VFA3000

DXT156-19-1A .1 pc.

Hand Valve Series VH

88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19

E,R.L.

@lnstatl vertically. 19

NVKF

Stations Applicable blank plate ass'y vK300-42-1A Dimuuiun $uies t{U|ff30 Body Ported Grommet (G): NVKF332-"G-M5 inch (mm) Base Mounted Grommet (G) : NVKF334rG-01 T inch (mm) =1 1 .81 (=3001 lld wi'e hQt') Ssis ilUff300 Dimsui Body Ported (Top Ported) lType 20 Manifold NVV3KF3-20-Stations-007 inch(mm L: Dimensions 19 20 14.84 15.59 (377) 't3.78 r4.53115.28 (350) (36s) (388) ( 1 r 1 ) ( 1

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Brass 12 12 Tube assembly Stainless steel Carbon steel Hexagon socket head cap screw (with SW) 13 13 Nut Armature assembly Brass 14 14 Rubber mount Return spring NBR Stainless steel 15 15 DIN connector type solenoid coil Tube assembly Stainless steel 16 16 Clip Nut Stainless steel Brass 17 17 DIN terminal gasket Rubber mount CR NBR 18 18 DIN connector DIN connector type solenoid coil 19

Power Valve: Economy Valve Series VEX5

133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions g Grommet h Grommet terminal i Conduit terminal j DIN terminal a Model b d e f VEX5500 VEX5501 19

NAMUR

Note) For other voltages, please contact SMC. 3-12-1 A Series VFN2000N Dimensions (mm) VFN2120N--02 148 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 37 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 3-1/4 3 4 5 1 Manual override (Non-locking) 23 23 VFN2220N--02 224.5 19 23 Applicable heavy-duty cord O.D.6 to 8 Pg9 24 66.5 57 32 40 14 Pilot EXH. 2-5.5 Mounting hole 189 3-1/4 3 4 5 1

EX120/121/122

Refer to page 1651. 4 unit mounting screws (M4 x 10) are included when shipped. 1654 Integrated Type/For Output Series EX123/124/126 SI Unit Dimensions/Parts Description EX123-S, EX124-S Position indicator LED Screw terminal block 56.4 11.6 53.8 19 Housing cover Housing cover diagram 19 114 5.5 19.8 EX123: 2 x G1/2 EX124: 4 x G1/2 Conduit port (72.5) 67 EX EX126D-SMJ1 Position indicator LED

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

port 2 x M5 x 0.8 GA NN MM Piping port M5 x 0.8 Cover surface 0 0.3 BA CB D FY FB With head cover port in axial location (R) 2 x FC Mounting hole FX FZ NA F FT 0 0.3 BB NB A S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19

Ionizer Series IZS31

A connector is not used. 19 20 19 m 20 m Power supply cable 642 A

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

(mm) TIL13 1/2" 1/2" x 3/8" 12.7 TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TIL11 3/8" 3/8" x 1/4" 9.53 TIL07 1/4" 1/4" x 5/32" 6.35 TILB01 1/8" 1/8" x 1/16" 3.18 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TL0403 4 x 3 4 TIL05 3/16" 3/16" x 1/8" 4.75 TIL01 1/8" 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 0.1 0.1

ChemicalThermo-con Series HED SEMI

Temperature controller Heat exchanger 007 B HED W 2 13 Tube size Chemical Thermo-con 13 19 1/2" x 3/8" 3/4" x 5/8" Communication Cooling capacity A B RS-485 RS-232C 003 005 007 300 W 500 W 750 W 2 Power supply Radiating method W Water-cooled Single-phase 180 to 242 VAC 50/60 Hz Combination in Set Heat exchanger model HED003-HW13 HED003-HW19 HED003-HW13 HED003-HW19 HED005-HW13 HED005-HW19

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

Compact Cylinder

Hs A B (mm) D-M9 D-M9W D-M9V D-M9WV D-A9V D-A9 Bore size (mm) A B A B W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 38.5 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 The value in parentheses [ ] is for 5 mm stroke with

Soft Start-up Valve

1 to 6D/Y(Z)m-A 3/4, 1 3/4, 1 3/4 128 109 59 53 74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19

Air Cylinder

8 19 @0 21 Rod seal NBR Component part numbers: !6, !7, !8, @0. Cushion seal Urethane 19 and 21 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

Body Class: 5 (Orifice Dia. ø16), Valve Type: 0 (N.C.), Applicable Tubing Size: 19 (19 x 16 or 3/4" x 5/8"), Pilot Port Thread Type: N (NPT 1/8), Pilot Port Position: None (Position 1), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM), Option: 1 (w/Flow Rate Adjustment)

Body Class: 5 (Orifice Dia. ø16), Valve Type: 0 (N.C.), Applicable Tubing Size: 19 (19 x 16 or 3/4" x 5/8"), Pilot Port Thread Type: N (NPT 1/8), Pilot Port Position: None (Position 1), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM)

Body Class: 5 (Orifice Dia. ø16), Valve Type: 0 (N.C.), Applicable Tubing Size: 19 (19 x 16 or 3/4" x 5/8"), Pilot Port Thread Type: Rc 1/8, Pilot Port Position: None (Position 1), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM)

Body Class: 5 (Orifice Dia. ø16), Valve Type: 0 (N.C.), Applicable Tubing Size: 19 (19 x 16 or 3/4" x 5/8"), Pilot Port Thread Type: Rc 1/8, Pilot Port Position: None (Position 1), Material: F (Body: PFA; End Plate: PVDF; Diaphragm: PTFE; Seal, Buffer: FKM), Option: 1 (w/Flow Rate Adjustment)