VXD

S Conduit 24 VDC With surge voltage suppressor T 100 VAC U 110 VAC V 200 VAC W 230 VAC Flat terminal Y 24 VDC Z Other special options For other special options, refer to page 133. 24 VAC 48 VAC 220 VAC 240 VAC 12 VDC Special voltage DIN terminal with light Conduit terminal with light Without DIN connector Low concentration ozone resistant (Seal material: FKM) Seal material: EPDM Oil-free

VX21/22/23

S Conduit 24 VDC 5 Aluminum With surge voltage suppressor 8 3/8 T 100 VAC 10 (N.C. only) U 110 VAC 10 (N.C. only) 1/2 V 200 VAC 5 W 230 VAC 8 10 10 (N.C. only) Flat terminal Resin (With bracket) 5 Y 24 VDC 8 12 10 (N.C. only) Z Other voltages For special options, refer to pages 21 to 23. 24 VAC Low concentration ozone resistant (Seal material: FKM) 48 VAC Special voltage Seal material: EPDM

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression fitting V Face seal tting S Compression tting DL DIN terminal with light (With surge voltage suppressor) Female thread type P Rc female thread N NPT female thread DO DIN terminal without connector (With surge voltage suppressor) Voltage 1 100 VAC 2 200 VAC 3 110 VAC 4 220 VAC 5 24 VDC 6 12 VDC 7 240 VAC 8 48

Pressure Switch/Reed Switch Type

.) + Voltage AC/DC 48 V 100 V Nil S None With seal w w Seal 50 mA 40 mA 20 mA Max. operating current and range Note 2) + Nil 6 Note1) Set pressure range 0.1 to 0.4 MPa 0.1 to 0.6 MPa a Semi-standard + Nil L Z 0.5 m 3 m 5 m Lead wire length q e b Series IS10 + Scale plate pressure unit MPa Both MPa and psi Nil P Note2) c CAT.ES60-19A

AP500

(MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48

Rotary Actuator Vane Style Series CRB1 Size: 50, 63, 80, 100 How to Order Without CRB1 B S 80 90 W auto switch CDRB1 B S T79 L W 80 90 With auto switch With auto switch Size (With auto switch unit and built-in magnet) Made to Order or Port thread type 50

length (m) No Yes Yes Indicator light Wiring (Output) Auto switch model Type Electrical entry Applicable load DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) Grommet T79 2-wire 12 V Connector Relay, T79C Solid state switch 24 V PLC S79 3-wire (NPN) IC circuit Grommet 5 V, 12 V S7P 3-wire (PNP) Grommet 100 V R73 Relay, Connector R73C Reed switch 2-wire 24 V PLC 100 V or less Grommet IC circuit R80 48

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V S79 V V v v IC circuit 3-wire (PNP) S7P V V v v Solid state auto switch For 20, 30, 40 Grommet Yes Oilproof heavy-duty cord Relay, PLC 2-wire 12 V T79 V V v v Connector T79C V V V V 24 V Grommet Yes 2-wire 100 V R73 V V v Connector R73C V V V V Grommet No 48

Actuator Position Sensor D-MP Series

Actuator Position Sensor D-MP Series Specications Model D-MP025D-MP050D-MP100D-MP200 Measuring range 25 mm1 mm 50 mm1 mm 100 mm1 mm 200 mm1 mm Power supply voltage 15 to 30 VDC, Ripple (p-p) 10% or less (with power supply polarity protection) Current consumption 48 mA or less (when no load is applied) Repeatability 1, 2 0.1 mm (Ambient temperature: 25C) Resolution 0.05 mm Linearity 2 0.3

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

Approximately 20 g of super high purity hydrofluoric acid (48%) is measured and injected into the tubing. The interior wall of the tubing is immersed at normal temperature for one week with both ends of the tubing plugged. Then the extract was diluted with super deionized water to be subjected to a quantitative analysis on Al, Fe, Ni, Na and Ca by the stripping method.

HAW

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain). 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Cooling water (l/min) Model 70C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 50C 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 100C 37.5 47 51 38 44.5 48 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36

ZP

ZP10B to 50B Model Size B06 A 6 ZP06B B 7 C 2.5 D 7 E G 3.3 H 9.1 Y 4 F 13 B08 8 ZP08B 9 2.5 7 13 4.7 10.1 4 B10 10 ZP10B 12 4 13 11.7 16 5.5 13.8 5.5 B13 13 ZP13B 15 4 13 14.2 18.5 8.7 19 7.5 B16 16 ZP16B 18 4 13 15.7 20 9.9 21 8.5 B20 20 ZP20B 22 4 15 19 23.5 12.4 25 10.5 B25 25 ZP25B 27 4 15 19.5 24 15.6 28 10.5 B32 32 ZP32B 34 4 15 24.5 29 18.9 37 14 B40 40 ZP40B 43 7 18 29.2 34 24.4 48

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

with adjustment bolt RB2015 + with adjustment bolt RB1412 + with adjustment bolt RB2015 + with adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt Configuration Shock absorber model MY1 HT MY1 W Stroke adjustment range by intermediate fixing spacer (mm) Without spacer 0 to 16 0 to 12 0 to 11.5 With short spacer 16 to 32 12 to 24 11.5 to 23 With long spacer 32 to 48

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

2015 + with adjustment bolt RB 0806 + with adjustment bolt RB 2015 + with adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt Configuration Shock absorber model MY1 W MY1 W 0 to 6 6 to 12 12 to 18 0 to 11.5 11.5 to 23 23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48

LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

0 q Size 48 mm T w Bearing type e Equivalent lead r Stroke t Motor option M L Sliding bearing Ball bushing bearing 25 100 Without option With lock With motor cover to 100 mm Nil B C to 1000 1000 mm Refer to the applicable stroke table.

Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location Side ported Nil Bearing type Axial ported E High precision type A Available with side ported Free mount type only, when equipped with auto s

V 5 V, 12 V 5 V, 12 V, 24 V MDSUA3 Parallel cord IC circuit PLC 2-wire 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100 V Heavy-duty cord Reed switch Parallel cord 100 V Heavy-duty cord 3-wire (NPN) 5 V, 12 V IC circuit Solid state switch Grommet 3-wire (PNP) 12 V MDSUA7 Relay, Connector Grommet Connector Grommet Connector Heavy-duty cord 2-wire 24 V MDSUA20 100 V PLC Reed switch 100 V IC circuit 48

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Mass (g) Standard stroke (mm) End lock additional mass Model D25 52 138 186 350 487 918 1,420 5 36 10 40 15 44 20 48 30 56 50 157 222 400 547 1,000 1,533 75 175 258 450 608 1,083 1,645 100 194 294 500 669 1,165 1,758 125 549 729 1,247 1,870 150 599 790 1,330 1,983 175 649 851 1,412 2,095 200 699 912 1,495 2,208 MTS8 MTS12 MTS16 MTS20 MTS25 MTS32 MTS40 29 34 42 55 90 133 -X Bore size (

Mechanically Jointed Rodless Cylinder Basic Type ø 25, ø 32, ø 40 MY1B Series

Bore size (mm) MY1C A H A H RB2015 + with adjustment bolt A H RB1007 + with adjustment bolt RB1412 + with adjustment bolt RB2015 + with adjustment bolt With adjustment bolt Configuration Shock absorber model With adjustment bolt With adjustment bolt MY1H MY1 HT Without Spacer With short spacer With long spacer 0 to 11.5 11.5 to 23 23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48

Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series ø 25, ø 32, ø 40

Specifications CLS 25 H 32 H 40 H Applicable cylinder size (mm) Unit symbol CLQ Configuration Shock absorber model RB1412 + with adjustment bolt RB2015 + with adjustment bolt RB2015 + with adjustment bolt RLQ Without spacer 0 to 11.5 0 to 12 0 to 16 Stroke adjustment range by intermediate fixing spacer (mm) With short spacer 11.5 to 23 12 to 24 16 to 32 MLU With long spacer 23 to 34.5 24 to 36 32 to 48

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

Stroke Adjustment Unit Specifications Applicable bore size (mm) 25 L RB1007 + with adjustment bolt 0 to 11.5 11.5 to 23 23 to 34.5 32 L RB1412 + with adjustment bolt 0 to 12 12 to 24 24 to 36 40 L RB1412 + with adjustment bolt 0 to 16 16 to 32 32 to 48 Unit symbol Configuration Shock absorber model Without spacer With short spacer With long spacer Stroke adjustment range by intermediate fixing

PSE57  Series Pressure Sensor for General Fluids

Note q Lead wire and M12 connector (3 m), Straight ZS-37-A 1 pc. w Lead wire and M12 connector (3 m), Right angle ZS-37-B 1 pc. e Assembly-type connector PCA-1557743 1 pc. r Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. t Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. y Orice M5 ZS-48-A 1 pc. u q + e ZS-37-A-X448 The lead wire and connector are Nil Voltage output type 1 to 5 V 28 Current