Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1 W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Separate switch spacers (BMG2-012) are required to retrofit auto switches (M9 type) on cylinders 25 to 63. 21 m type lead wire is only applicable to D-A93. Refer to page 1360 for details on other applicable auto switches than listed above. For details about auto switches with pre-wired connector, refer to pages 1648 and 1649. Auto switches are shipped together (not assembled).
A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.
A96 A93 A90 5 V Yes IC circuit Individual -X Grommet No 2-wire 100 V Relay, PLC 24V 12 V IC circuit 100 V or less Solid state auto switches marked are produced upon receipt of order.
A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 2 1 m lead wire is only applicable to the D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.
Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.
Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.
(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.
(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.
3-wire (NPN) Relay, PLC IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 24 V 12 V Grommet 3-wire (NPN) 5 V, 12 V 3-wire (PNP) Water resistant (2-color indication) 2-wire 12 V With diagnostic output (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit IC circuit IC circuit Magnetic field resistant (2-color indication) 2-wire (Non-polar) A96 A93
Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,
Grommet 3-wire (NPN) 3-wire (PNP) 5 V,12 V M9PA Water resistant M9BA (2-color indication) 12 V 2-wire G5BA 5 V,12 V G59F F59F $ $ IC circuit With diagnostic output (2-color indication) 4-wire (NPN) P3DW P4DW Magnetic field resistant 2-wire (Non-polar) (2-color indication) A96 A93 A90 A54 A64 3-wire (NPN equiv.
A96 A96V 5 V IC circuit Grommet Yes A93 A90 A93V A90V IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Lead wire length symbols: 0.5 m .Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.
However, please contact SMC for water-resistant cylinder of 20 and 25. 2 1 m type lead wire is only applicable to D-A93. 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
(Or None in the Case of No Switch), Lock Unit Built-in Magnet: D (Built-in), Lock Unit Switch Type: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M
Consult with SMC regarding water resistant types with the above model numbers. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order. For D-P3DWA, 32 to 63 are available.
IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.