VF1000-OMP0001

A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:B 3:R2 4:A 5:R1 1:P(SUP) 2:B(CYL.1) 3:R2(EXH.1) 4:A(CYL.2) 5:R1(EXH.2) 1:P 4:A 2:B 5:R1 3:R2 EZTZDZLZMZ DC24V ) 8 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (VF1000/3000 (VF1000/3000 (VF1000/3000 (VF1000

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

(A,C) Note.5) VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6)

Title not found

0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l\

Rodless Cylinder for Vacuum Series CYV ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis

Air Cylinder CLA Series Fine Lock Model

0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l

CV/MVGQ

Y-J010B Applicable bore size Applicable bore size B C d H B C d H Part no. Part no. 10 16.2 8 21 M4 x 0.7 CE2 SNJ-010B NTJ-010A Y-J016B 16 10 16 10 16 16.6 11 21 M5 x 0.8 11 4 7 8.1 3.2 12.7 M8 x 1.0 M4 x 0.7 SNJ-016B NTJ-015A 14 4 8 9.2 4 16.2 M10 x 1.0 M5 x 0.8 NDd9 NDH10 R1 NX U1 Part no.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis of cylinder Dynamic Moment

PSE200

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when work piece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when work piece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the work piece for a few times. The optimum values will be set automatically.

VXD21/22/23

Then the pressure in the pressure action chamber B falls to open the main valve C. When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

PF-OMN0011_C

8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4

VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

0.01

Arrange pneumatic piping and confirm that there is no air leakage from new joints. 877 Series ISA2 Parts List End plate R ISA-6-B Terminal block box Switch mounting bracket ISA-3-A Left Right Right ISA-7-B Seal for additional station ISA-6-A End plate L Throttle 2 port solenoid valve Spacer Regulator Y200-A Terminal block box ISA-11-L (Centralized wiring/Supply port left) ISA-11-R (Centralized

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

VEX-OMT0003

DIN connector B1B09-2A (Standard) GM209NJ-B17 (CE-compliant) (1) (2) Indicator light assembly (DIN terminal: Yes, Grommet: No) (6) (5) (3) (4) (7) (8) (11) (9) (10) 11 VEX-OMT0003 Replacement Parts List Note 1) For solenoid valve only. Note 2) Refer to SMC catalog for pilot valve part numbers. Refer to page 9 to 11 for the connector part numbers.

44

I.D. 3 x Applicable tubing 1/8" (3.18) 0.086" (2.18) KFG2T0122-00 11 1.1 7 8 13.3 5 1.5 d H2 H2 H2 H1 0.098" (2.5) 5/32" (4) KFG2T0325-00 11 1.6 7 8 13.3 5 1.8 M 1/4" (6.35) 5/32" (3.95) d KFG2T0704-00 26 6 10 12 16.5 6 3.3 L 5/16" (8) 0.236" (6) KFG2T0906-00 39 17 12 14 18.7 6.6 5.3 M L M L 3/8" (9.53) 1/4" (6.35) KFG2T1163-00 70 19 15 17 22.2 7.6 5.6 1/2" (12.7) 3/8" (9.53) KFG2T1395-00

Bacteria Removal Filter

SF-OMZ0013-B 6. Dimensions -11- Doc. No. SF-OMZ0013-B Revision history Rev. A : September, 2021 Add Carbon dioxide gas(gas) Delete Lubrication oil Rev.

VCA

Description Material q w e r t Solenoid coil IN Armature assembly Stainless steel, HNBR, PPS Return spring Stainless steel O-ring HNBR Body Aluminum Bracket Assembly Dimensions J 1.5 A C 4-6 B D Valve mounting screws 2-H Valve mounting hole Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D H J Assembly part no.