [kg] Work load [kg] 1000 1000 800 800 L8 [mm] L8 [mm] 600 600 Z 400 400 200 200 m Me 0 0 2 4 6 10 8 0 L8 0 5 10 15 20 Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

ZP

dia. 1 02 to 08 2 10 to 16 Lock ring 3 20 to 32 4 40, 50 Pad N6 A8 4 ZP Y Pad [q Type Y adaptor] With buffer ZP 50 K20 Y A14 U6 UGN [Pad model no.]

Micro Mechanical Valve Series VM1000

3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

ZP3

J Rotating JB Rotating, With bushing K Non-rotating Stroke [mm] Buffer specification J JB K 3 6 10 15 20 With buffer u Vacuum inlet v: ZP3-T/Vertical : ZP3-Y/Lateral With adapter y Connection thread/u Vacuum inlet v: ZP3-T/Vertical : ZP3-Y/Lateral y Connection thread u Vacuum inlet Pad diameter [mm] Type Symbol Size Type Symbol Size 4 to 8 10 to 16 Type Symbol Size Pad diameter [mm] 4 to

Air Cylinder

JM-045 JM-10 JM-10 JM-045 JM-045 *Components include in a seal kit.

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Air Cylinder Series CM2

H L MM ND NX2 R2 U2 Y Z A Bore size 20 25, 32 40 + 0.2 + 0.1 + 0.2 + 0.1 + 0.3 + 0.1 9 18 41 25 9 10 14 11 66 M8 x 1.25 22 45 25 9 10 14 14 69 9 M10 x 1.25 24 50 13 25 13 92 16 12 49.7 M14 x 1.5 Double Knuckle Joint (mm) Y-020B/Y-032B Material: Rolled steel Y-040B Material: Cast iron R1 R1 ND hole H10 MM MM ND hole H10 Axis d9 Axis d9 E1 E1 NX NZ L NX NZ L A1 U1 L1 A A1 U1 L1 A Applicable