HRX-OM-S004

Y strainer (40 meshes) 20A 1pc. Barrel nipple 20A 1pc. Drain pan for the pump 1pc.

Standby E/P Regulator (Air Management System/ELECTRO-PNEUMATIC REGULATOR)

When {1} is set, output pressure is held. 0x41 (65) 0 R/W Hold/clear U8 {1} Y The gain for the electro-pneumatic regulator can be adjusted in the range from 0 to 15. 0x42 (66) 0 R/W Gain U8 {9} Y The sensitivity of the electro-pneumatic regulator can be adjusted in the range from 0 to 7. 0x43 (67) 0 R/W Sensitivity U8 {2} Y 0x48 (72) 0 R Accumulated energizing time U32 {0} Y Displays accumulated

JXCx-OMU0026

Yaxis [Axis speed calculation] Composite travel distance = Target position 1 2 Z Z Y Y X X 2 2 2 Composite speed 1 2 1 2 (X2, Y2, Z2) Xaxis speed = ( 1 2 X X / Composite travel distance) Composite speed Y axis speed = ( 1 2 Y Y / Composite travel distance) Composite speed Z axis speed = ( 1 2 Z Z / Composite travel distance) X axis Composite speed Current position (X1, Y1, Z1) Z

CE

2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Series KP/KPQ/KPG

Clean One-touch fitting (for blow off) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection Tubing (rod) connection Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Plug Same dia. tubing 4 6 8 10 12 Different dia. tubing (plug-in reducer) Clean

Series KP/KPQ/KPG

Clean One-touch fitting (for blow off) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection Tubing (rod) connection Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Plug Same dia. tubing 4 6 8 10 12 Different dia. tubing (plug-in reducer) Clean

KP/KPQ/KPG

Clean One-touch fitting (for blowing) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 Thread connection Tubing (rod) connection R 1/8 R 1/4 R 3/8 R 1/2 Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer Plug Same dia. tubing 4 6 8 10 12 Different dia. tubing (plug-in reducer) Clean

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VZ (Except VQZ100) VQZ300 DIN terminal (Y) DIN terminal (YZ) Locking type (Tool required) VS VFN Except VQZ100 ) ( 3.2 4.1 Except VQZ100 ) ( 4-14-21 Base Mounted 22 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Slenoid Valve Precautions, refer to page 4-18-2.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

Cylinder with Lock Series CNS

Symbol Bore size (mm) H A L1 H1 Y type double knuckle I type single knuckle 125 140 160 Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H Dimensions When Mounting a Single/Double Knuckle Joint together with a Rod End Nut A H Bore size (mm) 125 140 160 65 125 65 125 76 140 Single knuckle joint and double knuckle joint should be used separately.

Soft Start-up Valve AV2000/3000/4000/5000 1

AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

After placing the tubing y in the holder assembly i, push it onto the insert bushing t until it stops and clamp it with the hook o. 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o Hook e Base Caution y Tubing t Insert bushing When the tubing y is curved, straighten

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(2 x M12 (5 pins)-M12 (5 pins)/SPEEDCON) Y connector For sensor #7 PCA-1557798 Y connector (2 x M8 (3 pins)-M12 (4 pins)/SPEEDCON) 219 M8/M12 Connector PCA/EX9/EX500 Series Other Accessories (EX500/EX9) p. 240 to 242 E B Cable with M12 connector Output block Seal cap (For socket) Power block EX260 EX123/124/126 EX500 EX600 EX245 EX250 EX120/121/122 EX140 EX180 EX510 M8/M12 ATEX Type 1 Type

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Spool valve assembly Resin/HNBR e r t !0 !1 i q q u y For N.O.

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

Symbol Description Applicable shaft type XA1 to XA24 Shaft type pattern1 W XA31 to XA58 Shaft type pattern2 S, J, K, T, Y XC1 Add connecting ports W, S, J, K, T, Y XC2 Change threaded hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation

48

A1 Light brown Light brown Red Black Red Black Red Black Red Black Red Black Red Black Red Shield Y ellow Light green Light green Gray Gray White White Light brown Light brown Y ellow Y ellow Light green Light green Black Red Black Red Black Red Black Red Black Red Black Red Black LEL Conductor size: AWG28 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 Y ellow Y ellow Light green Light green Gray

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

Cylinder with Lock Series CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H dimensions when single/double knuckle joint and rod end nut are mounted together A H Bore size (mm) 125 140 160 65 125 65 125 76 140 Single knuckle joint and double knuckle joint should be used separately. ( Fasten

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.