Table of Contents

6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5

Smooth Cylinder/Low Speed Cylinder

n-2) (n = 4, 6) Note 5) D-M9V 5 5 10 + 15 (n-2) (n = 4, 6) Note 5) D-A9V 10 5 D-M9 D-A9 15 + 15 (n-2) (n = 4, 6) Note 5) 10 10 (5) D-M9WV D-M9AV D-M9W D-M9A 15 + 15 (n-2) (n = 4, 6) Note 5) 15 10 20 + 15 (n-2) (n = 4, 6) Note 5) 15 15 (10) D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n-2) (n = 4, 6) Note 5) 10 5 Rail mounting D-A7H D-A80H 15 + 15 (n-2) (n = 4, 6) Note 5) 10 5 10

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

ZP

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

7.5

(There is a piping of X, PE port in the both sides.) 34.3 23.6 15.6 15 3/5 3/5 3/5 2 2 2 2 2 2 2 30.6 32.5 46.2 54.5 1 1 1 58.2 4 4 4 4 4 4 4 D D D M3 x 0.5 [4(A), 2(B) port] One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" One-touch fitting (PE: Pilot EXH port) Applicable tubing O.D: 4, 5/32"

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VP7 3 5 Plug-in: SS5Y -Type 45 VQC Q 5 SY 5 1 FU Single solenoid: 5 SQ Q 5C FU Double solenoid: 5 SY 5 1 VQ VQ4 Series Manual override 3 SY300 5 SY500 Nil Non-locking push type VQ5 D Push-turn locking slotted type E Push-turn locking lever type VQZ Type of actuator 1 Normally closed (N.C.) Rated voltage VQD 2 Normally open (N.O.)

NCQ8

/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 1/2 3 3/4 4 4 1/4 4 3/4 5 1/4 5 3/4 6 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 3/8 3 5/8 3 7/8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 2 7/8 3 3 1/8 3 1/4 3 3/8 3 1/2 3 5/8 3 7/8 4 1/8 4 3/8 4 5/8 5 1/8 5 5/8 6 1/8 6 5/8 1/4-20UNC-2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 3/8 3 5/8 3 7/8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 5/16-18UNC-2 7/8 3 3 1/8 3 1/4 3 3/8 3 1/2 3 5/8 3

HRX-OM-M005

4.5 Product Startup and Shutdown . 4-5 4.5.1 Product startup . 4-5 4.5.2 Product shutdown . 4-5 Chapter 5 Product Operation. 5-1 5.1 Operation Touch Panel. 5-1 5.2 Flow Chart of Operation Screen . 5-2 5.2.1 Flow Chart of Operation Screen (1) . 5-2 5.2.2 Flow Chart of Operation Screen (2) . 5-3 5.3 Operation Screen . 5-4 5.3.1 Initial screen . 5-4 5.3.2 Main screen . 5-5 5.3.3 Special mode

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

SV

Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections

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5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

NCA1

3/4 2.48 2 3/8 5 1/4 325 (3.25") 1 3 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1/4 3/8-24 3/4 0 1/2 5/8 1.57 1.18 2.76 5/8 1/2-13 1 1/2 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA

NCA1

5/8 2.40 2 1/4 5 1/8 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2.19 19/32 3/8-18 1 1/4 1 3/8 2 5/16 2.13 3 3/4 2.48 2 3/8 5 1/4 325 (3.25") 1 3 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1/4 3/8-24 3/4 0 1/2 5/8 1.57 1.18 2.76 5/8 1/2-13 1 1/2 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0

Table of Contents

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 35 35 5.5 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge G36 01 Connection thread GC3 4 4 AS Nil

ZP

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

SYJ3000/5000/7000

For SYJ5000, refer to page 1-5-41, and for SYJ7000, refer to page 1-5-64.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

5/16'' EX510 Gateway-type Serial Transmission System Type 20SA 5 port body ported 10-SYJ5000 R P R P. 325 Type 21SA 5 port body ported 10-SYJ3000 P. 297 10-SYJ7000 R P P. 355 Type 32SA 4 port base mounted 10-SYJ3000 R P P. 298 Type 41SA 5 port base mounted 10-SYJ5000 P. 326 10-SYJ7000 P R P. 356 Type 42SA 5 port base mounted 10-SYJ5000 R P P. 326 Type 43SA 5 port base mounted 10-SYJ5000 P

CQ2

Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 A L L1 37 3.5 3.5 4.5 5 14 39.5 44 15.5 18.5 22.5 45.5 Double clevis (mm) Bore (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 A B CD CT N RR CL CU CW CX CZ L L1 51.5 55 63 45.5 49 54 M4 X 0.7 28 5 5 8 10 4 4 5 5 6 6 9 10 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 M4 X 0.7 30.5 15.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

4 5.