Miniature Guide Rod Cylinder Series MGJ

Using cylinders are beyond the limit may shorten the product service life or cause damage. 5st 10st 15st 20st 250 Load mass W (g) Operating pressure 0.3 MPa Operating pressure 0.5 MPa or more 200 10 150 L L 100 MGJ10 W W 1 Load mass (kg) 50 0 0 5 10 15 20 MGJ6 0.1 Eccentric distance L (mm) 0.01 0.1 1 10 100 Eccentric distance L (mm) Construction Parts list o!0!6 w i !4 !3 y u r !1 q t !

Vacuum Equipment

Maximum flow rate 200 /min (ANR). The collected dust does not remain in the case. Air suction filter 13-10-1 Series ZFA Using an ejector with a 2-stage nozzle, the ejector system can be used most efficiently. Air suction filter 13-10-4 Prevents problems related to vacuum circuits or airborne contaminants.

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

Siiiil"Tivrc

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Precision Clean Regulator

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

VCC

VCC12(D)-00 (2 port valve) VCC13-00 (3 port valve) Full length: 44.8 to 45.1 0.2 Full length: 54.6 to 54.9 0.4 Except face seal (O-ring) Except face seal (O-ring) Tighten the screw until it hits the body by pressing the orifice body with approx. 100 to 200 N of force. ( Additional tightening is not necessary.)

AZ1000

delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to 10 psig (0.007 to 0.07 MPa) 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

0 q Size 48 mm T w Bearing type e Equivalent lead r Stroke t Motor option M L Sliding bearing Ball bushing bearing 25 100 Without option With lock With motor cover to 100 mm Nil B C to 1000 1000 mm Refer to the applicable stroke table.

RLQ

A96V A96 IC circuit 5 V Yes A72 A93V A90V A73C A80C A79W A72H A93 A90 Grommet 12 V 200 V 100 V IC circuit IC circuit No Relay PLC 5 V, 12 V 12 V 100 V or less 2-wire 24 V Yes No Connector 5 V, 12 V 24 V or less Grommet Yes Diagnostic indication (2-color display) Solid state auto switches marked with a are produced upon receipt of order.

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

V Relay, PLC 2-wire No 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Variable impact force

Example) 500 1 Unit 300 XT316 -40B XT316 -63B XT316 -80B XT316 -100B Consult factory 200 -30B XT316 100 1 2 3 4 5 6 7 8 9 10 11 12 Hopper thickness T(mm) 2

In-line Air Filter ZFC Series

Metric size 2 3.2 3.2 4 4 6 6 8 10 12 Inch size 1/8" 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" 3/8" 0.8 Fluid Air, Nitrogen 0.6 Operating pressure 100 kPa to 1.0 MPa (at 20C) Flow rate (Positive pressure) [L/min] *1 15 45 50 80 100 200 250 450 550 650 0.4 Flow rate (Vacuum pressure) [L/min] 2 5 7 10 10 20 30 70 80 100 0.2 Proof pressure [MPa] 1.5 (at 20C) Operating and ambient temperature range

Specifications Port Size (Applicable Tubing O.D.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area

Specifications Port Size (Applicable Tubing O.D.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area

PSxx-OMM0002CN

kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

Exhaust Cleaner for Clean Rooms AMP Series

Exhaust Cleaner for Clean Rooms AMPSeries Exhaust Air Cleanliness Equivalent to Class 100 Piping Labor Reduced Increased Space Savings Worry Free Two Stage Element Construction Series AMP Exhaust Cleaner for Clean Rooms An exhaust cleaner that can be used inside a clean room Exhaust air cleanliness: Equivalent to Class 100 (Consult P/A in advance, as this will differ depending on the operating

Ambient Dryer Series AMG

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Slide Tables MX Series

125 150 175 200 225 250 275 300 Standard Stroke (mm) Bore Size (mm) 6 8 10 12 16 20 25 MXH MXS MXQ MXF MXW MXP Dual Rods For Twice The Force The MXS, MXQ, and MXW use a twin bore design to double the actuation force while maintaining the single bore height.

Miniature Guide Rod Cylinder Series MGJ

10st 15st 20st 250 Load weight W (g) 200 150 100 50 0 0 5 10 15 20 Eccentric distance L (mm) Construction Parts list o!

Precision Clean Regulator Series SRP

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR