Sensor Monitor

(Refer to page 41 for details.) -40No.PS-OMW0014-B Auto-preset When auto-preset is selected in function selection mode, the set value can be calculated and memorized from the measured pressure.

Digital pressure switch for energy-saving control ejector

(page 41, "3,"). 2, After the security code is entered and the indication changes to [UnL], Press and hold the and buttons simultaneously for 5 seconds or longer. [000] is displayed and the new security code should be entered. For how to input the security code, refer to "How to input and change the security code".

Digital Flow Switch

When window comparator mode is selected: Refer to page 41. When accumulated output mode is selected: Refer to page 42. When accumulated pulse output mode is selected: Refer to page 43. -39No.PF-OMO0005-F a. When hysteresis mode is selected Set value [P_2] or [n_2] and [the current set value] are displayed in turn. Press the or button to change the set value. Press the button to set.

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

Digital Flow Monitor

(page 36 and 41) -43No.PF-OMU0007-D [F 5] FUNC terminal function setting Analogue output, external input or copy function can be selected. : Do not connect the grey wire when changing the setting. When the analogue output is selected When the product with analogue voltage output is used, the output of 1 to 5 V or 0 to 10 V can be selected.

Digital Flow Switch (Integrated display type)

selection function 23 F_3 Selection of output mode 24 F_4 Selection of switch operation 25 F_5 Key-lock function 26 F_6 Input of the Set point 27 F_7 Selection of reference condition 30 F_8 Accumulated value hold 31 Other functions 32 Maintenance 33 Troubleshooting 34 Cross-reference for troubleshooting 34 Error indication 36 Specification 37 Specifications 37 Characteristics data 39 Dimensions 41

4-channel Flow Monitor (Remote type monitor unit)

settings 26 F_1 Input procedure of the Set value of instantaneous output 27 F_2 Input procedure of the Set value of accumulated output 28 F_3 Copy function 30 Other functions 31 Channel scan function 31 Peak/Bottom value display 31 Key-lock function 32 Maintenance 33 Troubleshooting 34 Cross-reference for troubleshooting 34 Error indication 36 Specification 37 Specifications 37 Dimensions 41

PF3W7x.eng

which, if not avoided, will result in death or serious injury. 5% of maximum rated flow [00.05] 00.05 gal/min (4 L type) [00.21] 00.21 gal/min (16 L type) [000.5] 000.5 gal/min (40 L type) [001.3] 001.3 gal/min (100 L type) [000.3] 000.3 gal/min (250 L type) 1/2 23.9 mm Main screen (2-colour display) 3/4 29.9 mm UP button [ H_1] Hysteresis (OUT1) IO-Link status indicator light Operator 1 41

PF3W7.eng

Hysteresis Setting of hysteresis can prevent chattering. 5% of rated flow 1 41 mm Approx. 1 second Approx. 3 seconds (the output remains off for this period) 11/4 54 mm OUT2 over current error A load current of 80 mA or more is flowing to the switch output (OUT2). *: Display colour is linked to the setting of OUT1, and can not be selected.

PF3W5.eng

Piping port (OUT side) Initial processing in the product Lead wire with M8 connector (4 pins) (Option) 3/8 24 mm Approx. 3 seconds (the output remains off for this period) Approx. 1 second Flow adjustment valve (When flow adjustment valve is selected) 1/2 27 mm Output specification identification display * 3/4 32 mm Temperature sensor (When temperature sensor is selected) 1 41 mm Approx.

PF3W7x-X445.eng

Output specification and switching output are displayed Output mode Hysteresis mode Mounting and Installation 1 41 mm Approx. 1 second Reversed output Reversed output Selects which type of switch output is used, normal or reverse. Do not use the product in a place where static electricity is a problem.

High Vacuum L Type Valve

Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41

XL-OMY0001

/ AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41

High Vacuum L Type Valve

part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0007 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41

High Vacuum L Type Valve

Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41

XLA Series

material: SUS304) Heater (option) 7 External seal (maintenance part) 3 Bellows (material: SUS316L) 6 Valve (material: SUS304) 5 Valve seal (maintenance part) 2 Body (material: A6063) 4 C D C E E (K flange ) (KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41

XLA- ∗ -F7NJ ∗ - ∗ Series

Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41

XL-OMV0002

3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

maintenance part) 6 (SUS304) Bellows (material: SUS316L) 5 Valve (material: SUS304) () 2 Valve seal (maintenance part) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41

XLDV Series

are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP M5 A 3(R) EXE H A mm Model A B C D E Fn Fd G H XLDV25 50 123 48 41.5 7.5 40 26 38.5 XLDV40 65 170 66 53.5 15.0 55 41