Model: 51 (Bottom Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 12 Stations, P, E Port Location: B (Both Sides), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), A, B Port Size: 01 (1/8), Thread: T (NPTF)

PSxx-OME0003CN

MPa 0-101 kPa 0101 kPa -101101 kPa -0.10 MPa 10.10 kPa -10.10 kPa 1.5 MPa 500 kPa DC1224 V10%(p-p)10%() 15 mA () DC15 V() DC0.61 V() 1 k (25 ) 2%F.S.(),5%F.S.() 1%F.S. 1%F.S.

VFR2000-OMM0001

(N.O.)3 3 B 1.VFR200 2.VFR210 P8 0.9Nm -10No.VFR2000-OMM0001 ) ARBF2000 P 1.0MPa 1) 0.05to0.83MPa 2) -5to60oC ()3) M5X0.8 (kg) 0.16 PA 5.5 (mm2) P1=0.7MPa,P2=0.5MPa S PB 5.1 DIN DIN DIN DIN / / / / AEA 12 (mm2) DIN 180 P2=0.5MPa S BEB 11 )0.9MPa ) )50oC )2 ) P A B -11 No.VFR2000-OMM0001 01C 01T COM A (A B B AB ) COM AB+ BVFR2100 A COM VFR2200 A COM B 3 400 5 A COM

Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: KAN (Negative Common, PNP; IO/Link; 32 Outputs; M12 Connector), Wiring Type: All Double Wiring, Valve Stations: 08 (8 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: One-touch: None; Thread Piping: Rc, Option: P (Trim Plate)

Compact and

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

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SI unit for Ethernet POWERLINK

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

SI unit for EtherCAT

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

SI unit for PROFINET

Dimensions for installation n: number of valve stations n L 1 2 3 4 5 6 7 8 L1 120.7 136.7 152.7 168.7 184.7 200.7 216.7 L2 80 96 112 128 144 160 176 n L 9 10 11 12 13 14 15 16 L1 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 L2 192 208 224 240 256 272 288 304 (mm) The above table shows dimensions as an example for the SY5000 series valve manifold.

NCQ2/CQ2

Applicable Cylinder Series: (N)CDQ2, (N)CDQ2W, (N)CDQ2www-wS/wT (Single acting), (N)CDQ2, (N)CDQ2W (Large bore size), (N)CDQ2K, (N)CDQ2KW, (Non-rotating rod), (N)CDQ2 (Long stroke), CDQ2wS (High lateral load) Auto switch type s e r u t a e F l e d o M e z i s e r o b e l b a c i l p p A y r t n e l a c i r t c e l E D-A72 D-A73 Grommet (Perpendicular) D-A80 Without indicator light D-A79W

Electric Actuator

Applicable stroke table Manufacturable stroke range [mm] Stroke [mm] Model 30 50 100 150 200 250 300 350 400 450 500 P P P P P P P P P P P P P P P P P P P P P LEY16 LEY25 LEY32 P P P P P P 10 to 300 15 to 400 20 to 500 Consult with SMC for the manufacture of intermediate strokes other than those specified on the above. w For the servo motor (24 VDC) specification, EMC compliance was

Air Cylinder

T E N T S Air Cylinder CJ2 Series Air Cylinder: Standard Type Double Acting, Single Rod CJ2 Series How to Order P.46 Specifications P.47 Construction P.49 Dimensions P.50 Dimensions of Accessories (Options) P.63 Precautions P.63-2 Air Cylinder: Standard Type Double Acting, Double Rod CJ2W Series How to Order P.64 Specifications P.65 Construction P.67 Dimensions P.68 Air Cylinder

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N01 (NPT 1/8), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: N7L (ø1/4" One-touch Fitting, Elbow Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: w/Unit Selection Function, Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Option 1: L (Lead Wire w/Connector, 2m), Option 2: B (Panel Mount Adapter)