AMX-OM-F005-C

O . aut o drai n: 0. 1M Pa sure t o read t hi s m anual caref ul l y bef ore use. Ref er draw i ngs or cat al ogue f or construct i on and speci f i cati ons. **O p ti o n H : 1.6 M P a W ARN I N G Fol l ow i ng condi t i ons l ead t o cause breakage.

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

High Vacuum L Type Valve

when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83

80

C R E (AC type) [mm] Model Port size P B B1 C D E F B B1 2 x P Port size VDW1 M5(M6) 20 10 46.1 15 9.5 11 VDW2 M5(M6) 22 11 50.9 20 9.5 13.5 Mounting bracket dimensions Electrical entry Model Port size P U W X Y Grommet Q R VDW1 M5(M6) 28 11 34 17 15.5 30.35 VDW2 M5(M6) 33 14 39 20 17 33.9 464 A Compact Direct Operated 2 Port Solenoid Valve VDW Series Air Medium vacuum Water Dimensions

High Vacuum L Type Valve

is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0019 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100

AC Servo Motor Driver (CC-Link Type)

The voltage (across P-N or P+-N-) of the main circuit converter is displayed. 0 to 900 V -79- 6. CC-Link setting CC-Link function of the driver. Wiring and PLC setting must to satisfy the specifications.

Vacuum Filter AFJ Series

SP ZCUK Max.660 L/min (ANR) 5,40,80 m AMJ Large flow capacity Nominal filtration rating AFJ AFJ AMV Large flow type (P=4 kPa) Elements can be reused by washing them. For 40 m and 80 m ZH -X185 Related Products Water drops can be removed. Water drop removal ratio: 80%. At recommended flow rate (representative values).

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: w/o Lead Wire, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only, Fixed Unit: kPa, MPa), Piping Specification: N01 (NPT1/8)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: w/o Lead Wire, Bracket: B [Panel Mount Adapter, (ZS-46-B)]

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover), Bracket: B [Panel Mount Adapter, (ZS-46-B)]