11-cq2-e

Grease pack part no.: GR-S-010 (10 g) 13 is a non-replaceable part, so it is not included in the seal kit. 82

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

Grease pack part no.: GR-S-010 (10 g) 13 is a non-replaceable part, so it is not included in the seal kit. 82

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 63 17 46 25 350 531 50 7 46 13 350 345 32 7 21 5 200 166 40 6 21 7 200 198 25 7 10 3 100 153 12 13 16 32 20 6 10 2 100

Fieldbus system PROFINET compatible SI Unit

Type1: EX600-SPN (32 coils) --Occupies 4 bytes for output (No diagnostic data) Type2: EX600-SPN (32 coils, Status) --Occupies 4 bytes for output and 4 bytes for diagnostics (input) (1) (2)(3) (5) (4) -76No.EX-OMY0027 4.

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

ZB-OM00301

" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Air Fittings Fitting Series For Special Environment

L A D KRH06-02S KRH06-01S 1 8 10.8 15.8 27.8 21.9 19.9 26.9 20.3 12 20.5 24.5 1 4 18.5 19 19 5.7 6 14 17 15.5 25 3 8 1 8 KRH06-03S 26 18.0 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 30 28.5 25.5 32 35.5 31 29 36.5 35 32 Reference dimensions after R(PT) thread installation. 14 1 4 3 8 1 8 1 4 3 8 22.5 19 28 29.5 24.5 17 8 20.5 17 17 20.8 31.3 29.5 10 23 1 2 KRH10-04S 21 54.3

EXxx-OMS0026CN

W.S. 032767 032767 +0+32767 3276865535 -0-32767 -0-32767 15 V()50001000 4 V PLC 4000 -57No.EX-OMS0026CN EX600 byte EX600 byte EX600 byte byte EX600-SEN3/4 (32 ) 0 4 SI EX600-SEN3/4 (32 ) 4 4 () EX600-DXB (8 ) 1 0 EX600-DXC (8 ) 1 0 EX600-DXC1 (8 ) 1 0 () EX600-DXD (16 ) 2 0 EX600-DXE (16 ) 2 0 EX600-DXF (16 ) 2 0 EX600-DYB (8 ) 0 1 EX600-DYE (16 ) 0 2 EX600-DYF (16 ) 0 2 EX600-DME

Fieldbus system EtherNet/IP TM compatible SI Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MAX.32 words MIN. 2 byte MAX.64 byte Output MIN. 1 word MAX.32 words MIN. 2 byte MAX.64 byte Configuration 0 word 0 byte : Select the setting depending on the existence of diagnostic data and the unit type connected. (1) (4) (5) (2) (3) -68No.EX-OMS0027 Device Level Ring (DLR) function This SI unit can be used as

EXxx-OMQ0016

Type1: EX600-SPN (32 coils) --Occupies 4 bytes for output (No diagnostic data) Type2: EX600-SPN (32 coils, Status) --Occupies 4 bytes for output and 4 bytes for diagnostics (input) (1) (2) (3) (4) -61No.EX-OMQ0016 Setting of parameters Setting of system parameters (1)Click the EX600-SPN# icon in the [HW Config] screen, and double-click the unit that needs a change in the parameters.

CYV

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

VNB

22 32 28 40 28 40 33 50 33 50 7 12 11 18 11 18 19 28 19 28 29 43 29 43 130 220 210 320 210 320 330 500 330 500 520 770 520 770 1.4 1.5 VX 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 4 1 2.5 2.6 VX3 5.7 5.8 32 JIS Symbol VXA Valve type Type N.C.

VXD21/22/23

LQ 32 40 50 For 32A For 40A For 50A Thread type Nil T F N Flange Rc NPTF G NPT LVN Refer to the table (1) given below for availability.

Flat Type Pad/Bellows Type Pad with Groove

Form/Diameter Model Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-P1 V V V V ZP3EA-P2 V V ZP3EA-P3 V V V ZP3EA-P4 V V ZP3EA-P5 V V ZP3EA-P6 V Pad diameter 32 to 50 Pad form Flat type with groove Dimensions: Pad Unit ZP3E-32UMlZP3E-40UMlZP3E-50UMl36 31 27 27 23 20 27 23 20 10.3 (Plate) 10.3 (Plate) 10.3 (Plate) 13.5 13 13

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

Series AP500

PTFE (Option: PCTFE) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

4 5 3.5 32 + Stroke 15.5 35.5 + Stroke 25 16 Lead wire minimum bending radius 10 Auto switch 17.5 5 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 2 x 2 x M4 x 0.7 effective depth 7 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 3.5 through 38 8 20 29 0.5 Flat washer 6 10 4 4 20 32 + Stroke 3.5 29 35.5 + Stroke 20 Lead wire minimum bending radius 10 Auto switch 18 5.5 2 x

Trimmer Auto Switch

No.D-S-OMG0006-C PRODUCT NAME Trimmer Auto Switch MODEL / Series / Product Number D-M9K/D-F7K/D-Y7K D-RNK/D-RPK Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 12 Mounting and Installation 13 Wiring 13 Internal circuit 15 Offset adjustment 17 Installation 18 Setting 19 Maintenance 32 Troubleshooting 33 Specification

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

Clean Rodless Cylinder Series CYP

12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6 69 M4 x 0.7 6 4.5 67 M5 x 0.8 25 60 105 48 45 23 13 18 69 32 17 2.5 118 CYP32 8.6 115 M6 x 1 8 7.5 90 Rc 1/8 50 100 138 87 79.5 29 17 22 115 46 27 3.5 155 Note 1) These dimension drawings indicate the case of piping port position "Nil".