Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 180, 200 250 300 +0.1 0 0.1 0.3 0.080 0.142 8 67 70 125 M45 x 1.5 42.5 44 40 50 40 115 105 4 5 4 x 55 MB +0.1 0 0.1 0.3 0.080 0.142 9 75.5 86 160 M56 x 2 53 66 50 63 50 144 132 5 6 5 x 65 +0.12 0 0.1 0.3 0.100 0.174 9 84.5 175 M64 x 2 66 71 105 63 80

Slide Unit Series CX2/CXWM/CXWL

ZZ (mm) With adjusting bolt ZZ 153 203 253 303 353 403 453 503 With shock absorber ZZ 203 253 303 353 403 453 503 553 Z Model F L P Q S SS CX225-25 CX225-50 CX225-75 CX225-100 CX225-125 CX225-150 CX225-175 CX225-200 28.5 31 33.5 33.5 46 58.5 71 83.5 43 66 91 116 141 166 191 216 25 45 65 90 90 90 90 90 125 175 225 275 325 375 425 475 27 52 77 102 127 152 177 202 82 107 132 157 182 207 232

Digital Flow Switch (Integrated display type)

(page 66) Button The flow adjustment valve fails to adjust the flow 2 Flow adjustme nt valve Loosen the lock ring, and then adjust the flow adjustment valve.

AC Servo Motor Driver (Pulse input type/Positioning type)

(SeeLECSA Operation Manual (Simplified Edition),section 5.3.2 for uploading.) 66 - 5.9.2 To Load saved Project From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters are stored. Please select the file you wish to import project [.mrc2]. Click Open.

Compact Vacuum Unit

Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size

BP1000

Please contact SMC. 2) Mass, including individual boxed weight, may vary depending on connections or options. 66 Back Pressure Regulator for General Applications Series BP1000 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material B Brass S 316 SS SH Wetted Parts Body Diaphragm

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 Data 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43 5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66

IO-Link/ELECTRO-PNEUMATIC REGULATOR

When {1} is set, output pressure is held. 0x41 (65) 0 R/W Hold/clear U8 {0} Y The gain for the electro-pneumatic regulator can be adjusted in the range from 0 to 16. 0x42 (66) 0 R/W Gain U8 {9} Y The sensitivity of the electro-pneumatic regulator can be adjusted in the range from 0 to 8. 0x43 (67) 0 R/W Sensitivity U8 {2} Y Set setting pressure zero point.

Table of Contents - Tubing

42 52 52 67 67 TCU0425-1N-X6 TCU0425-2N-X6 TCU0425-3-N-X6 TCU0604-1-N-X6 TCU0604-2-N-X6 TCU0604-3-N-X6 TCU0805-1-N-X6 TCU0805-2-N-X6 TCU1065-1-N-X6 TCU1065-2-N-X6 TCU1208 -1-N-X6 TCU1208 -2-N-X6 LX5.9 + 200 LX4.4 + 200 LX2.9 + 200 LX5.3 + 200 LX3.8 + 200 LX2.5 + 200 LX5.2 + 200 LX3 + 200 LX5 + 200 LX3 + 200 LX5 + 200 LX3 + 200 1 2 3 1 2 3 1 2 1 2 1 2 3 to 90 3 to 90 3 to 63 3 to 90 3 to 66

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B () (1)No.1(IN0ON) (2)DRIVEON No.1 (3)No.1 ON (OUT0ON) (2)(6)(10)(14) DRIVE (4)INPOFF (1) IN0 (5)BUSYON (9) IN1 PLC (6)DRIVEOFF (3) OUT0 (7)INPON (11) OUT1 (8)BUSYOFF (15)(12)(7)(4) INP No.1 (16)(13)(8)(5) (9)No.2(IN0OFF IN1ON) BUSY (10)DRIVEON 100mm(1 )50mm2 (11)No.2 ON (OUT1ON) (12)INPOFF (13)BUSYON (14)DRIVEOFF (15)INPON (16)BUSYOFF 100mm(1 )50mm2 66

SI unit for AS-Interface

N_m L 0 1 2 3 4 5 6 7 8 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 (mm) Wiring (for power supply, communication, input and output) and piping are carried out on one side only.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

D-M9WV 30 (37) 0 38 38 (55) 26 56 (63) 0 0 (17) D-A9, D-A9V 0 (15) 0 40 40 (55) 32 32 (47) 0 0 (15) 25 D-M9,D-M9V D-M9W, D-M9WV 40 (42) 0 40 50 (57) 47 72 (74) 15 10 (17) D-A9, D-A9V 0 (15) 0 50 50 (61) 38 38 (53) 0 0 (11) 32 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 50 55 (63) 38 48 (55) 0 5 (13) D-A9, D-A9V 0 (15) 0 54 54 (64) 48 48 (63) 0 0 (10) 40 D-M9, D-M9V D-M9W, D-M9WV 15 (22) 0 54 59 (66

Escapements Series MIW/MIS

to the Figure 1 for G thread PC PB PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 9 12.5 16.5 20 24.5 22 34 43.5 58 73 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 2.6 3.3 5.1 6.8 8.6 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66

Battery-less

) [64] 64 [(66)] 10 70 4 [2] 48 79 6.5 30 Motor cable (2 x 5) 60 46.8 7.5 M4 x 0.7 thread depth 8 (F.G. terminal) Motor option: With lock 24 Cable length 250 (194) 20 24 65 15 Lock cable (3.5) 5H9 (+0.030 0 ) depth 5 n x 5.5 6 60 150 15 B D x 150 (= E) 15 Dimensions [mm] *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

X Y (mm) Size Y X 10 3 19 Body (B) 15 6.5 20.5 Body (A) 20 7.5 22.5 30 8.5 26.5 40 9 36 11-3-31 66 Rotary Actuator Vane Style Series CRB1 Size: 50, 63, 80, 100 Series Variations CRB2 Fluid Air CRBU2 Size 50 63 80 100 CRB1 Single vane (S) Double vane (D) Vane type MSU S D S D S D S D CRJ Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported Axial ported

Proposals for Energy Saving

Dimensions Dimensions Q FB X Y + Stroke B + Stroke A + Stroke Bore size (mm) Y Q X 86 (94) 96 (105) 109 (121) 25 39 32 40 A Bore size (mm) 29 31 46 57 B FB 51 stroke or more 97.5 99 114 114 129 129 148 166 50 stroke or less 66 67.5 109 109 117.5 117.5 121 141 50 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 Note 1) Dimensions other than the above are the

Rotary Table

to 68 21 2 30 to 33 62 to 64 42 4 30 180 39 to 41 70 to 73 24 2 35 to 37 66 to 69 44 4 50 180 46 to 48 88 to 91 19 2 42 to 44 84 to 87 31 3 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

53

Inverter pump Triple inverter HRZD HRW 0.6 kW 1.8 kW Water-cooled refrigeration Air-cooled refrigeration HECR 377 [mm] 970 HEC 2.4 kW HEB Triple inverter HRSH090 HED *1 Under the conditions shown on page 128 HEA Cooling capacity 9.5 kW IDH 1080 0.1C Temperature stability (when a load is stable) Set temperature range 5C to 40C W 377 x H 1080 x D 970 mm Compact, Space-saving Low-noise design 66

100

rate Suction flow rate Air consumption Air consumption 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Supply pressure [MPa] Supply pressure [MPa] Standard supply pressure: 0.33 MPa (Without valve) 0.35 MPa (With valve) Time to Reach Vacuum Tank capacity: 1 L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66

ARM10/11

OUT fitting type AMR Inch size Metric size Straight Elbow Straight Elbow Symbol Symbol 4 5/32 6 1/4 ITV 4 6 5/32 1/4 04 05 16 17 54 55 66 67 Note 1) A pressure gauge with a full span of 0.4 MPa is attached. Note 2) The oil-free type has nongreased fluid contact areas. IC VBA A ARM11B 1 A R 1 06 Z Individual supply type VE 1 2 3 4 5 6 1.