Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Terminal + Analog output Main Circuit Black OUT (White) GND terminal PSE Blue DC () (Black) ZSE4 ISE4 Shield wire ZSE5 ISE5 ZSE6 ISE6 ZSE3 ISE3 Dimensions GS PSE520-01, T01 PS 3000 59.5 ISA (55.5) 35 10 50 ZSE1 ISE1 33.5 M5 X 0.8 depth 5 ZSE2 ISE2 ZSP ISl 01: R(PT) 1/8 T01: NPTF 1/8 Width across flats 19 32 32 ZSM Protective tube (Resists bending) PFl IFl PSE520-02, T02 3000 61.5 (55.5) 35

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Note 2) For others, refer to ejector specifications on page 17. Construction Material Component Parts e r Description No. Poppet valve assembly for supply valve Poppet valve assembly for vacuum release valve Vacuum release flow adjusting needle Aluminum alloy 1 2 3 t w y Part no. Replacement Parts q Material Refer to page 19. XT534-5-001-AS Refer to page 19.

Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate w/Station Number), DIN Rail Option: 17 (for 17 Stations; Longer

LEC-W_C

LE ACT Controller(ACT Controller)2 /ACT Controller ACT Controller OS Windows7 64 LE-W2 Windows XP (32 ) Windows 7 (32 ) Windows 7 (64 ) ACT Controller / LECP6 (DC24V) LECA6 (DC24V) LECPA () ACT Controller 2 IO 5 - 3. 3.1 2 ABS()INC() ABS() 100mm 100mm INC() 30mm 30mm 30mm 6 - 0()(0 ) () 12 AREA ON (AREA)12 2 1 2 12 INP()ON INP()ON( ) 7 - 3.2 ABSINC3.1 INP ON INP ON 8 - () 12

Vacuum Manifold for fieldbus system

Refer to the SI Unit (EX260-V1) Operation Manual for release method. (17) -36No.

IDX-OM-W089

IDFA6E-20 6 1 6-1 Specifications IDX-OM-W089 Air Dryer 6 References 6 2 Dimensions Measure : mm (PANEL HOLE SIZE28) MEMBRANE GROMMET WITH OUTLET(21) SIGNAL CABLE (BASE HOLE SIZE22) MEMBRANE GROMMET WITH OUTLET(17) POWER CABLE AIR OUTLET COMPRESSED AIR INLET COMPRESSED Rc3/4 Rc3/4 422 31 MAINTENANCE SPACE THE VENTILATION AND 179 230 or more 600mm 32 802 BLOCK TERMINAL (20) 67 (186) 15 283

IDX-OM-W053

L N PE M3 6.5mm 1.25mm 2 :17 1 2 2 2 , 2 1 IDFA6E 20kg 2 2 2 2 2 1 240 050 ( ) 2000m 600mm 600mm 600mm 600mm 600mm 2 1 2 2 2 2 6 6-2 2 2 3 50 50 2 2 4 10mm ( 2 2 2 2 2 5 6-1 IEC AC200V 30mA 5A 1.25 216AWG,3 ,812 0.1m 30m M3 1.25-3 6.5mm () M3 0.61Nm 2 3 2 2 3 () 2 2 () 2 4 3 / 3 3 1 INOUT 3 2 ON () INOUT 5 ONOFF 0.15MPa NO IN 3 1 3 / 3 3 OFF OFF

Double Power Cylinder/Without Non-rotating Mechanism Series MGZR

Contents Bore size (mm) MGZ20-PS 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS !6 17 Rod seal A MGZ25-PS Rod seal B 17, 18, 19 and 20 are non-replaceable parts, so they are not included in the seal kit. MGZ32-PS Piston seal 18 MGZ40-PS Set of left nos. !

Rotary Table Series MSU

nominal) M3 x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

Multistage Ejector (N)ZL Series

(L) P 2-5.4 Mounting hole 13.5 50 117 Manual override Vacuum pressure switch Exhaust with silencer Release valve P V 20 V RESETSET Supply valve 4.5 166 19 Circuit diagram Release flow rate adjustment needle Pressure supply port One-touch fitting Vacuum port One-touch fitting 500 (L: 2900) 2-5.4 Mounting hole Manual override + + Label MULTISTAGE EJECTOR 66.5 35.7 59.5 30 4.5 166 216 8.5 17

Vacuum Pad with Ejector

Repair 16 10.1 Maintenance and Repair Precautions 16 10.2 Pad replacement 17 10.3 Ejector assembly replacement 18 10.4 Silencer assembly replacement 19 10.5 Supply (P) port one-touch fitting replacement 19 10.6 Ejector Body Assembly, Blanking Plate Assembly, Check Valve Replacement 20 11. Specification 22 12. Circuit examples 24 13.

LZ-OM003xx

L[]ZB[]3 32 52 8e9 10 21 16 L[]ZB[]3 40 55 28.5 20 28 3.2 L[]ZB[]5 55 75 38 23 33 3.2 Model no. A B C D E F Model no. A B C D E T Use 2 spanner flats when fixing the foot to the motor. Recom m ended setscrew: M6 4pcs. 4 Knock pin 2pcs. Use (1)(across flat) when fixing the foot at the rod. L[]ZB[]3 119.5+st 69.7+st 4 6.8 L[]ZB[]5 155.5+st 92.7+st 4 7 Model no.

LZ-OM004xx

M N L S R T L[]ZC[]3[] 45 53 86.5+st 20 32 4 L[]ZC[]5[] 64 76 111.5+st 30 49 4 Model no. D E F G H J L[]ZC[]5[] 38 58 22 27.5 L[][]ZC[]3[] 24 38 14 17 Model Model no. A B C D 41 Directly mounts onto the rod cover Tightening torque of accessories (foot) Fix with 4 holes "D" as shown below. Fix with 4 holes "H" as shown below. 42 Foot m ounting 4.

06-mgzr-e

Contents Bore size (mm) MGZ20-PS 20 25 32 40 50 63 80 MGZ20-PS MGZ25-PS MGZ32-PS MGZ40-PS MGZ50-PS MGZ63-PS MGZ80-PS !6 17 Rod seal A MGZ25-PS Rod seal B 17, 18, 19 and 20 are non-replaceable parts, so they are not included in the seal kit. MGZ32-PS Piston seal 18 MGZ40-PS Set of left nos. !

INFORMATION Step Motor Controller 5 types of communication protocols New New

Electric Actuators Air Cylinders IO-Link Communication EX260 IO-Link Master Slider type LEF Series Rod type LEY/LEYG Series Low-profile slider type LEM Series Guide rod slider LEL Series Gripper LEH Series Slide table LES/LESH Series Rotary table LER Series Miniature type LEPY/LEPS Series JXCE1/91/P1/D1/L1 Series 17-E688 Two types of operation command Transition

ChemicalThermo-con

Heat exchanger HED007-HWl Temperature controller HED007-C2l Signal cable 5 m Alarm output connector Circulating fluid outlet 5.9 (150) 4.8 (122) 1.1 (29) 3.0 (75) DC cable 16.4 ft (5 m) 5.7 (145) 5.2 (132) Fan 1.3 (32) 17.6 (447) 0.8 (20) 7.4 (187) 6.5 (165) Display panel 8.7 (222) HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products AL SI OUT 7.4 (189) COMMUNICATION ALARM 7.0

Modular Type Lubricators Series AL

J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter

Manifold Specifications

Manifold solenoid valve: 32 stations (512 points) max. Maintenance and inspection are easy. With control unit Plug-in base type/Non plug-in base type Filter, regulation valve, pressure switch and air release valve all combine to form one unit. Piping processes are eliminated.

Body sizes: 25, 32; Maximum work load: 60 kg (horizontal); 46 kg (vertical); Maximum pushing force: 736 N; Maximum stroke: 300 mm; Positioning repeatability: ±0.02 mm (±0.01mm high precision option); Encoder resolution: 17-bit (S motor), 22-bit (T motor), 20-bit (V motor); Bearing types: sliding bushings or ball bushing bearings; Maximum allowable rotational torque: 5.76 N•m (sizes 32, 40

The drivers are pulse input type, with both incremental and absolute encoder options and 17- or 18-bit resolution.Body sizes: 25, 32; Maximum work load: 60 kg (horizontal); 46 kg (vertical); Maximum pushing force: 736 N ; Maximum stroke: 300 mm; Positioning repeatability: ±0.02 mm; Motor available with either incremental 17-bit or absolute 18-bit encoder; Bearing types: sliding bushings or