Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

2 Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Without auto switch B 20 30 D CQ2 B 20 30 D J79W S CDQ2 With auto switch Built-in magnet Number of auto switches Mounting style 2 pcs. 1 pc. n pcs.

AC Servo Motor Driver (MECHATROLINK-II type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 3 6 10 17 24 2.8 6.5 14 24 34 5/32 1/4 5/16 3/8 1/2 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Male Connector Type: AKH Millimeter Size Connection thread R Applicable tube O.D.

High Vacuum L Type Valve

, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to the applicable tubing table to the left Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 Orifice diameter 2 4 8 10 16 Tubing O.D. Metric 3, 4 3, 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 Basic type N.C. PB PA PA N.O. PB B A B A B A N.C. N.O.

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override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3, 5 port 1/8 1 port 5 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Industrijska Avtomatika d.o.o.

Shuttle Valve/AND Valve with One-Touch Fittings

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" 1000 680 440 480 420 210 150 Flow rate l/min ANR (SCFM) INOUT (35.0) (23.8) (15.4) (16.8) (14.7) (7.35) (5.25) Effective area mmCv 15.2 10.4 6.7 7.3 6.4 3.2 2.3 (0.84) (0.58) (0.37) (0.41) (0.36) (0.18) (0.13) Note 1) Flow rate values are at a pressure of 0.5MPa (72 psi) and temperature of 20C (68F).

Series VQ1000 Body Ported Plug-in Unit: Flip Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Cable length Symbol number of stations Kit L 0 1 2 With cable (0.6 m) With cable (1.5 m) With cable (3.0 m) D Entry on D side Max. 16 stations U Entry on U side Note 1) Besides the above, F and P kits with different number of pins are available.

ZL3-OM00801

0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40

Electro-Pneumatic Positioner Series IP8000/8100

D. 7 to 9:P368010-26 Applicable cable O.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" Flow rate l/min (ANR) 1000 680 440 480 420 210 150 INOUT Effective area mm 15.2 10.4 6.7 7.3 6.4 3.2 2.3 Note 1) Flow rate values are at a pressure of 0.5MPa and temperature of 20C.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing o u Resin materials eliminated Laser marking is employed for the model designation. d t g e a c 2 s u s d i e Reduction of outgassing due to surface treatment n o u d t R g g e a c 1 s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Specification Specification AMH450 to AMH850 Applicable model AMH150 to AMH850 Applicable model How to Order Refer to "How to Order" for standard type (p.4.6-16). How to Order Refer to "How to Order" for standard type (p.4.6-16).

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Floating Joint/Stainless Steel Type Series JS

Example: Nut for JS40 2 Series JS Dimensions JS10, 16 M M U D J U F B G H C E P A Use a 4mm precision watch wrench to attach the JS10 male threads.

60

D-DN

Lock unit

Chamfer Chamfer (1) For male thread (2) For female thread 30 30 D-2 D-2 D D Fig. 2 Rod end style Do not apply excessive lateral load or external force to the lock unit. They may break the lock unit. Do not use the product in applications where the rod rotates. Do not apply loads with impact, strong vibration or rotational forces while the lock mechanism is activated.