3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

RHC A96V A96 IC circuit 5 V Yes A72 A93V A90V A73C A80C A79W A72H A93 A90 Grommet 12 V 200 V 100 V RZQ IC circuit IC circuit No Relay, PLC 5 V, 12 V 12 V 100 V or less 2-wire 24V Yes No Connector 5 V, 12 V 24 V or less DGrommet Yes Diagnostic indication (2-color indication) Auto switches marked with a "" symbol are produced upon receipt of order.

Round Type Hydraulic Cylinder ø 20, ø 25, ø 32, ø 40 CH  M Series

auto switch 2-wire 12 V Connector IC circuit Terminal conduit 5 V, 12 V 12 V 3-wire (NPN) 2-wire Relay PLC Yes 24 V 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V 3-wire (PNP) 2-wire Grommet 3-wire (NPN) Water resistant (2-color indicator) IC circuit 5 V, 12 V M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 12 V 5 V, 12 V 5 V H7NF A96 A93 A90 B54 B64

Cylinder with Lock Double Acting, Single Rod ø40, ø50, ø63, ø80, ø100 Series CNA2

12 V 3-wire (PNP) 24 V Grommet 12 V 2-wire 100 V, 200 V Reed auto switch Solid state auto switch 3-wire (NPN) Terminal conduit 12 V 2-wire 3-wire (NPN) Relay, PLC IC circuit Yes 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 24 V 12 V Grommet 3-wire (NPN) 5 V, 12 V 3-wire (PNP) Water resistant (2-color indication) 2-wire 12 V 4-wire (NPN) 5 V, 12 V IC circuit

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Applicable load Type 2-wire 3-wire Solid state auto switch Auto switch model D-M9B(V) D-M9N(V) Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less 5 to 40 mA 40 mA or less Load current range Indicator light Yes Yes 24 VDC relay, PLC PLC: Programmable Logic Controller Refer to page 946 for the applicable auto switches list.

Air Cylinder Short Type Standard: Double Acting, Single Rod CG3 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

circuit 5 V, 12 V 5 V With diagnostic output (2-color indicator) 100 V Grommet IC circuit 100 V or less B54 B64 100 V, 200 V Relay, PLC 12 V 2-wire 24 V 200 V or less C73C C80C Connector IC circuit 24 V or less B59W Grommet Diagnostic indication (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

CE

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Mist Separator Regulator

W Y Z B B B B B B B AWM20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWM30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWM40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.6 154.1 169.6 174.1 The dimension C is the length when the filter regulator knob is unlocked. -40- 13-2.

Ｍ icro Mist Separator Regulator

W Y Z B B B B B B B AWD20-D 30 34 43.9 5.4 15.4 55 2.3 29.7 28.5 14 6 117.9 104.4 100.4 106.9 AWD30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 157.1 123.9 122.2 117.8 122.3 137.8 142.3 AWD40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 186.9 155.6 153.9 149.6 154.1 169.6 174.1 The dimension C is the length when the filter regulator knob is unlocked. -40- 13-2.

Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

(NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay, PLC Yes Yes No No No Yes Yes Yes 24 V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Grommet 12 V 2-wire Water resistant (2-color indication) 4-wire (NPN) 5 V, 12 V IC circuit With diagnostic output (2-color indication) 3-wire (NPN equivalent) A96 IC circuit 5 V A93 A90 B54 B64 C73C C80C A33A

MNB

, PLC 100 V, 200 V Yes Yes 12 V PLC Terminal conduit 24 V 2-wire Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V 24 V Grommet 100 V, 200 V 2-wire 12 V 3-wire (NPN) 2-wire IC circuit Terminal conduit 5 V, 12 V 12 V Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication

MLGC

A B B A B A B 18 (26) A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 6 9 3 8 10 6.5 4.5 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 18 (26) 16 (24) 25 6 9 3 8 10 6.5 4.5 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 19 (27) 17 (25) 32 7 10 4 9 11 7.5 5.5 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30)

3 Port Solenoid Valve Metal Seal Series VZ200 1

Cv C[dm2/(sbar)] b Cv Flow characteristics 1 2 (P A) 2 3 (A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value

0.01

Note 1) VCA2: 7.5 VA Note) The type with square embedded pressure gauge does not have connection. 879 B

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

or less 25 24V 25 Relay, PLC Connector 24 V or less 100V IC circuit 3-wire Grommet 10 2-wire 24V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.

ZSP1

Hysteresis 0.5 kPa Internal orifice 0.5 0.8 Supply voltage 12 to 24 VDC (Ripple 10% or less) Output type NPN open collector 30 V, 80 mA Indicator light ON: When output is ON.

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

T OUT1 OUT2 A B C D E With panel mount adapter (For with flow adjustment valve) With panel mount adapter (For without flow adjustment valve) NPN PNP NPN NPN PNP PNP NPN PNP NPN PNP Analog 1 to 5 V Analog 4 to 20 mA Analog 1 to 5 V Analog 4 to 20 mA External input Note) Panel mount adapter A ZS-33-J ZS-33-JS Panel mount adapter A Panel mount adapter B Panel mount adapter B F G H External input

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

I G L H A V V M A U C U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

or less 25 24V 25 Relay, PLC Connector 24 V or less 100V IC circuit 3-wire Grommet 10 2-wire 24V IC circuit 100 V or less Solid state auto switches marked with are produced upon receipt of order.